JPS61199230A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS61199230A
JPS61199230A JP4045685A JP4045685A JPS61199230A JP S61199230 A JPS61199230 A JP S61199230A JP 4045685 A JP4045685 A JP 4045685A JP 4045685 A JP4045685 A JP 4045685A JP S61199230 A JPS61199230 A JP S61199230A
Authority
JP
Japan
Prior art keywords
magnetic
layer
nonmagnetic
film
crystal orientation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4045685A
Other languages
Japanese (ja)
Inventor
Tomoji Morita
森田 知二
Mitsumasa Umezaki
梅崎 光政
Hirobumi Ouchi
博文 大内
Isato Nishinakagawa
西中川 勇人
Yasuhiro Okamura
康弘 岡村
Teruji Futami
二見 照治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4045685A priority Critical patent/JPS61199230A/en
Publication of JPS61199230A publication Critical patent/JPS61199230A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To improve the crystal orientation and magnetic characteristic of a magnetic layer and to increase the number of times of CSS by providing a nonmagnetic underlying layer consisting of one kind among WO3, WC2, WC, WN2 and W2N between a nonmagnetic hardened layer and magnetic medium layer. CONSTITUTION:An alumite film is coated as the nonmagnetic hardened layer 2 to about 4mum on a disk-shaped aluminum alloy substrate 1. After the film is finished to a specular surface, the film consisting of one kind among WO3, WC2, WC, WN2 and W2N is formed as the nonmagnetic underlying layer 3 thereon to the thickness ranging 50-2,400Angstrom and a thin gamma-Fe2O3 film is formed as the magnetic medium layer 4 thereon. The adverse effect of the nonmagnetic hardened layer 2 is prevented and the crystal orientation and magnetic characteristic of the magnetic layer are improved by providing the nonmagnetic underlying layer 3 consisting of, for example, the WO3 in the above-mentioned manner. The increase in the number of times of CSS is thus made possible.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、たとえばコバルト、コバルト合金。[Detailed description of the invention] [Industrial application field] This invention applies, for example, to cobalt and cobalt alloys.

鉄、鉄合金、ニッケル、ニッケル合金などの金稿強磁性
体よりなる磁性層、あるいは酸化鉄、酸化クロムなどの
金属酸化物強磁性体よりなる磁性層を有する磁気記録媒
体に関するものである。
The present invention relates to a magnetic recording medium having a magnetic layer made of a metal ferromagnetic material such as iron, iron alloy, nickel, or nickel alloy, or a magnetic layer made of a metal oxide ferromagnetic material such as iron oxide or chromium oxide.

〔従来の技術〕[Conventional technology]

近年、コンピュータ・システムにおける磁気ディスク等
の外部記憶装置の重要性が増大し、高記録密度化に対す
る要求はますます高まっている。
In recent years, the importance of external storage devices such as magnetic disks in computer systems has increased, and the demand for higher recording densities is increasing.

磁気記録装置は記録再生ヘッドおよび磁気ディスクの主
構成部から構成され、磁気ディスクは高速で回転し記録
再生ヘッドは磁気ディスクより微小間隔浮上している。
A magnetic recording device is composed of the main components of a recording/reproducing head and a magnetic disk. The magnetic disk rotates at high speed, and the recording/reproducing head floats a minute distance above the magnetic disk.

磁気記録装置の高性能化に伴い、この浮上間隔を小さく
するために記録再生ヘッドの荷重を小さくするとともに
接触始動・停止(コンタクト・スタート・ストップ:c
ss)Wヘッド浮揚システムが採用されている。磁気デ
ィスクすなわち磁気記録媒体の高記録密度化、高性能化
を図るためKは、記録媒体の薄層化、均−一様化、磁気
特性の改良(保磁力、角形比の向上)。
As the performance of magnetic recording devices improves, the load on the recording/reproducing head is reduced in order to reduce the flying distance, and contact start/stop (contact start/stop: c
ss) W head flotation system is adopted. In order to increase the recording density and performance of magnetic disks, that is, magnetic recording media, K is to make the recording media thinner, more uniform, and improve magnetic properties (improvement of coercive force and squareness ratio).

および低浮上策における安定したヘッド浮揚状態を確保
しヘッドとディスクの衝突(ヘッド・クラッシュ)を防
止するためのディスク表面精度の向上、耐ヘッドクラツ
シユ性等の向上が必要である。
In addition, it is necessary to improve the precision of the disk surface and the head crash resistance in order to ensure a stable head flying state in low-flying measures and prevent collisions between the head and the disk (head crash).

