JPS61137672U - - Google Patents
Info
- Publication number
- JPS61137672U JPS61137672U JP1985020341U JP2034185U JPS61137672U JP S61137672 U JPS61137672 U JP S61137672U JP 1985020341 U JP1985020341 U JP 1985020341U JP 2034185 U JP2034185 U JP 2034185U JP S61137672 U JPS61137672 U JP S61137672U
- Authority
- JP
- Japan
- Prior art keywords
- bell gear
- plate
- susceptor
- wafer
- mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985020341U JPS61137672U (da) | 1985-02-14 | 1985-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985020341U JPS61137672U (da) | 1985-02-14 | 1985-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61137672U true JPS61137672U (da) | 1986-08-27 |
Family
ID=30510735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985020341U Pending JPS61137672U (da) | 1985-02-14 | 1985-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61137672U (da) |
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1985
- 1985-02-14 JP JP1985020341U patent/JPS61137672U/ja active Pending