JPS61101231A - Removal of fluorine gas - Google Patents
Removal of fluorine gasInfo
- Publication number
- JPS61101231A JPS61101231A JP59221221A JP22122184A JPS61101231A JP S61101231 A JPS61101231 A JP S61101231A JP 59221221 A JP59221221 A JP 59221221A JP 22122184 A JP22122184 A JP 22122184A JP S61101231 A JPS61101231 A JP S61101231A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- fluorine
- neutralizing agent
- less
- fluorine gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052731 fluorine Inorganic materials 0.000 title claims abstract description 42
- 239000011737 fluorine Substances 0.000 title claims abstract description 42
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 239000007789 gas Substances 0.000 claims abstract description 69
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 22
- 230000003472 neutralizing effect Effects 0.000 claims abstract description 22
- 239000002912 waste gas Substances 0.000 claims abstract description 16
- 239000007787 solid Substances 0.000 claims abstract 5
- 238000000034 method Methods 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 abstract description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 4
- 239000011261 inert gas Substances 0.000 abstract description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 abstract 2
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 abstract 1
- 239000000920 calcium hydroxide Substances 0.000 abstract 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 abstract 1
- 235000011116 calcium hydroxide Nutrition 0.000 abstract 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 abstract 1
- 235000017550 sodium carbonate Nutrition 0.000 abstract 1
- 229910000029 sodium carbonate Inorganic materials 0.000 abstract 1
- 229910052734 helium Inorganic materials 0.000 description 7
- 239000001307 helium Substances 0.000 description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 6
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 4
- 239000002699 waste material Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000007865 diluting Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 241001474791 Proboscis Species 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006115 defluorination reaction Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は比較的低濃度の元素状フッ素ガス（以下フッ素
ガスと略す）を含有するガスからフッ素ガスを除去する
方法に関するものでおる。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for removing fluorine gas from a gas containing a relatively low concentration of elemental fluorine gas (hereinafter abbreviated as fluorine gas).
現在フッ素ガスは、プラスチックの表面フッ素化、各種
７ノ化物の合成及びエキシマレーザ−等にひんばんに使
用さｎているが、使用後の廃ガスは、Ｎ２ 、 Ａｒ
、 Ｊ（ｅ 、 Ｎｏ等の不活性ガスで希釈された希薄
フッ素ガスの状態である事が多く、これらを安全な低ｇ
！ｋｆ（許容濃Ｋ １ ｐｐｍ以下〕まで除去する必要
があるが、本発明はその除去方法を提供するものである
。Currently, fluorine gas is frequently used for surface fluorination of plastics, synthesis of various seven compounds, excimer laser, etc., but the waste gas after use is N2, Ar, etc.
It is often in the form of diluted fluorine gas diluted with an inert gas such as
! Although it is necessary to remove the particles to kf (permissible concentration K 1 ppm or less), the present invention provides a method for this removal.
従来技術
従来、フッ素ガスの除去方法としては、ソーダ石灰、活
性アルミナ等（以後中和剤という。）を充てんした固定
床に室温で７ツ累ガス含有廃ガスを通して脱フッ素する
乾式法やＫＯＨ及びＮａ ＯＨ水溶液等を用いたアルカ
リスクラバーにフッ素ガス含有廃ガスを通して脱フッ素
する湿式法等があった。Conventional technology Conventionally, methods for removing fluorine gas include a dry method in which waste gas containing 7-gases is passed through a fixed bed filled with soda lime, activated alumina, etc. (hereinafter referred to as a neutralizing agent) at room temperature, and a dry method in which defluorination is performed by passing waste gas containing 7 types of gases through a fixed bed filled with soda lime, activated alumina, etc. (hereinafter referred to as a neutralizing agent); There is a wet method in which fluorine gas is removed by passing fluorine gas-containing waste gas through an alkaline scrubber using an aqueous NaOH solution or the like.
これら檀々の方法のうち中和剤を充てんした固定床で室
温で、フッ素ガス含有廃ガスを処理しようとした場合１
．廃ガス中のフッ素濃度が、高濃度の場合には中和剤と
の反応が容易に生ずるため、処理後の排ガス中の７ツ累
ガス濃度をｊ ｐｐｍ以下にする事は可能であった。し
かし。Among these methods, when trying to treat fluorine gas-containing waste gas at room temperature with a fixed bed filled with a neutralizing agent, 1
．． When the fluorine concentration in the waste gas is high, it easily reacts with the neutralizing agent, so it was possible to reduce the concentration of fluorine in the waste gas after treatment to below 1 ppm. but.
