JPS61190841A - X-ray image display device - Google Patents

Abstract

PURPOSE:To always make a good X-ray image up to a prescribed standard, by performing standardization so that the average of the counts of X-rays emitted by irradiating rays of electrons upon a specimen is caused to correspond to the central shade of a variable density image display device to show the image. CONSTITUTION:Rays of electrons emitted from an electron beam generator 1 and caused to converge are irradiated upon a specimen 3 which is scanned with the rays of electrons by a scanning coil 2. X-rays emitted from the speci men 3 are found out by a detector 5, and counted by an X-ray counter circuit 51 controlled by a timer circuit 52. The sum of the cumulated counts of the X-rays is divided by the total number of picture elements in the section 61 of a calculation and control circuit 6 to determine the average count. Standardi zation is performed so that the average count is caused to correspond to (2N)/2 [N denotes the resolving power (N bits) of a D/A converter] or to the central shade of a variable density image display device 7. As a result, a good X-ray image can be displayed through a simple construction in a short time.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention is an X-ray count microanalyzer used to observe the shape and fine structure of a sample.
The present invention relates to a line count value image display device.

(Prior art) The Xa microanalyzer irradiates the sample surface with an extremely narrowly focused electron beam flux and measures the characteristic X-rays (X-rays with wavelengths specific to the elements that make up the sample) emitted from the sample surface.
This is an analysis device for elucidating the structure of a sample by qualitatively or quantitatively measuring the elements contained in the sample.

Figure 4 shows that in such an X-ray microanalyzer, the electron beam or the sample stage on which the sample is placed is two-dimensionally scanned, and the X-ray counts of characteristic X-rays from there are counted and calculated. FIG. 7 is a diagram showing a histogram of xsii count values when displayed as an image. This histogram is known from experience and has a peak near the average count value.゛The obtained X** is displayed on a grayscale image display device such as a CRT, but in this case, 2N (resolution N
2Nllill is realized using a D/A conversion device (bits).

(Problems to be Solved by the Invention) In a conventional device of this type, when an X-ray image is displayed on a grayscale image display device, when it is normalized and displayed as a maximum count value of −2N −1, as shown in FIG. There is a problem in that the histogram as shown in Figure 2 has a peak biased towards the low range, resulting in a dark image as a whole and a flat image with little contrast. Therefore, in the conventional device, the histogram shown in Fig. 5 is displayed on a separate graphic display device, and the operator determines the constant K so that the value P obtained by dividing the XS + count value by K is smaller than 2 1. (P≦2'-1>calculation, pixels larger than 2N-1 are replaced with 2N-1) were displayed on an image display device.

However, such a method requires a separate graphic display device to display the histogram after calculations, and there are problems in that it takes a long calculation time. Further, since the constant K is determined by the operator each time, there is a problem that variations occur in the displayed Xta image.

The present invention has been made in view of these problems in conventional methods, and its purpose is to eliminate the need for operator judgment and to provide a simple construction of high-quality X-ray images that always comply with certain standards. And you can get X in a short time! The present invention aims to provide a Q-image display device.

(Means for Solving the Problems) The present invention, which solves the above-mentioned problems, irradiates the surface of a sample with an electron beam beam and scans the electron beam beam or the sample,
XI! emitted from the sample! and calculate this as XWA
Xs!, which is emitted from the sample, is displayed on the xllA@display device as an image. x1m
The present invention is characterized in that the average count value of the count values is normalized to the center density value of the grayscale image display device and displayed.

(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a block diagram showing an embodiment of the present invention. In the figure, 1 is an electron beam (1!i beam) generating means that emits a narrowly focused electron beam, such as an electron gun or 111
! ! Contains lenses, etc. Reference numeral 2 denotes a scanning means such as a scanning coil for scanning an electron beam, to which a signal from an electron beam scanning circuit 21 is applied. 3 is a sample; 4 is a sample stage on which the sample 3 is placed; it is scanned by a signal from a sample scanning circuit 41; 5 is an X-ray detector that detects Xta emitted from the sample 3; 51 is an X-ray counting circuit that counts signals from the X-ray detector 5; 52 is a reference cycle signal (clock signal) that detects X-rays; This is a timer circuit that outputs to the counting circuit 51.

6 is an arithmetic control circuit which inputs signals from an X-ray counting circuit 51, a timer, and a -circuit 52, performs predetermined arithmetic operations, and generates signals for image display; A scanning control signal is output to each. In this arithmetic control circuit 6, 61 is an X-ray counting circuit 51.
The means for determining the average count value of the X-ray count values from and normalizing this average count value to the center density value of the grayscale image display M& is shown as a functional block.

Reference numeral 7 denotes a grayscale image display device for displaying the standardized grayscale image signal outputted from the arithmetic and control circuit 6, and 8 is a data storage circuit that is coupled to the arithmetic and control circuit 6 and stores various data.

The operation of the apparatus configured as described above will be described below with reference to the flowchart shown in FIG.

First, the performance IItI13rn circuit 6 outputs a control signal to the electron beam scanning circuit 21 or the sample scanning circuit 41 to scan the electron beam bundle or the sample stage 4 (step 1). or,
The X-ray count value of X-rays in the scanning state is collected via the X-ray detector 5 and the X-ray count value counting circuit 51 of X-rays (
Step 2). In collecting the X-ray count values here, the maximum value and cumulative addition value are calculated simultaneously. Next, the cumulative sum *m is divided by the total number of pixels (step 3).

This calculates the average count value. Next, the grayscale image display device 7
(Step 4).

At this time, pixels whose normalized count value is larger than 2N-1 are replaced with 2N-1. Subsequently, the standardized signal is output to the image display device W17 (step 5).

FIG. 3 is a diagram showing a histogram of a signal obtained as a result of such processing. The characteristics are similar to the histogram shown in FIG. 4, and a high-quality X-ray image can be displayed on the image display device 7.

(Effects of the Invention) As explained above, according to the present invention, by configuring the average value of the XWA count value to be normalized to the center density value of the display device, operator judgment is not required. Also, since there is no need to calculate or display a histogram to judge the image tone, high-quality xI! always follows a certain standard! An image can be displayed with a simple configuration and in a short time.

[Brief explanation of the drawing]

FIG. 1 is a configuration block diagram showing one embodiment of the present invention, and FIG.
Figure 3 is a flowchart showing an example of the operation, Figure 3 is a diagram showing a histogram of the signal output from the image display device in the apparatus shown in Figure 1, and Figure 4 is the XI meter! ! ! FIG. 5 is a diagram showing a histogram of values. FIG. 5 is a diagram showing a histogram for explaining the prior art. 1...Electron beam generating means 2...Scanning means 3...
Sample 5...X-ray detector 6...Arithmetic control circuit 7...Image display device 8...Data storage circuit Patent applicant: JEOL Co., Ltd. Agent Patent attorney: Ijima Hijigata 1 person Kite 4 Kite illustration 5

Claims (1)

[Claims] In an X-ray image display device that irradiates a sample surface with an electron beam beam, scans the electron beam beam or the sample, counts the X-rays emitted from the sample, and displays this as an X-ray image on a grayscale image display device. , X of the X-rays emitted from the sample
An X-ray image display device characterized in that the average count value of the line count values is normalized to the central density value of the grayscale image display device and displayed.