JPS61186820A - 直熱型流量センサ - Google Patents

直熱型流量センサ

Info

Publication number
JPS61186820A
JPS61186820A JP60025233A JP2523385A JPS61186820A JP S61186820 A JPS61186820 A JP S61186820A JP 60025233 A JP60025233 A JP 60025233A JP 2523385 A JP2523385 A JP 2523385A JP S61186820 A JPS61186820 A JP S61186820A
Authority
JP
Japan
Prior art keywords
substrate
resistor
temperature
heat
uneven structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60025233A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441765B2 (2
Inventor
Minoru Oota
実 太田
Kazuhiko Miura
和彦 三浦
Fumio Obara
文雄 小原
Hitomi Kitagawa
仁美 北川
Tadashi Hattori
正 服部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soken Inc
Original Assignee
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soken Inc filed Critical Nippon Soken Inc
Priority to JP60025233A priority Critical patent/JPS61186820A/ja
Publication of JPS61186820A publication Critical patent/JPS61186820A/ja
Publication of JPH0441765B2 publication Critical patent/JPH0441765B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP60025233A 1985-02-14 1985-02-14 直熱型流量センサ Granted JPS61186820A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60025233A JPS61186820A (ja) 1985-02-14 1985-02-14 直熱型流量センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60025233A JPS61186820A (ja) 1985-02-14 1985-02-14 直熱型流量センサ

Publications (2)

Publication Number Publication Date
JPS61186820A true JPS61186820A (ja) 1986-08-20
JPH0441765B2 JPH0441765B2 (2) 1992-07-09

Family

ID=12160256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60025233A Granted JPS61186820A (ja) 1985-02-14 1985-02-14 直熱型流量センサ

Country Status (1)

Country Link
JP (1) JPS61186820A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19857549B4 (de) * 1998-12-14 2009-12-24 Robert Bosch Gmbh Sensor mit einer Membran und Verfahren zur Herstellung des Sensors mit einer Membran
US12366474B1 (en) 2024-03-19 2025-07-22 Toflo Corporation Thermal type flowmeter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19857549B4 (de) * 1998-12-14 2009-12-24 Robert Bosch Gmbh Sensor mit einer Membran und Verfahren zur Herstellung des Sensors mit einer Membran
US12366474B1 (en) 2024-03-19 2025-07-22 Toflo Corporation Thermal type flowmeter

Also Published As

Publication number Publication date
JPH0441765B2 (2) 1992-07-09

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