JPS61127630U - - Google Patents
Info
- Publication number
- JPS61127630U JPS61127630U JP1001585U JP1001585U JPS61127630U JP S61127630 U JPS61127630 U JP S61127630U JP 1001585 U JP1001585 U JP 1001585U JP 1001585 U JP1001585 U JP 1001585U JP S61127630 U JPS61127630 U JP S61127630U
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- furnace core
- core tube
- discharge pipe
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims 5
- 239000000126 substance Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Description
第１図は本考案に係る半導体物品の縦型熱処理
装置の断面図、第２図は従来の半導体物品の縦型
熱処理装置の断面図、第３図は清浄工程の制御部
のブロツク図、第４図は第３図に示される制御部
の制御タイムチヤートである。
１１……炉芯管、１２……流入管、１２―１…
…流入口、１３……分岐弁、１４……排出管、１
４―１……排出口、１５……電磁弁、１６……ヒ
ータ、１７……ボード、１８……ウエハ。
FIG. 1 is a sectional view of a vertical heat treatment apparatus for semiconductor articles according to the present invention, FIG. 2 is a sectional view of a conventional vertical heat treatment apparatus for semiconductor articles, and FIG. 3 is a block diagram of a control section for a cleaning process. FIG. 4 is a control time chart of the control section shown in FIG. 11...Furnace core tube, 12...Inflow pipe, 12-1...
...Inflow port, 13... Branch valve, 14... Discharge pipe, 1
4-1...Exhaust port, 15...Solenoid valve, 16...Heater, 17...Board, 18...Wafer.
Claims (1)
が搬入される炉芯管と、該炉芯管に清浄用流体及
び前記物品の処理用流体を導くと共に流入口を炉
芯管内部に突設した流入管と、該流入管に接続さ
れ該流入管に導びかれる流体を選択的に導入する
分岐弁と、前記炉芯管の底部に設けられる流体の
排出口を有する排出管と、該排出管に接続され、
該排出管の開閉を行う電磁弁とを具備することを
特徴とする半導体物品の縦型熱処理装置。 (2) 前記流体は少なくとも清浄用薬品、清浄用
水或いは前記物品の処理用のガスを含むことを特
徴とする実用新案登録請求の範囲第１項記載の半
導体物品の縦型熱処理装置。[Claims for Utility Model Registration] (1) A furnace core tube on the outer periphery of which a heater is disposed and into which a semiconductor article is carried, and a furnace core tube in which a cleaning fluid and a processing fluid for the article are introduced and flowed. An inlet pipe whose inlet protrudes into the inside of the furnace core tube, a branch valve connected to the inflow tube for selectively introducing fluid guided into the inflow tube, and a fluid exhaust provided at the bottom of the furnace core tube. a discharge pipe having an outlet; connected to the discharge pipe;
A vertical heat treatment apparatus for semiconductor articles, comprising a solenoid valve that opens and closes the discharge pipe. (2) The vertical heat treatment apparatus for semiconductor articles according to claim 1, wherein the fluid includes at least a cleaning chemical, cleaning water, or a gas for treating the articles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1001585U JPH0514506Y2 (en) | 1985-01-29 | 1985-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1001585U JPH0514506Y2 (en) | 1985-01-29 | 1985-01-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61127630U true JPS61127630U (en) | 1986-08-11 |
| JPH0514506Y2 JPH0514506Y2 (en) | 1993-04-19 |
Family
ID=30490807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1001585U Expired - Lifetime JPH0514506Y2 (en) | 1985-01-29 | 1985-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0514506Y2 (en) |
-
1985
- 1985-01-29 JP JP1001585U patent/JPH0514506Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0514506Y2 (en) | 1993-04-19 |
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