JPS61201339U - - Google Patents
Info
- Publication number
- JPS61201339U JPS61201339U JP8549585U JP8549585U JPS61201339U JP S61201339 U JPS61201339 U JP S61201339U JP 8549585 U JP8549585 U JP 8549585U JP 8549585 U JP8549585 U JP 8549585U JP S61201339 U JPS61201339 U JP S61201339U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- chemical liquid
- wafer
- pure water
- susceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8549585U JPS61201339U (ro) | 1985-06-06 | 1985-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8549585U JPS61201339U (ro) | 1985-06-06 | 1985-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61201339U true JPS61201339U (ro) | 1986-12-17 |
Family
ID=30635946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8549585U Pending JPS61201339U (ro) | 1985-06-06 | 1985-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61201339U (ro) |
-
1985
- 1985-06-06 JP JP8549585U patent/JPS61201339U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS61201339U (ro) | ||
| JPS6343428U (ro) | ||
| JPS6232533U (ro) | ||
| JPH01118436U (ro) | ||
| JPS57208135A (en) | Spray type resist developing apparatus | |
| JPS6375035U (ro) | ||
| JPH0195728U (ro) | ||
| JPS62199240U (ro) | ||
| JPS6346841U (ro) | ||
| JPS61106382U (ro) | ||
| JPH01100432U (ro) | ||
| JPH01171028U (ro) | ||
| JPS6083240U (ja) | スピン現像機 | |
| JPS6332689U (ro) | ||
| JPS58154695U (ja) | トイレにおける温水洗浄乾燥装置 | |
| JPH0252437U (ro) | ||
| JPS62199942U (ro) | ||
| JPH0215864U (ro) | ||
| JPH0395634U (ro) | ||
| JPS58155366U (ja) | リン酸塩化成処理装置 | |
| JPH0211326U (ro) | ||
| JPH044738U (ro) | ||
| JPS6426836U (ro) | ||
| JPH03112929U (ro) | ||
| JPH0394979U (ro) |