JPS60932A - Supplying device of ultrapure water - Google Patents

Abstract

PURPOSE:To supply ultrapure water to a using position without generating deterioration of water quality, by providing a steam supply device, a sterile filter, a discharge device of drain and a throttling and discharge device within a storage tank. CONSTITUTION:The titled device is provided with a manufacturing device 1 of ultrapure water and a storage tank 2 storing the ultrapure water manufactured by the device 1 within which a steam pouring pipe 15 which is a supply device of steam for sterilization, a sterile filter 6 supplying sterilized gas and a discharge device of drain are provided and orifices 8, 13 which are discharge devices for throttling and discharge of steam for sterilization are provided on the discharge device of drain and the sterile filter 6. With this construction, the storage tank 2 and the sterile filter 6 are sterilized jointly by steam and the ultrapure water is supplied to a using position 4 from the storage tank 2 through a duct 3 without deteriorating water quality.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultrapure water supply device. Highly purified water is used for cleaning water for the electronic industry, water for medicine, and water for nuclear power.

Moreover, in recent years, with the high oxidation of these industries, there has been a demand for ultrapure water whose purity is close to theoretically pure water.

Ultrapure water is produced by ultrapure water production equipment consisting of a combination of membrane separation equipment such as ultrafiltration membrane equipment and reverse osmosis membrane equipment, and ion exchange resin equipment tfC, and is stored in tanks, and from the tanks to pipes. Supplied to the point of use. However, bacteria may enter the area during use and reduce purity, and in some cases, the manufacturing equipment itself may become contaminated with bacteria. However, in processes that use this water, there is an inconvenience that the yield of products decreases. Once the production equipment becomes contaminated, it becomes difficult to produce highly purified water.

For this reason, conventionally the water in the storage tank is emptied about once a week and the inside is cleaned and sterilized with steam, but in order to open the inside of the tank to the atmosphere, a sterile air filter ( Since the filter (which prevents bacteria from entering the tank) cannot be sterilized at the same time, this filter must be removed and cleaned separately with steam, which is very time-consuming.

Therefore, the present invention has improved this storage tank so that it can be sterilized with steam together with an attached sterile air filter, and will be described below with reference to the illustrated embodiment.

1 is the above-mentioned ultrapure water production device, 3 is a storage tank for storing the ultrapure water produced by the above production device, and 3 is a pipe line for guiding the ultrapure water in the tank to the point of use D by a pump P.

A ventilation pipe 3 stands at the top of the storage tank, and a sterile air filter 6 is provided at its upper end.

The sterile air filter includes a filter element 6α with the upper end of the ventilation pipe 5 communicating with the inside, and an element AaV! An exhaust pipe 7 having a valve 2 and an orifice g, a throttle exhaust pipe 9 having a valve v3, and a gas injection pipe 10 for compressed air or the like having a valve v3 are connected.

The exhaust pipes 7 and 9 may not be connected to the case separately, but one of them may be connected to the case as shown in the figure, and the other may be connected in front of the valve. Also, for example, one or both of the exhaust pipes 9 can be connected in front of the valve V8 of the gas injection pipe 'f110, or conversely, the gas injection pipe /θ can be connected in front of the valve of either exhaust pipe 7 or 9. You can.

Also, a drain valve//, a steam trap/3, and an orifice/3 are connected to the bottom of the storage tank.

In this champion, the steam trap and orifice each have a valve and can be connected to the bottom of the tank individually, but they can also be connected in parallel as shown in the figure and connected to the bottom of the tank via valve 4. In this case, a valve Vll is also provided at the upstream end of the conduit 3,
It is easiest to connect valves V4 and V in a branched manner to a drain pipe connected to the bottom of the tank.

A steam injection pipe/S is provided with a valve v6 for pressurizing steam into the storage tank. In this example, the steam injection pipe/S
is connected to the ventilation pipe 5, but it may of course be connected directly to the tank. The replenishment pipe /6 for replenishing the storage tank with the ultrapure water produced by the manufacturing equipment Rt is provided with a valve (2) that is closed when cleaning the inside of the tank.

As a result, ultrapure water can always be supplied to the point of use via the valves V, , V, , V. Furthermore, v3
The interior of the storage tank is maintained under pressure with sterile gas through a sterile filter 6 so that the pressure is always higher than atmospheric pressure.

