JPS61131640U - - Google Patents
Info
- Publication number
- JPS61131640U JPS61131640U JP1568385U JP1568385U JPS61131640U JP S61131640 U JPS61131640 U JP S61131640U JP 1568385 U JP1568385 U JP 1568385U JP 1568385 U JP1568385 U JP 1568385U JP S61131640 U JPS61131640 U JP S61131640U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- semiconductor
- pressure
- thin film
- glass thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 2
- 230000015556 catabolic process Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1568385U JPS61131640U (sr) | 1985-02-06 | 1985-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1568385U JPS61131640U (sr) | 1985-02-06 | 1985-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61131640U true JPS61131640U (sr) | 1986-08-16 |
Family
ID=30501748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1568385U Pending JPS61131640U (sr) | 1985-02-06 | 1985-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61131640U (sr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH028723A (ja) * | 1988-06-27 | 1990-01-12 | Shindengen Electric Mfg Co Ltd | 圧力検出装置 |
| JP2005043351A (ja) * | 2003-07-04 | 2005-02-17 | Robert Bosch Gmbh | マイクロマシニング型の圧力センサ |
-
1985
- 1985-02-06 JP JP1568385U patent/JPS61131640U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH028723A (ja) * | 1988-06-27 | 1990-01-12 | Shindengen Electric Mfg Co Ltd | 圧力検出装置 |
| JP2005043351A (ja) * | 2003-07-04 | 2005-02-17 | Robert Bosch Gmbh | マイクロマシニング型の圧力センサ |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS61131640U (sr) | ||
| JPS61149851U (sr) | ||
| JPS6358731U (sr) | ||
| JPS62116506U (sr) | ||
| JPS61205154U (sr) | ||
| JPS61192460U (sr) | ||
| JPS59179352U (ja) | 半導体圧力センサ | |
| JPS627045U (sr) | ||
| JPH0184041U (sr) | ||
| JPH0293730U (sr) | ||
| JPS61182036U (sr) | ||
| JPS61205155U (sr) | ||
| JPS61110138U (sr) | ||
| JPS6172866U (sr) | ||
| JPS6144541U (ja) | 半導体容量形圧力センサ | |
| JPS6262234U (sr) | ||
| JPS58165641U (ja) | 差圧測定装置 | |
| JPH0197232U (sr) | ||
| JPH0213753U (sr) | ||
| JPS6236551U (sr) | ||
| JPS60125752U (ja) | 半導体感圧素子 | |
| JPS6375833U (sr) | ||
| JPS5915942U (ja) | 半導体圧力変換器 | |
| JPS6212125U (sr) | ||
| JPS59113732U (ja) | 半導体圧力変換器 |