それに伴い磁性媒体層を支持する基板の品質の向上が重
要となっている。
Accordingly, it has become important to improve the quality of the substrate that supports the magnetic medium layer.

高密度記録に適する基板の条件としては機械的平担性お
よび表面粗さが良好であり、欠陥が小さくその数も少な
いことが挙げられる。さらに、記録媒体の薄層化に伴い
基板の十分な硬度も必要とされてきた。すなわち、基板
が軟かいと磁気ヘッドが磁気ディスクに接続した際に陥
没などの変形を起こし、v&気ヘッドの安定した浮揚状
態が得られないばかりか、磁気記録装置の信頼性を表す
コンタクトスタートストップ(aSS)回数が小さくな
るという問題がある。
Conditions for a substrate suitable for high-density recording include good mechanical flatness and surface roughness, and a small number of defects. Furthermore, as the recording medium becomes thinner, the substrate needs to have sufficient hardness. In other words, if the substrate is soft, it will cause deformation such as depression when the magnetic head is connected to the magnetic disk, and not only will it be impossible to obtain a stable floating state of the V&K head, but also the contact start stop, which indicates the reliability of the magnetic recording device, will occur. (aSS) There is a problem that the number of times becomes small.

従来、磁気ディスクの基板にはアルミ合金が使われてい
るが9表面硬化や表面精度をだすため。
Traditionally, aluminum alloys have been used for the substrates of magnetic disks because of their surface hardening and surface precision.

その上に硬化層を被覆している。この硬化層は研磨性の
良好なN1−Pめつき膜やアルマイト膜が用いられてき
た(たとえば、電々公社研究実用化報告第31巻第9号
1731〜IT44頁、先行技術特願昭59−8863
3号、特願昭59−111488号明細書)。
A hardened layer is coated thereon. For this hardened layer, N1-P plated film or alumite film with good polishability has been used (for example, Electric Corporation Research and Practical Application Report Vol. 31, No. 9, pp. 1731-IT 44, Prior Art Patent Application No. 1983- 8863
No. 3, Japanese Patent Application No. 59-111488).

この膜を形成した後2機械加工を行い表面精度をあげ、
磁性媒体層を形成する。この磁性媒体層の磁気特性と結
晶配向性には密接な関係があり、結晶配向性は磁性媒体
層の下地膜の種類に影響されることがわかっている(た
とえば、太田ら、第8回日本応用磁気学会学術講演概要
集、  15PB−8(1984))。たとえば、γ−
Fe203薄膜の場合は(111)配向、CおよびC8
合金薄膜の場合は0軸配向した場合が磁気特性が良好で
あることがわかっている。
After forming this film, 2 machining processes are performed to improve the surface precision.
forming a magnetic medium layer; There is a close relationship between the magnetic properties and crystal orientation of this magnetic medium layer, and it is known that the crystal orientation is influenced by the type of underlying film of the magnetic medium layer (for example, Ota et al. Abstracts of Academic Lectures of the Japan Society of Applied Magnetics, 15PB-8 (1984)). For example, γ−
For Fe203 thin film, (111) orientation, C and C8
In the case of an alloy thin film, it is known that the magnetic properties are good when the film is 0-axis oriented.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし9種々の硬化層を形成し磁性媒体層を形成すると
、はとんどの場合望ましい結晶配向性になりに〈<、そ
の結果磁化曲線から求められる角形比S*が悪化するな
ど磁気特性が良くならないという問題点があった。
However, when forming a magnetic medium layer by forming various hardened layers, in most cases the desired crystal orientation is not obtained. There was a problem that it was not possible.

この発明は上記のような問題点を解決するためになされ
たもので、結晶配向性すなわち磁気特性が良好で088
回数が増大する信頼性の高い磁気記録媒体を得ることを
目的とする。
This invention was made to solve the above-mentioned problems, and has good crystal orientation, that is, magnetic properties, and
The purpose is to obtain a highly reliable magnetic recording medium that can be used repeatedly.

〔問題点を解決するための手段〕[Means for solving problems]

この発明の磁気記録媒体は、非磁性硬化層と磁性媒体層
の間に、 wo、 、WO2,WO,WN2. および
W2Nのうちのいずれか1種よりなる非磁性下地層を形
成したものである。
The magnetic recording medium of the present invention has WO, WO2, WO, WN2. A nonmagnetic underlayer made of one of the following is formed.

