JPS609199U - Cryo-condensing pump for neutral particle injection device - Google Patents
Cryo-condensing pump for neutral particle injection deviceInfo
- Publication number
- JPS609199U JPS609199U JP9940583U JP9940583U JPS609199U JP S609199 U JPS609199 U JP S609199U JP 9940583 U JP9940583 U JP 9940583U JP 9940583 U JP9940583 U JP 9940583U JP S609199 U JPS609199 U JP S609199U
- Authority
- JP
- Japan
- Prior art keywords
- cryo
- neutral particle
- particle injection
- cryopanel
- piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は中性粒子加熱装置の概略を示す断面図、第２図
はそれに付属する従来のクライオポンプの正面図、第３
図はそのＡ部詳細図、第４図は従来例における側面側よ
り配管を出す場合の詳細図、第５図は本考案のクライオ
ポンプ配管構造の一実施例を一部断面して示す正面図、
第６図はそのＡ部詳細図でａは正面図、ｂは側面図、第
７図は本考案のクライオポンプ配管構造の他の実施例を
示し第６図ａに相当する図である。
１・・・・・・イオンｉ、２−−−−−−イオンビーム
、３・・・・・・中性化セル、４・・・・・・偏向磁石
、５・・・・・・クライオポンプ、７・・・・・・中性
化されなかったビーム１．８・・・・・・真空容器、９
・・・・・・中性化されたビーム、１０・・・・・・プ
ラズマ、１１・・・・・・真空容器、１２・・・・・・
熱シールド、１３・・・・・・シェブロンバッフル、１
４・・・・・・パネル、１５・・・・・・熱流入阻止板
、１５′・・・・・・移動後の熱流入阻止板、１６・・
・・・・配管、１６′・・・・・・移動後の配管、１７
・・・・・・取付金具、１８・・・・・・ギャップ、１
９・・・・・・撓み管、２０・・・・・・貫通穴、２１
・・・・・・円筒状シールド、２２・・・・・・配管。
第−３図
−Ｍ、
￥ ５ 図 −
１４図
−１１−−−−Ｌ】： １−Ｎｚ
羞１図Figure 1 is a cross-sectional view schematically showing a neutral particle heating device, Figure 2 is a front view of a conventional cryopump attached to it, and Figure 3
The figure is a detailed view of part A, Figure 4 is a detailed view of the conventional example in which the piping is brought out from the side, and Figure 5 is a partially sectional front view of an embodiment of the cryopump piping structure of the present invention. ,
FIG. 6 is a detailed view of part A, in which a is a front view, b is a side view, and FIG. 7 is a view corresponding to FIG. 6a, showing another embodiment of the cryopump piping structure of the present invention. 1...Ion i, 2----Ion beam, 3...Neutralization cell, 4...Bending magnet, 5...Cryo Pump, 7... Beam not neutralized 1.8... Vacuum vessel, 9
...Neutralized beam, 10...Plasma, 11...Vacuum vessel, 12...
Heat shield, 13...Chevron baffle, 1
4... Panel, 15... Heat inflow blocking plate, 15'... Heat inflow blocking plate after movement, 16...
...Piping, 16'...Piping after movement, 17
......Mounting bracket, 18...Gap, 1
9...Flexible pipe, 20...Through hole, 21
......Cylindrical shield, 22...Piping. Figure-3-M, ￥5 Figure-14-11----L】: 1-Nz Photo 1
Claims (1)
却されるクライオパネルと、その周囲を液体窒素で冷却
される熱シールド、およびシェブロンバッフルを有する
中性粒子入射装置用クライオ凝縮型ポンプにおいて、前
記クライオパネルの液体ヘリウム配管をクライオ凝縮型
ポンプ内で水平に配管すると共に、前記熱シールド板に
設けられた貫通穴をこの水平配管が貫通して引出される
ようにし、かつ、前記熱シールド板の貫通穴は、前記ク
ライオパネルの熱膨張収縮分だけ水平管が移動しても配
管と接触しない大きさとし、しかも、配管外径と貫通穴
内径間の開口部を熱絶縁性の熱流入阻止板で覆い、該熱
流入阻止板は配管の移動分だけ熱シールド板面に沿って
移動可能なように遊合支持されたことを特徴とする中性
粒子入射装置用クライオ凝縮型ポンプ。A cryo-condensing pump for a neutral particle injection device that is built into a neutral particle injection heating device and has a cryopanel cooled with liquid helium, a heat shield surrounding the cryopanel that is cooled with liquid nitrogen, and a chevron baffle. The liquid helium piping of the cryopanel is horizontally piped within the cryo-condensing pump, and the horizontal piping is drawn out through a through hole provided in the heat shield plate, and the heat shield plate The through hole is sized so that it will not come into contact with the pipe even if the horizontal pipe moves by the amount of thermal expansion and contraction of the cryopanel, and the opening between the outer diameter of the pipe and the inner diameter of the through hole is provided with a heat insulating heat inflow prevention plate. A cryo-condensing pump for a neutral particle injection device, characterized in that the heat inflow prevention plate is loosely supported so as to be movable along the surface of the heat shield plate by the amount of movement of the piping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9940583U JPS609199U (en) | 1983-06-29 | 1983-06-29 | Cryo-condensing pump for neutral particle injection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9940583U JPS609199U (en) | 1983-06-29 | 1983-06-29 | Cryo-condensing pump for neutral particle injection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS609199U true JPS609199U (en) | 1985-01-22 |
| JPH0122949Y2 JPH0122949Y2 (en) | 1989-07-12 |
Family
ID=30235587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9940583U Granted JPS609199U (en) | 1983-06-29 | 1983-06-29 | Cryo-condensing pump for neutral particle injection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS609199U (en) |
-
1983
- 1983-06-29 JP JP9940583U patent/JPS609199U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0122949Y2 (en) | 1989-07-12 |
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