嚇ガス中のフッ素ガスａ度が３０Ｖｏ１％以下の低濃度
になるに従い、廃ガス中の不活性ガス（’ｔ。As the concentration of fluorine gas in the threatening gas becomes low, below 30Vo1%, the inert gas ('t) in the waste gas decreases.
Ｈｅ 、 Ａｒ 、 Ｎｏ等うが相同的に瑠加し、低一
度の７ソ粱ガスとの反応不足を生ずる７こめ、併ガス中
にｉ ｐｐｍ以上の未反応７ツ素ガスが残存し、外気に
該排ガスを放出し７′ｃ場曾、大気汚染の原因になるこ
とは避けられなかった。He, Ar, No, etc. react homologously, causing insufficient reaction with the low-temperature 7-carbon gas, and more than i ppm of unreacted 7-carbon gas remains in the combined gas, causing it to leak into the outside air. It was inevitable that the exhaust gases would be released and cause air pollution.
一万、アルカリスクラバータイプにおいては各ｆＪ！濃
度のフッ素ガスを含む廃カスを許容濃度以下に処理出来
るものの、カス線速度を数ｃ１１％／秒という小さな堰
しかとれないため装置が大型化し、さらに除害系内ｔ−
真空状ＮＫ保つ事はできずもっばら加圧もしくは、若干
減圧状態時のみ、有効でおシ、しかも吸収剤を浴液とし
て取り扱かわねばならず取扱い上非常に不便なものであ
った。10,000, each fJ in the alkaline scrubber type! Although it is possible to treat waste waste containing a high concentration of fluorine gas to below the allowable concentration, the waste linear velocity can only be controlled at a small weir of a few c11%/sec, which increases the size of the equipment and further reduces the amount of waste inside the abatement system.
It is not possible to maintain NK in a vacuum, and it is only effective under highly pressurized or slightly reduced pressure conditions.Moreover, the absorbent must be handled as a bath liquid, which is very inconvenient in terms of handling.
発明が解決しようとする問題点
本発明は廃ガス中に比較的低′Ｕｌ！度で含有されてい
るフッ素ガスの除去において、乾式法における布告効率
の低さおよび湿式法における取扱い上の不便さ、装置の
大型化を解決するものである。Problems to be Solved by the Invention The present invention provides relatively low 'Ul! This method solves the low efficiency of the dry method and the inconvenience of handling and large-sized equipment of the wet method in removing fluorine gas contained in water.
問？゛１点を解決するための手段
本発明者らは、乾式法において、低濃度７ノ素ガスの中
和剤への吸収率は、温度に強く依存することを見出し、
本発明に到達したものである。Question? Means for Solving Point 1 The present inventors found that in a dry method, the absorption rate of low concentration 7-no gas into a neutralizing agent strongly depends on temperature.
This has led to the present invention.
即ち、排ガス中のフッ素濃度は、フッ素含有廃ガスを中
和剤を充てんした固定床で処理しようとした場合、■フ
ッ素濃度、■ガス線速度、■中和剤の床の厚さ、■中和
剤の温度の関数であると考えられ、この中でも特に中和
剤の温度が、実質上７ツ素ガス除去反応ｔ−強く支配す
る事が判明した。In other words, when attempting to treat fluorine-containing waste gas with a fixed bed filled with a neutralizer, the fluorine concentration in the exhaust gas is determined by: - fluorine concentration, - gas linear velocity, - thickness of the neutralizer bed, and - medium. It is thought that the temperature of the neutralizing agent is a function of the temperature of the neutralizing agent, and it has been found that the temperature of the neutralizing agent in particular strongly controls the reaction for removing nitrogen gas.
