JPS6097537A - Sample device for electron-ray equipment - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sample device for an electron beam apparatus, and particularly to a sample device that allows a plurality of samples to be exchanged and moved to an observation position with a simple operation.

Conventionally, if we take an electron microscope as this type of sample device, for example, there is one shown in Figure 1. In this figure, 1 is the lens barrel of the electron microscope, and 2 is the electron beam axis in the V1 cylinder. (hereinafter referred to as the optical axis) is a cylindrical body inserted from the direction perpendicular to the optical axis, and is fixed to the lens barrel 1 via screws (I! A holder 4 is rotatably and rotatably held through the holder 4. A large number of samples 6a and 6 are held on the vacuum side of the holder 4 via a sample stage 5.
b is held by J5, and the popular side is held by the cylinder 2 so that this holder can rotate around the spherical part 3 in a plane perpendicular to the optical axis.

Reference numeral 7 denotes a push screw for rotating the holding body 4, which is screwed into the cylindrical body 2. Further, a spring 8 is provided in the opposite direction of the push screw 7 to maintain the engagement between the push screw and the holding body at all times. Reference numeral 9 denotes a moving rod arranged on an extension of the axis of the cylinder 2, and 41 moving rods slidably inserted into the lens barrel 1, and the vacuum side of the moving rod is connected to the sample stage via the connecting rod 10. It is connected to the tip of 5. For lens barrel 1 -
An actuation mechanism 15 for moving the sample in the X-axis direction is provided at a position opposite to the C cylinder 2, and the actuation mechanism 15 has an actuation mechanism 15 for moving the sample stage 5 in the X-axis direction with a rough movement. A sample coarse movement screw U that allows the sample to be moved by a small amount of movement in the X-axis direction, and a sample fine movement screw that allows the sample to be moved by a small amount of movement in the X-axis direction are incorporated. Also, when the push screw 7 is rotated and the push screw 7 is moved back and forth, the holder 4 rotates around the spherical bearing 3, so the sample stage 5 held at the tip moves in the direction of arrow C in the figure. The sample 6a moves along the optical axis in a direction perpendicular to the axis (X-axis) of the cylinder 2, that is, in the Y-axis direction. Furthermore, when it is desired to observe the sample 6b after observing the sample 6a, the sample table is moved in the X-axis direction by approximately J3 m by operating the coarse adjustment screw incorporated in the operating mechanism 15. ,
The trial can be quickly exchanged from 68 to 6b.

By the way, the size of a sample for an electron microscope is generally about 3 millimeters (m) in diameter, and in the above conventional example,
Trial exchange between adjacent samples 6a and 3b
1. Two samples 6a, 6. It is necessary to move at least 4 m+ including the distance b. In a coarse sample screw, moving the screw by 41+1111 requires turning the screw several times, which is cumbersome.

Moreover, when the number of samples is three, the complexity of exchanging two adjacent samples '1' increases. Furthermore, the trial 1'31 coarse sacrificial screw is located on the opposite side of the trial insertion position, which is located in the lens barrel 1, making it extremely complicated.

The present invention has been made to solve the above-mentioned drawbacks of the conventional art, and its purpose is to provide an electron beam system that allows the selection and change of observation samples to be carried out easily and quickly; It is to provide the following.

In order to achieve the above-mentioned object, the present invention has been developed to provide an electron beam in a direction perpendicular to the electron beam axis in a Vl cylinder in which an electron beam path is formed.
A rotatable sample stand is installed at the tip of the sample holding rod in the sample device into which the holding rod is inserted, and a rotatable sample stand is placed on the sample stand at a predetermined interval concentrically with respect to the rotation axis. The gist is that a plurality of sample holders are provided () and by rotating the sample stage, it is possible to selectively position any sample 1 at the observation position. For rotation operation of one unit, gear 17IN configuration or Buene m nr
i etc. each 4. ! However, by incorporating these power mechanisms into the sample holding rod, it is possible to rotate the sample table installed from the hand W of the sample holding 44 to the tip. is possible. Therefore, changing the sample can be performed very easily, and changing from one sample to another can be done extremely quickly.

Embodiments of the present invention will be described below with reference to the accompanying drawings.