〔作用〕[Effect]

この発明に係るwC3,we2. we 、 WN2.
 およびW2Nのうちのいずれか1種より成る非磁性下
地層の形成により、非磁性硬化層の悪影響を防止し。
wC3, we2. according to this invention. we, WN2.
By forming a non-magnetic underlayer made of any one of the following: and W2N, the adverse effects of the non-magnetic hardened layer can be prevented.

磁性媒体層の結晶配向性を良くすることができ。The crystal orientation of the magnetic medium layer can be improved.

非磁性硬化層の硬く表面精度の良好−な特性を減するこ
とがない。
The hardness and good surface precision characteristics of the non-magnetic hardened layer are not diminished.

〔実施例〕〔Example〕

以下、この発明の一実施例を図について説明する。91
図において、り1)は非磁性基板であるアルミニウム合
金基板、(2)は非磁性硬化層、(3)はWO。
An embodiment of the present invention will be described below with reference to the drawings. 91
In the figure, 1) is an aluminum alloy substrate which is a non-magnetic substrate, (2) is a non-magnetic hardened layer, and (3) is a WO.

非磁性下地層、(4)は磁性媒体層である。The non-magnetic underlayer (4) is a magnetic medium layer.

以下、具体的に実施例によりこの発明をより詳細に説明
するが、この発明はこれに限定されるものではない。
EXAMPLES Hereinafter, the present invention will be specifically explained in more detail with reference to Examples, but the present invention is not limited thereto.

実施例 ディスク状アルミニウム合金基板fll上に非磁性硬化
層(2)としてアルマイト膜を4μm被榎被覆。アルマ
イト膜を鏡面仕上げした後、非磁性下地層(3)として
WO3膜を反応スパッタ法により形成した。
EXAMPLE A 4 μm thick alumite film was coated as a nonmagnetic hardened layer (2) on a disk-shaped aluminum alloy substrate. After mirror-finishing the alumite film, a WO3 film was formed as a nonmagnetic underlayer (3) by reactive sputtering.

さらに、磁性媒体層(4)としてγ−Fe203薄膜を
形成した。
Furthermore, a γ-Fe203 thin film was formed as a magnetic medium layer (4).

WO3[の膜厚を変えた試料を作製し9種々の測定を行
い、結果を表にまとめた。結晶配向性については、X線
回折法により測定し、γ−re2o、(スピネル型)の
222方向のビークr(222)と311方向のビーク
I(311)の比によって表現した。角形比S*は磁化
曲線より求めた。
Samples with different film thicknesses of WO3 were prepared and nine different measurements were performed, and the results are summarized in a table. The crystal orientation was measured by X-ray diffraction and expressed by the ratio of γ-re2o (spinel type) between the peak r (222) in the 222 direction and the peak I (311) in the 311 direction. The squareness ratio S* was determined from the magnetization curve.

さらに、非磁性下地層の膜厚と各特性値の変化を、非磁
性下地層がN03の場合の例を第2図に。
Furthermore, FIG. 2 shows an example of the thickness of the non-magnetic underlayer and changes in each characteristic value when the non-magnetic underlayer is N03.

非磁性下地層がwCの場合の例を第3図にそれぞれ示す
。図中9曲線11はI (222)/I (311)の
変化9曲線12はS*の変化9曲線13はaSS回数の
比の変化を表す。
An example in which the nonmagnetic underlayer is wC is shown in FIG. In the figure, 9 curves 11 represent changes in I (222)/I (311), 9 curves 12 represent changes in S*, and 9 curves 13 represent changes in the ratio of aSS times.

注)WO3膜厚がoX(形成しない)の時のaSS回数
を1として比で表した。
Note) The number of aSS when the WO3 film thickness is oX (not formed) is taken as 1 and expressed as a ratio.

表および第2図より明らかなように、WO3の膜厚がs
oXを越えると、結晶配向性およびS の値が向上して
いく。一方、WO3の膜厚が2400Xを越え3000
X以上になると、  aSS回数の悪化がみられた。W
O,の膜厚が厚すぎると、非磁性硬化層の効果が薄れて
しまい、  aSS回数の悪化につながったと考えられ
る。また、  3000X以上だと熱膨張係数の違いか
ら、クラックがはいることが多く 3000叉以上は望
ましくない。
As is clear from the table and Figure 2, the film thickness of WO3 is s
When oX is exceeded, the crystal orientation and the S value improve. On the other hand, the film thickness of WO3 exceeds 2400X and is 3000X.
When the number of aSSs exceeded X, the number of aSSs worsened. W
It is thought that if the film thickness of O. Moreover, if it is more than 3000X, cracks will often occur due to the difference in the coefficient of thermal expansion, so it is not desirable to have more than 3000X.