本発明における中和剤の適用温度は７０〜６００℃好ま
しくは１００−３００℃の範囲であシ、６００℃を越え
ると中和剤に吸着しているフッ素の脱離が若干進行する
傾向があり、排ガス中のフッ索漠ｉｔ−１ｐｐｍ以下に
保つ事が、非常に困難になると同時に中和剤の固結が生
じたシ装置の内部腐食が進行するので好１しくない。ま
た、７０℃未満では７ツ索ガスの除去が十分におこなわ
れず、１ ｐｐｍ以下とすることは困難でるる。The application temperature of the neutralizing agent in the present invention is in the range of 70 to 600°C, preferably 100 to 300°C; if the temperature exceeds 600°C, the desorption of fluorine adsorbed on the neutralizing agent tends to proceed slightly. This is undesirable because it becomes very difficult to maintain the fluorine content in the exhaust gas at less than 1 ppm, and at the same time, internal corrosion of the equipment progresses due to solidification of the neutralizer. Further, if the temperature is lower than 70°C, the removal of the seven-stranded gas will not be carried out sufficiently, and it will be difficult to reduce the concentration to 1 ppm or less.
不発明で、使用する中和剤はソーダ石灰、活性アルミナ
、Ｃａ（Ｏ）ｔ）１およびＣａＯ等が用いられ、形状ば
か粒状が好ｌしいが、粉末でも使用できる。また付着水
分を除去するため１００℃以上で数時間加熱真空乾燥し
て、中和剤の１Ｉｆｆ着水分を除去した後使用するのが
有利である。The neutralizing agent used herein is soda lime, activated alumina, Ca(O)t)1, CaO, etc., and is preferably in the form of granules, but powder may also be used. Further, in order to remove adhering water, it is advantageous to use the neutralizer after heating and vacuum drying at 100° C. or higher for several hours to remove the 1Iff adhering water of the neutralizer.
本発明において、適用されるフッ素ガス含有廃ガスの組
成は、Ｈｅ 、 ０２ 、 Ｎ！ 、 ＣＯ２、Ａｒ
、 Ｎｏや化学的に不活性なガス状７ノ化吻、たとえば
、ＣＩ＋Ｆ！ｎ＋ｔ ＋ ＳＦ６寺の混合ガスが、−ｆ
ｆ的”ｉｔ）、特にフッ素ガス濃度３０ ｖＯＬ％以下
の廃ガスに有用でちる。In the present invention, the composition of the applied fluorine gas-containing waste gas is He, 02, N! , CO2, Ar
, No or a chemically inert gaseous heptogenated proboscis, for example, CI+F! The mixed gas of n+t + SF6 is -f
It is particularly useful for waste gases with a fluorine gas concentration of 30 vOL% or less.
以下、実ａ？！ｌを挙げ不発明を詳述する。The following is real a? ! The non-invention will be explained in detail.
実施例１
フッ素ガスをヘリウムガスで各濃度に希釈調整したガス
１００１を１２０℃で１２０分間加熱真空乾燥した５〜
１５メツシユの粒状ソーダ石灰１７５ｇｒｔ−光てんし
た内径２．５ｃｍ、長さ６０偏の固定床式立型反応器上
部よシ、吸収線速度惚／ｓｅａ及び室温（２５℃）大気
圧下で、供給して処理した。処理後のガス中の７ノ素ガ
ス濃度を分析した結果を第１表に示す。Example 1 Gas 1001 prepared by diluting fluorine gas with helium gas to various concentrations was heated and vacuum dried at 120°C for 120 minutes.
15 mesh of granulated soda lime 175 grt - fed from the top of a fixed bed vertical reactor with an internal diameter of 2.5 cm and a length of 60 mm at absorption linear velocity/sea and room temperature (25°C) and atmospheric pressure. and processed it. Table 1 shows the results of analyzing the concentration of NO7 gas in the gas after treatment.
第 １ 表
実施例２
フッ素ガスをヘリウムガスで１ＶＯ１％に希釈調整した
ガス１００ ｆ！、を実施例１と同じ反応器及び中和剤
を用いて、反応器外部をヒーターで加熱しながら種々の
温度に調整して、大気圧下で供給した。得られたガスの
分析値を第２表に示す。Table 1 Example 2 Fluorine gas was diluted with helium gas to 1 VO 1% gas 100 f! Using the same reactor and neutralizing agent as in Example 1, the reactor was heated at various temperatures while heating the outside of the reactor with a heater, and was supplied under atmospheric pressure. The analytical values of the obtained gas are shown in Table 2.