To clean the inside of the storage tank, open the drain valve/l to drain the water in the tank, and open the valve V, if necessary.
Also open the gas injection tube 10 with compressed gas (air). The sterile filter 6 is press-fitted into the upper space of the tank through the ventilation pipe S, and the water surface can be pressurized from above to promote drainage. In addition, keep the other valves closed. The water drained from the tank is returned to the raw water tank of the ultrapure water production equipment and used as raw water for the ultrapure water production equipment.

Once the water in the storage tank has been drained, open valve 6 and inject steam into the tank through the steam injection pipe to sterilize the tank. If air remains in the pipe and an air pocket is created,
It is preferable to completely evacuate the air prior to sterilization, since steam cannot sterilize surfaces in contact with the air reservoir due to air interference.

Steam injection pipe for that! Open only valve v6 of r to let in steam, fill the storage tank, sterile filter, and pipes connected to these with steam up to the front of each valve, and pressurize the steam.
Then, only valve v4 and drain valve // are opened to exhaust the internal steam and release the internal pressure. By repeating this step once or several times, the air remaining inside is completely discharged from the drain valve along with the steam.

To perform steam sterilization, open valve (6) of the steam injection pipe 15, and open valve (2) and valve (v4). As a result, the injected steam is discharged through the valve (1), the orifice (V4), the orifice (3), and the steam trap (2), thereby sterilizing the storage tank, the ventilation pipe (S), and the sterile filter (6) at the same time.

When steam sterilization is completed, open valve v3 of gas injection pipe 10 to introduce compressed air into storage tank 3 through sterile filter 6 and ventilation pipe S, and open valve v4 and exhaust valve // to discharge the air, thereby sterilizing the air. Cool the filter and tank. Then, once it has cooled, open the supply pipe/valve 6 and replenish the tank with ultrapure water, then turn on the valve ■.

②Open it and let the ultrapure water flow into the pipe 3 so that it can be taken out at the point of use.

The valves V to V♂ and the drain valve // are constituted by electromagnetic on-off valves, for example, and the above-mentioned operation can be made fully automatic. ) As is clear from the above description of the embodiments, according to the present invention, an orifice is connected to the sterile filter B, and an orifice /3 is also connected to the bottom of the tank 3. Therefore, by allowing the steam injected during the steam sterilization process to exit through these orifices, the storage tank and sterile filter can be sterilized at the same time, and the sterile filter can be removed and sterilized separately. The hassle is eliminated.

Further, the present invention is not limited to this, and for example, the valve vI and the drain valve//
If you use a regulating valve that can adjust the opening degree without using an on-off valve, and adjust the opening degree to a small value like an orifice during the steam sterilization process, the steam will be squeezed through this regulating valve and sterilized. Filters can be sterilized at the same time.

Thus, according to the present invention, by easily and completely sterilizing the ultrapure water storage tank and the attached sterile filter,
It will be possible to prevent the quality of ultrapure water that will be supplied to the point of use from now on to deteriorate.In addition to installing the entire device, the present invention can also be easily implemented by modifying an existing device. can.

[Brief explanation of the drawing]

The drawing is a flow sheet showing an embodiment of the present invention, and in the drawing,
l is ultrapure water production equipment, ko is storage tank, 3 is pipe, lI
is the location where it is used, O is the sterile filter, /I is the drain pipe, g
and /3 is an orifice exemplified as a throttle ejection means, lS
indicates a steam injection pipe.

Claims (1)

[Scope of Claims] (1) Ultrapure water comprising an ultrapure water production device, a storage tank for the ultrapure water produced by the ultrapure water production device, and a pipe line leading the ultrapure water from the storage tank to the point of use. In the water supply device, the storage tank is provided with a sterilizing steam supply means, a sterile filter for supplying sterile gas, and a drain discharge means, and the sterilization steam is squeezed and discharged into the drain discharge means and the sterile filter. An ultrapure water supply device characterized in that it is equipped with a throttle discharge means for each purpose. (2. In the device according to claim (1), the drain discharge means and the sterile filter constriction discharge means are orifices. The discharge means and sterile filter throttle discharge means is an ultrapure water supply device whose opening degree can be adjusted.