JPS61190129U - - Google Patents
Info
- Publication number
- JPS61190129U JPS61190129U JP7421885U JP7421885U JPS61190129U JP S61190129 U JPS61190129 U JP S61190129U JP 7421885 U JP7421885 U JP 7421885U JP 7421885 U JP7421885 U JP 7421885U JP S61190129 U JPS61190129 U JP S61190129U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- diffusion
- reaction tube
- heater
- furnace end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7421885U JPS61190129U (mo) | 1985-05-21 | 1985-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7421885U JPS61190129U (mo) | 1985-05-21 | 1985-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61190129U true JPS61190129U (mo) | 1986-11-27 |
Family
ID=30614309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7421885U Pending JPS61190129U (mo) | 1985-05-21 | 1985-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61190129U (mo) |
-
1985
- 1985-05-21 JP JP7421885U patent/JPS61190129U/ja active Pending
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