＠ ２ 表
実施例３
フッ素カスをヘリウムガスで各磯度に希釈調整したガス
ｔｏｏ ｉを実施例！と同じ反応器及び中和剤を用いて
、反応器外部をヒーターで加熱しながら、温度を２００
℃に保ちつつ、大気圧下で反応器内線ａ度を５．０ｍ／
ｓｅａとして供給した。@ 2 Table Example 3 Examples of gas too i prepared by diluting fluorine sludge with helium gas to various degrees of ruggedness! Using the same reactor and neutralizing agent as above, while heating the outside of the reactor with a heater, raise the temperature to 200℃.
While keeping the temperature at
Supplied as sea.
得られたガスの分析値を第３次に示す。The analysis values of the obtained gas are shown in the third table.
第 ３ 異
実施例４
フッ素ガスをヘリウムガスで１Ｖｏ１％に希釈調整した
ガスｓｎを実施例！と同じ反応器及び中和剤を用いて、
反応器外ｎをヒーターで加熱しながら温度ｔ−２５０℃
に保ちつつ、真空ボンダを使用して各減圧下で供給した
。得られたガスの分析値を第４衣に示す。3rd Different Example 4 Example of gas sn obtained by diluting fluorine gas with helium gas to 1Vo1%! Using the same reactor and neutralizing agent as
Temperature t-250℃ while heating the outside of the reactor with a heater.
Each was supplied under reduced pressure using a vacuum bonder while maintaining the same temperature. The analysis values of the obtained gas are shown in the fourth column.
第 ４ 表
実施例５
フッ素ガスをヘリウムガスで１ｖ０１％に希釈調整した
ガスｔｏｏ ｉ ｔ−冥施同ｌと同じ反応器及び中和剤
ｒ用いて、反応器外部をヒーターで加熱しながら温度ｔ
−２００℃に保ちつつ、種々の線速度に調整して大気圧
下で供給した。得られたガスの分析値を第５表に示す。Table 4 Example 5 Fluorine gas was diluted to 1v01% with helium gas. Using the same reactor and neutralizing agent as in the same experiment, the temperature was adjusted to t while heating the outside of the reactor with a heater.
While maintaining the temperature at -200°C, various linear velocities were adjusted and supplied under atmospheric pressure. The analytical values of the obtained gas are shown in Table 5.
第 ５ 表
実施？ｌＪ ６
フッ素ガスをヘリウムガスで１７０１％に希釈調車した
ガス１００ Ｊ！を１〜】００メツシユの各中和剤を１
２０℃、１２０分加熱真空乾燥したもの２００ ｇｒを
充てんした実施例１と同じ反応器を用いて反応器外部を
ヒーターで加熱しながら温度を２５０℃に保ちつつ、大
気圧下で供給した。得られたガスの分析値に稟６餞に示
す。Implementation of Table 5? lJ 6 Fluorine gas diluted to 1701% with helium gas 100 J! 1 to 1 of each neutralizing agent of 00 mesh
Using the same reactor as in Example 1, which was filled with 200 gr that had been heated and vacuum-dried at 20°C for 120 minutes, the reactor was supplied under atmospheric pressure while heating the outside of the reactor with a heater and maintaining the temperature at 250°C. The analytical values of the obtained gas are shown in Figure 6.
第６条
実施例７
フッ素ガスを化学的に不活性なガス吠７ツ化物（”＜
ｒ ＳＦｓ ）で、ｌ ｖｏｘ％に希釈ｖＩ４ｉしたガ
ス１００ Ｊ２を実施例１と同じ反応器及び中和剤を用
いて、反応器外部をヒーターで加熱しながら温度を２０
００に保ちつつ、大気圧下で供給した。得られたガ・ス
の分析値を第７表に示す。Article 6 Example 7 Fluorine gas is converted into a chemically inert gas compound ("<
Using the same reactor and neutralizing agent as in Example 1, the gas 100 J2 diluted to l vox % with vI4i was heated to 20 J2 while heating the outside of the reactor with a heater.
00 and was supplied under atmospheric pressure. The analytical values of the gas obtained are shown in Table 7.
第 ７ 表
発明の効果
本発明のフッ素ガス除去方法は、低濃度、特に３０ＶＯ
１％以下のフッ素ガス含有廃ガスの処理に極めて有効で
あり、処理後の排出ガス中のフッ素ガス濃度を確実に０
．ｌｐｐｍ以下とすることができる。Table 7 Effects of the Invention The method for removing fluorine gas of the present invention is effective for removing fluorine gas at low concentrations, especially 30 VO
It is extremely effective in treating waste gas containing 1% or less fluorine gas, and ensures that the fluorine gas concentration in the exhaust gas after treatment is zero.
