JPS61155292A - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS61155292A
JPS61155292A JP59277327A JP27732784A JPS61155292A JP S61155292 A JPS61155292 A JP S61155292A JP 59277327 A JP59277327 A JP 59277327A JP 27732784 A JP27732784 A JP 27732784A JP S61155292 A JPS61155292 A JP S61155292A
Authority
JP
Japan
Prior art keywords
gas
reaction tube
raw material
vapor phase
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59277327A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0529637B2 (de
Inventor
Akihiko Okamoto
明彦 岡本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP59277327A priority Critical patent/JPS61155292A/ja
Publication of JPS61155292A publication Critical patent/JPS61155292A/ja
Publication of JPH0529637B2 publication Critical patent/JPH0529637B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP59277327A 1984-12-26 1984-12-26 気相成長装置 Granted JPS61155292A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59277327A JPS61155292A (ja) 1984-12-26 1984-12-26 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59277327A JPS61155292A (ja) 1984-12-26 1984-12-26 気相成長装置

Publications (2)

Publication Number Publication Date
JPS61155292A true JPS61155292A (ja) 1986-07-14
JPH0529637B2 JPH0529637B2 (de) 1993-05-06

Family

ID=17581980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59277327A Granted JPS61155292A (ja) 1984-12-26 1984-12-26 気相成長装置

Country Status (1)

Country Link
JP (1) JPS61155292A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02291113A (ja) * 1989-04-29 1990-11-30 Toyoda Gosei Co Ltd 窒化ガリウム系化合物半導体の気相成長装置
US5180571A (en) * 1990-05-30 1993-01-19 Idemitsu Petrochemical Company Limited Process for the preparation of diamond

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02291113A (ja) * 1989-04-29 1990-11-30 Toyoda Gosei Co Ltd 窒化ガリウム系化合物半導体の気相成長装置
US5180571A (en) * 1990-05-30 1993-01-19 Idemitsu Petrochemical Company Limited Process for the preparation of diamond

Also Published As

Publication number Publication date
JPH0529637B2 (de) 1993-05-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term