JPS6112092U - Feeding screw device for the stage - Google Patents

Feeding screw device for the stage

Info

Publication number
JPS6112092U
JPS6112092U JP9730384U JP9730384U JPS6112092U JP S6112092 U JPS6112092 U JP S6112092U JP 9730384 U JP9730384 U JP 9730384U JP 9730384 U JP9730384 U JP 9730384U JP S6112092 U JPS6112092 U JP S6112092U
Authority
JP
Japan
Prior art keywords
feed screw
stage
fixed
base
screw device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9730384U
Other languages
Japanese (ja)
Inventor
智秀 浜田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP9730384U priority Critical patent/JPS6112092U/en
Publication of JPS6112092U publication Critical patent/JPS6112092U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は′本考案の一部破断乎面図、第2図は第1図の
A−A断面図、第−3図は第2図のB−B断面図、第4
図は本考案装置を取り付けた戟物台の正面図、第5図は
第4図のC−C断面図である。 、〔主要部分の符号の説明〕、1・・・・・・送りねじ
、{2・・・・・・送りナット、3・・・・・・従動ナ
ット}(雌ねじ部材)、4・・・・・・圧縮コイルばね
(ばね手段)、{7A,7B・・・・・・平行板ばね、
8,8′・・・・・・押え金}(可撓連結手段)、10
・・・・・・移動台、11・・・・・・固定台。
Fig. 1 is a partially cutaway view of the present invention, Fig. 2 is a sectional view taken along line AA in Fig. 1, Fig. 3 is a sectional view taken along line BB in Fig.
The figure is a front view of a tool stand to which the device of the present invention is attached, and FIG. 5 is a sectional view taken along the line C--C in FIG. 4. , [Explanation of symbols of main parts], 1...Feed screw, {2...Feed nut, 3...Followed nut} (female thread member), 4... ... Compression coil spring (spring means), {7A, 7B ... Parallel leaf spring,
8, 8'... Presser foot} (flexible connection means), 10
...Moving table, 11...Fixed table.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] (1)固定台上を直進移動可能な移動台を有する移動載
物台において、前記移動台の移動方向に平行して前記固
定台と前記移動台のうちのいずれか一方に送りねみを回
転可能に固設すると共に、他方に前記送りねじの軸方向
には剛性が高く且つ該軸方向に直角な方向には可撓性を
有する板ばねを含む可撓連結手段を設け、前記送りねじ
の軸方向に相対変位可能にばね手段によつて付勢され且
つ回転方向には相対変位不能に互いに結合された一対の
雌ねじ部材を前記送りねじに螺合して設け、一方の前記
雌ねじ部材を前記可撓連結手段を介して前記他方の台に
結合して構成したことを特徴とする載物台の送りねじ装
置。
(1) In a movable stage having a movable stage that can move in a straight line on a fixed base, a feed bar is rotated to either the fixed base or the movable base in parallel to the moving direction of the movable base. and a flexible connecting means including a leaf spring having high rigidity in the axial direction of the feed screw and flexibility in the direction perpendicular to the axial direction, A pair of internally threaded members which are urged by a spring means so as to be relatively displaceable in the axial direction and coupled to each other so as not to be relatively displaceable in the rotational direction are screwed onto the feed screw, and one of the female threaded members is connected to the feed screw. A feed screw device for a stage, characterized in that it is connected to the other stage via a flexible connection means.
(2)前記可撓連結手段は、平面部分が前記送りねじ1
を挾むように設けられた2枚の平行板ばね7A,7Bと
押え金8,8′とから成り、一端は他方の台に固設され
、他端は前記一方の雌ねじ部材2の外周に設けられた平
打な切欠に段部2Bに固設されていることを特徴とする
載物台の送りねじ装置。
(2) The flexible connecting means has a plane portion that is connected to the feed screw 1.
It consists of two parallel leaf springs 7A, 7B and presser feet 8, 8', which are arranged to sandwich the two, one end of which is fixed to the other base, and the other end of which is fixed to the outer periphery of one of the female screw members 2. A feed screw device for a stage, characterized in that the feed screw device is fixed to a stepped portion 2B in a flat notch.
JP9730384U 1984-06-28 1984-06-28 Feeding screw device for the stage Pending JPS6112092U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9730384U JPS6112092U (en) 1984-06-28 1984-06-28 Feeding screw device for the stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9730384U JPS6112092U (en) 1984-06-28 1984-06-28 Feeding screw device for the stage

Publications (1)

Publication Number Publication Date
JPS6112092U true JPS6112092U (en) 1986-01-24

Family

ID=30656840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9730384U Pending JPS6112092U (en) 1984-06-28 1984-06-28 Feeding screw device for the stage

Country Status (1)

Country Link
JP (1) JPS6112092U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6335990U (en) * 1986-08-25 1988-03-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6335990U (en) * 1986-08-25 1988-03-08

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