上記実施例では、WO3膜の場合について説明したが、
WC2,WC2WN2.W2Nの場合であっても同様の
効果が得られ、上記実施例と同様の効果を奏する。
In the above embodiment, the case of WO3 film was explained, but
WC2, WC2WN2. Even in the case of W2N, similar effects can be obtained, and the same effects as in the above embodiment can be obtained.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば、非磁性基板と、この
非磁性基板に被憶された非磁性硬化層と。
As described above, according to the present invention, there is provided a nonmagnetic substrate and a nonmagnetic hardened layer stored on the nonmagnetic substrate.

この非磁性硬化層に被覆されたwC3,wC2,wC。wC3, wC2, wC coated with this non-magnetic hardened layer.

WN  およびW2Nのうちのいずれか1種よりなる非
磁性下地層と、この非磁性下地層に被覆された磁性媒体
層を備えたので、結晶配向性および磁気特性が向上し、
  O88回数が増大し、信頼性の高い磁気記録媒体が
得られる効果がある。
Since it includes a non-magnetic underlayer made of one of WN and W2N and a magnetic medium layer coated on this non-magnetic underlayer, crystal orientation and magnetic properties are improved,
This has the effect of increasing the number of O88 cycles and providing a highly reliable magnetic recording medium.

また、 WOS、WO2,WC,WN2.およびW2N
のうちのいずれか1種よりなる非磁性下地層の厚さを5
0〜2400Xの範囲にすると、一層上述の効果が増大
する。
Also, WOS, WO2, WC, WN2. and W2N
The thickness of the non-magnetic underlayer made of any one of the following:
When the range is 0 to 2400X, the above-mentioned effects are further enhanced.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例により得られた磁気記録媒
体を示す断面図であり、第2図および第3図は非磁性下
地層の膜厚と各特性値の変化を示す特性図である。 +11・・・非磁性基板、(2)・・・非磁性硬化層、
(3)・・・WO3非磁性下地層、(4)・・・磁性媒
体層。
FIG. 1 is a cross-sectional view showing a magnetic recording medium obtained by an embodiment of the present invention, and FIGS. 2 and 3 are characteristic diagrams showing changes in the film thickness of the nonmagnetic underlayer and each characteristic value. be. +11...Nonmagnetic substrate, (2)...Nonmagnetic hardened layer,
(3)...WO3 nonmagnetic underlayer, (4)...magnetic medium layer.

Claims (2)

【特許請求の範囲】[Claims] (1)非磁性基板と、この非磁性基板に被覆された非磁
性硬化層と、この非磁性硬化層に被覆されたWO_3、
WC_2、WC、WN_2、およびW_2Nのうちいず
れか1種よりなる非磁性下地層と、この非磁性下地層に
被覆された磁性媒体層を備えた磁気記録媒体。
(1) A non-magnetic substrate, a non-magnetic hardened layer coated on this non-magnetic substrate, and WO_3 coated on this non-magnetic hardened layer,
A magnetic recording medium comprising a nonmagnetic underlayer made of any one of WC_2, WC, WN_2, and W_2N, and a magnetic medium layer covered with the nonmagnetic underlayer.
(2)WO_3、WC_2、WC、WN_2、およびW
_2Nのうちいずれか1種より形成された非磁性下地層
の膜厚を50〜2400Åの範囲にしたことを特徴とす
る特許請求の範囲第1項記載の磁気記録媒体。
(2) WO_3, WC_2, WC, WN_2, and W
2. The magnetic recording medium according to claim 1, wherein the nonmagnetic underlayer made of any one of _2N has a thickness in the range of 50 to 2400 Å.
JP4045685A 1985-03-01 1985-03-01 Magnetic recording medium Pending JPS61199230A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4045685A JPS61199230A (en) 1985-03-01 1985-03-01 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4045685A JPS61199230A (en) 1985-03-01 1985-03-01 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS61199230A true JPS61199230A (en) 1986-09-03

Family

ID=12581141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4045685A Pending JPS61199230A (en) 1985-03-01 1985-03-01 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS61199230A (en)

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