．． It can be less than lppm.
さらに、原料ガスを真空系で用いる必要のある用途にお
いては、真空ポンプのオイルが、フッ素ガスにより変性
を受けるため、真空ポンプよシ前に除害する必要がある
が、真空状態でも十分に除去能を有するものである。Furthermore, in applications that require raw material gas to be used in a vacuum system, the oil in the vacuum pump is denatured by fluorine gas, so it must be removed before the vacuum pump is used, but it can be removed sufficiently even in a vacuum. It has the ability.
Claims (1)
フッ素分を分離除去するに際して固形中和剤を７０℃以
上に加熱しつつ、当該ガスをこれらに接触させ該ガスの
出口排ガスフッ素濃度を１００ｐｐｂ以下に保つ事を特
徴とするフッ素ガスの除去方法。(1) When separating and removing fluorine content in waste gas containing 30 vol% or less fluorine gas, the solid neutralizing agent is heated to 70°C or higher and the gas is brought into contact with the solid neutralizing agent to reduce the fluorine concentration in the outlet exhaust gas. A method for removing fluorine gas characterized by keeping it at 100 ppb or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59221221A JPS61101231A (en) | 1984-10-23 | 1984-10-23 | Removal of fluorine gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59221221A JPS61101231A (en) | 1984-10-23 | 1984-10-23 | Removal of fluorine gas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61101231A true JPS61101231A (en) | 1986-05-20 |
| JPS643139B2 JPS643139B2 (en) | 1989-01-19 |
Family
ID=16763361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59221221A Granted JPS61101231A (en) | 1984-10-23 | 1984-10-23 | Removal of fluorine gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61101231A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5017499A (en) * | 1988-03-31 | 1991-05-21 | Central Glass Company, Limited | Method for analyzing fluorine containing gases |
| US5213767A (en) * | 1988-06-04 | 1993-05-25 | Boc Limited | Dry exhaust gas conditioning |
| US5417934A (en) * | 1988-06-04 | 1995-05-23 | Boc Limited | Dry exhaust gas conditioning |
| US6060034A (en) * | 1998-06-02 | 2000-05-09 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Abatement system for ClF3 containing exhaust gases |
| US6309618B1 (en) | 1999-03-12 | 2001-10-30 | Showa Denko K. K. | Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus |
| US8834824B2 (en) | 2005-10-07 | 2014-09-16 | Edwards Limited | Method of treating a gas stream |
| TWI624299B (en) * | 2015-12-01 | 2018-05-21 | Showa Denko Kk | Treatment method of exhaust gas containing fluorine element |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210418A (en) * | 1975-07-10 | 1977-01-26 | Katayama Chem Works Co Ltd | Controlling agent against adhesive organisms living in the sea |
-
1984
- 1984-10-23 JP JP59221221A patent/JPS61101231A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210418A (en) * | 1975-07-10 | 1977-01-26 | Katayama Chem Works Co Ltd | Controlling agent against adhesive organisms living in the sea |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5017499A (en) * | 1988-03-31 | 1991-05-21 | Central Glass Company, Limited | Method for analyzing fluorine containing gases |
| US5149659A (en) * | 1988-03-31 | 1992-09-22 | Central Glass Company, Limited | Method and apparatus for analyzing fluorine containing gases |
| US5213767A (en) * | 1988-06-04 | 1993-05-25 | Boc Limited | Dry exhaust gas conditioning |
| US5417934A (en) * | 1988-06-04 | 1995-05-23 | Boc Limited | Dry exhaust gas conditioning |
| US6060034A (en) * | 1998-06-02 | 2000-05-09 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Abatement system for ClF3 containing exhaust gases |
| US6309618B1 (en) | 1999-03-12 | 2001-10-30 | Showa Denko K. K. | Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus |
| US8834824B2 (en) | 2005-10-07 | 2014-09-16 | Edwards Limited | Method of treating a gas stream |
| TWI624299B (en) * | 2015-12-01 | 2018-05-21 | Showa Denko Kk | Treatment method of exhaust gas containing fluorine element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS643139B2 (en) | 1989-01-19 |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |