JPS61166036A - 寸法測定方法 - Google Patents

寸法測定方法

Info

Publication number
JPS61166036A
JPS61166036A JP60006469A JP646985A JPS61166036A JP S61166036 A JPS61166036 A JP S61166036A JP 60006469 A JP60006469 A JP 60006469A JP 646985 A JP646985 A JP 646985A JP S61166036 A JPS61166036 A JP S61166036A
Authority
JP
Japan
Prior art keywords
resistor
contact
layer
dimensions
diffusion layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60006469A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0133942B2 (2
Inventor
Masaharu Yamamoto
雅晴 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP60006469A priority Critical patent/JPS61166036A/ja
Publication of JPS61166036A publication Critical patent/JPS61166036A/ja
Publication of JPH0133942B2 publication Critical patent/JPH0133942B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP60006469A 1985-01-17 1985-01-17 寸法測定方法 Granted JPS61166036A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60006469A JPS61166036A (ja) 1985-01-17 1985-01-17 寸法測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60006469A JPS61166036A (ja) 1985-01-17 1985-01-17 寸法測定方法

Publications (2)

Publication Number Publication Date
JPS61166036A true JPS61166036A (ja) 1986-07-26
JPH0133942B2 JPH0133942B2 (2) 1989-07-17

Family

ID=11639311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60006469A Granted JPS61166036A (ja) 1985-01-17 1985-01-17 寸法測定方法

Country Status (1)

Country Link
JP (1) JPS61166036A (2)

Also Published As

Publication number Publication date
JPH0133942B2 (2) 1989-07-17

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