2 to 4 show embodiments of ff1l of the present invention.
It is a diagram. Of these figures, the second figure shows a sample of 1 holding rod 1G.
FIG. 3 is an enlarged plan view showing the tip portion of the sample O'31 holding rod 16;
FIG. 4 is a side sectional view taken along line IV--IV in FIG. 3. In this embodiment, the sample holding rod 16 serves as a base for moving the sample holding rod 16 in and out of the lens barrel 1, and also controls operations such as tilting of the sample holding rod (or sample conversion operation, etc.). An operating section 16a, a power transmitting section 1GII that is connected to the forward position of the operating section +6a and transmits power to the operating section IGa, and an operating section 16c that is provided at the distal end of the power transmitting section IGb. Consists of an operating section 16
A is provided with a knob 20 for operating the sample switching and a positioning spindle 37 for positioning the sample holding rod 16 when it is coupled to the lens barrel 1.

A through hole 38 is formed along the longitudinal axis of the holding rod main body 19 corresponding to the power transmission portion 1 (iL+ portion), and a through hole 38 is formed in the through hole 38.
Drive for transmitting power to f! The I-axis 21 is loaded. Further, a rectangular housing portion 18 is formed in the holding rod main body 19 corresponding to the actuating portion 16c, and a sample converting mechanism 17 is installed in this ffj housing portion J3. The tip of the drive shaft 21 provided in the J force transmission section 1011 is connected to the sample converting mechanism 17, and transmits power to the sample converting mechanism 17. The first converter 4 has a first bevel gear 22 fixedly connected to the tip of the drive shaft 21, and meshes with the first bevel gear 22, so that the direction of power transmission by the drive shaft 21 is 90°.
The second bevel gear 23 to be converted, the wheel part and the shaft A.
71 to 71 are integrally formed, and are rotatably attached to the second bevel gear 23 and the holding rod main body 19 by fixed parts 25 and 26 at the shift part. A first spur gear 24 rotates together with the first spur gear 23, and has a 4M3 gear similar to the first spur gear 24, is rotatably attached to the holding rod main body 19 by a fixing part vJ28, and has a first spur gear 1p24. a second spur gear 27 that meshes with and rotates; a third spur gear 29 that is rotatably attached to the holding rod body 19 by a fixing member 30 and rotates while meshing with the second spur gear; The sample stand 31 is rotatably attached to the holding rod main body 19 by a fixing member 32 and rotates by meshing with a third spur gear.
This trial 1'31 unit 31 consists of a gear having the same basic configuration as the spur gear 24.27゜29 shown in Figs.
As is clear from the figure, there are four sample holders, that is, sample accommodating holes 33a, spaced apart at a predetermined interval on a concentric circle with respect to the rotation center @0 +.

33b, 33c, and 33d are formed to penetrate. Sample accommodation holes 33a, 33b, 33c,
33d, the upper half of the sample stage 31 is formed in a substantially rectangular cross-sectional shape, and the lower half has a taper that gradually expands downward (= J-shaped through hole and a step). A sample mesh and a sample 34a are provided at the stepped portion of each sample receiving hole.

34b, 34c, 34d, and sample fixing rings 35a, 35 for fixing these samples.
b, 35C.

35 (I) is fixed in each sample accommodation hole. Also, in the lower part of the sample stage 31 of the holding rod main body 19 that corresponds to the operating part 16c, there is a tapered through hole at the observation position that coincides with the optical axis 02. Holes 36 are formed, and as the sample stage 31 rotates, sample accommodation holes 33a, 3311, 33G, 3
3d are set to correspond to the through holes 36 in sequence.

The sample stage 31 is attached to the operation part 16a of the sample holding rod 16 (by rotating the lever 20, various gears 2 are assembled into the drive shaft 21 and the sample conversion shaft 17).
2.23.24.27.29 Rotation operation is applied to the sample stage 31, and the sample stage 31 rotates around 1f7 t1 in Fig. 3, or in the opposite direction, and enters the sample accommodation hole. Loaded samples 34a, 34b, 34c, 34
d can be sequentially aligned to the observation position. In the sample conversion mechanism 17, the sample conversion 1 horizontal 17 is configured J
By adjusting the gear ratios of the various gears, the rotation speed N1 of the knob and the rotation speed N2 of the test unit 31 can be freely varied. For example, if the gear ratio is set to A7, it will be possible to change from any sample to the adjacent sample by simply turning the knob 4 times. Moreover, the direction of rotation of the sample stage 31 during this rotation operation can be freely performed in the time t1 direction or in the counter-time h1 direction.
For example, one sample 34a can be changed to 34b or 34d by rotating the shaft 20 seven times in different directions, so sample exchange can be performed extremely easily and quickly. Even when switching to the sample 34c on the diametrically opposite side to the sample F3134a, the sample can be switched by turning the knob 20 once in the clockwise direction or in the counterclockwise direction. Switching from a sample to a pond sample can be done by turning the knob a maximum of 7 times, making the operation extremely simple.

FIG. 5 is a diagram showing a second embodiment of the present invention.

In this embodiment, the stand 40 in the first embodiment is
is installed rotatably. This second sample stage 40 is
It consists of a spur gear with the same structure as the sample stage 31,
By meshing with the sample stage 31, it can receive power transmission from the knob 20 and rotate in the 1st direction J at the time and in the 81st direction at the opposite time. Furthermore, like the sample stand 31, this second sample stand 40 has four concentric circles centered on the rotation center 03.
Sample holding parts, that is, sample accommodation holes 41a; 41b;
41c, 41d, and sample fixing rings 43a, 43b, 43c are formed in the sample accommodation holes.

Trial FI 42a, 42b fixed by 43d
, 42c.

42d is installed. The sample holding rod 1G has a phase 8 machine 4^1 (not shown) for moving the sample holding rod 16 in the longitudinal axis direction (referred to as the X-axis direction).
are connected, and by manipulating this coarse drawing, the sample holding rod 16 can be moved between the sample holding hole C provided in the sample stage 31 and the sample holding hole provided in the second sample stage 40. By moving the distance between the centers of the holding holes, it is possible to switch the observation position between the sample 11 placed on the sample stand 31 and the sample placed on the second sample stand 40. For example, in FIG. 5, if you want to see the sample placed on the sample stand 40 at 1 o'clock when the sample 113133a placed on the sample stand 31 coincides with the light W*02 and is at the observation position, the sample holding hole 33a sample accommodation hole 41 closest to
It is sufficient to roughly move the sample holding rod 16 in the X-axis direction by a distance of 9 so that the center of c coincides with the optical axis 02. After the sample holding rod 1G has been moved IJJ in the X-axis direction, by operating the knob 20, the force is transmitted to the sample conversion mechanism 17 and the sample stage 40 is rotated.
, 42b, 42c.

Switching operation can be performed between 42d and 42d. Therefore, according to this embodiment, by using the two sample stands 31 and 40, a total of 818 samples can be moved to the observation position and observed with extremely simple operations, which is not possible in the conventional C. A large number of samples can be attached to the sample holding rod at one time, which was previously impossible.

As described above, according to the present invention, the first number of the sample holding rod;
1; A rotatable sample stage is installed in the part, and on this sample stage, a plurality of sample holders are installed at a predetermined interval in a -C concentric relation to the rotation axis, and the sample stage is rotated. Selectively align any sample to the observation position using t! Because it is designed to be small, it is possible to install a large number of tubes on one sample holding rod, and it is also possible to switch from one sample to another easily and quickly. In addition, by having multiple rotatable sample stands, it is said that samples can be analyzed using a single sample holding rod. The effect is ((1).

[Brief explanation of drawings]

Fig. 1 is a view of a conventional electron beam device from 91 to 91, Fig. 2 is a side view of a sample holding rod used in a test F1 shield according to the first embodiment of the present invention, and Fig. The figures are an enlarged plan view, not showing the tip of the J3-mounted test 1'81, of the first embodiment; FIG. 5 is a plan view of the tip portion of the sample 1 holding rod used in the sample device according to the second embodiment of the present invention. 1... ε supporting direction 2... ``) 1 piece 3...
Spherical shaft 5... Sample stage 16... Sample holding rod 11... Sample conversion 1 rod 18
...(Horizontal storage section 19...Holding rod Fuku 20...
Knob 21... Drive shaft 22... '1st bevel gear 23... Second $ gear 2
4...First spur gear 1't 27...Second spur gear 2
9...Third spur gear 31...Sample stage 33a,
33b, 33c, 33d--Sample accommodation hole 3
4a, 34b, 34c, 34d--Sample 40...Second sample stand 41a, 41b, 41c, 41(+...
・Sample storage hole (sample holding part) 42a, 42t+, 42c, 42(1-・
・Sample 0+, 03...Rotation center axis of sample stage 02...
・Optical axis (electron beam axis)

Claims (1)

[Claims] In a sample device in which a sample holding rod is inserted into a vA cylinder in which an electron beam path is formed in a direction perpendicular to the electron beam axis, a rotatable sample stage is installed at the tip of the sample holding rod,
On this sample stage, a plurality of sample holders were provided at predetermined intervals on a circle concentric with the rotation axis, and by rotating the sample stage, it was possible to selectively align any sample to the observation position. A sample device for an electron beam device, characterized in that: