JPS61164043U - - Google Patents
Info
- Publication number
- JPS61164043U JPS61164043U JP1985046517U JP4651785U JPS61164043U JP S61164043 U JPS61164043 U JP S61164043U JP 1985046517 U JP1985046517 U JP 1985046517U JP 4651785 U JP4651785 U JP 4651785U JP S61164043 U JPS61164043 U JP S61164043U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- cassette
- cassette holder
- holder
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Pile Receivers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985046517U JPH0143870Y2 (2) | 1985-03-29 | 1985-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985046517U JPH0143870Y2 (2) | 1985-03-29 | 1985-03-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61164043U true JPS61164043U (2) | 1986-10-11 |
| JPH0143870Y2 JPH0143870Y2 (2) | 1989-12-19 |
Family
ID=30560985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985046517U Expired JPH0143870Y2 (2) | 1985-03-29 | 1985-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0143870Y2 (2) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59192836U (ja) * | 1983-06-10 | 1984-12-21 | 日本電気株式会社 | ジエツトスクラバ−装置の載置台 |
-
1985
- 1985-03-29 JP JP1985046517U patent/JPH0143870Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59192836U (ja) * | 1983-06-10 | 1984-12-21 | 日本電気株式会社 | ジエツトスクラバ−装置の載置台 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0143870Y2 (2) | 1989-12-19 |
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