JPS61132812A - 変位検出装置 - Google Patents

変位検出装置

Info

Publication number
JPS61132812A
JPS61132812A JP25467184A JP25467184A JPS61132812A JP S61132812 A JPS61132812 A JP S61132812A JP 25467184 A JP25467184 A JP 25467184A JP 25467184 A JP25467184 A JP 25467184A JP S61132812 A JPS61132812 A JP S61132812A
Authority
JP
Japan
Prior art keywords
light
slit
displacement
slit plate
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25467184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0467601B2 (2
Inventor
Toshiki Ito
俊樹 伊藤
Takeshi Fukada
毅 深田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP25467184A priority Critical patent/JPS61132812A/ja
Publication of JPS61132812A publication Critical patent/JPS61132812A/ja
Publication of JPH0467601B2 publication Critical patent/JPH0467601B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP25467184A 1984-11-30 1984-11-30 変位検出装置 Granted JPS61132812A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25467184A JPS61132812A (ja) 1984-11-30 1984-11-30 変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25467184A JPS61132812A (ja) 1984-11-30 1984-11-30 変位検出装置

Publications (2)

Publication Number Publication Date
JPS61132812A true JPS61132812A (ja) 1986-06-20
JPH0467601B2 JPH0467601B2 (2) 1992-10-28

Family

ID=17268241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25467184A Granted JPS61132812A (ja) 1984-11-30 1984-11-30 変位検出装置

Country Status (1)

Country Link
JP (1) JPS61132812A (2)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6332305A (ja) * 1986-07-25 1988-02-12 Komatsu Ltd 光位置検出素子
JPS63180817A (ja) * 1987-01-22 1988-07-25 Sankyo Seiki Mfg Co Ltd 光エンコ−ダ
WO2001096816A1 (en) * 2000-06-15 2001-12-20 Scanlab Ag A position detector for a scanning device
EP1071929B2 (en) † 1998-04-17 2011-10-26 Cambridge Technology, Inc. Axial led position detector for determining the angular position of a rotatable element

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6332305A (ja) * 1986-07-25 1988-02-12 Komatsu Ltd 光位置検出素子
JPS63180817A (ja) * 1987-01-22 1988-07-25 Sankyo Seiki Mfg Co Ltd 光エンコ−ダ
EP1071929B2 (en) † 1998-04-17 2011-10-26 Cambridge Technology, Inc. Axial led position detector for determining the angular position of a rotatable element
WO2001096816A1 (en) * 2000-06-15 2001-12-20 Scanlab Ag A position detector for a scanning device
US6921893B1 (en) 2000-06-15 2005-07-26 Scanlab Ag Position detector for a scanning device

Also Published As

Publication number Publication date
JPH0467601B2 (2) 1992-10-28

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