JPS61201340U - - Google Patents
Info
- Publication number
- JPS61201340U JPS61201340U JP8391085U JP8391085U JPS61201340U JP S61201340 U JPS61201340 U JP S61201340U JP 8391085 U JP8391085 U JP 8391085U JP 8391085 U JP8391085 U JP 8391085U JP S61201340 U JPS61201340 U JP S61201340U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- joined
- pair
- plate
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004873 anchoring Methods 0.000 description 1
Description
第１図はこの考案の拡散用ボートの一実施例の
構成を示す正面図、第２図は同上拡散用ボートを
係止するひつかけ棒の平面図、第３図は同上拡散
用ボートに装着するおもりの平面図、第４図ａは
同上拡散用ボートのボート本体の正面図、第４図
ｂは第４図ａの側面図、第４図ｃは第４図ａの平
面図、第４図ｄは第４図ａのＸ―Ｘ′線の断面図
、第５図は同上拡散用ボートにウエハを装填する
手順を示す図、第６図は同上拡散用ボートにウエ
ハを装填した後枠を除去する手順を説明するため
の図、第７図は同上拡散用ボートにウエハを装填
してウエハの処理プロセスを行なう状態を示す図
である。
１，１′……ボート、２〜６，２′〜６′……
むく棒、７，７′，８，８′……腕、１２……ウ
エハ、Ａ……ひつかけ棒、Ｂ……ボート本体、Ｃ
……おもり。
Figure 1 is a front view showing the configuration of an embodiment of the diffusion boat of this invention, Figure 2 is a plan view of a hanging rod for anchoring the diffusion boat, and Figure 3 is attached to the diffusion boat. Figure 4a is a front view of the boat body of the diffusion boat, Figure 4b is a side view of Figure 4a, Figure 4c is a plan view of Figure 4a, and Figure 4c is a plan view of Figure 4a. Figure d is a cross-sectional view taken along the line X-X' in Figure 4a, Figure 5 is a diagram showing the procedure for loading wafers into the diffusion boat shown above, and Figure 6 is the rear frame after loading wafers into the diffusion boat shown above. FIG. 7 is a diagram showing a state in which wafers are loaded into the diffusion boat and a wafer processing process is performed. 1, 1'...Boat, 2~6, 2'~6'...
Peeling rod, 7, 7', 8, 8'...arm, 12...wafer, A...hanging rod, B...boat body, C
...Weight.
Claims (1)
される第１、第２の１対の上面板と、互いに分離
・接合可能でおもりを装着する第１、第２の１対
の下面板と、上記第１の上面板と第１の下面板間
にこれらの周縁に沿つて所定の間隔をもつて取り
付けられウエハを装填する溝を多数個形成して第
１の上面板と第１の下面板とともに第１のボート
を形成する第１の複数のむく棒と、上記第２の上
面板と第２の下面板間にこれの周縁に沿つて上記
ウエハの中心を上記各むく棒に対して対称となる
点対称の位置に取り付けられ上記溝に対応する溝
を有しかつ第２の上面板と第２の下面板とともに
第２のボートを形成する第２の複数のむく棒とよ
りなる拡散用ボート。 (2) 第１のボートおよび第２のボートは少なく
とも２本のむく棒の中心および装置されたウエハ
の中心を通る面で分割および接合されることを特
徴とする実用新案登録請求の範囲第１項記載の拡
散用ボート。[Claims for Utility Model Registration] (1) A pair of first and second top plates that can be separated and joined to each other and are locked to a hanging rod, and a first pair that can be separated and joined to each other and that is attached to a weight. , a plurality of grooves are formed between the second pair of lower plates, the first upper plate and the first lower plate at predetermined intervals along their peripheries, and into which wafers are loaded. a first plurality of rods forming a first boat together with a first top plate and a first bottom plate; A second boat is attached at a point symmetrical position with respect to the center of the bar, has a groove corresponding to the groove, and forms a second boat together with the second top plate and the second bottom plate. A diffusion boat consisting of two or more peeled rods. (2) Utility model registration claim 1, characterized in that the first boat and the second boat are divided and joined at a plane passing through the centers of at least two strip bars and the center of the installed wafer. Diffusion boat as described in section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8391085U JPH0219959Y2 (en) | 1985-06-05 | 1985-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8391085U JPH0219959Y2 (en) | 1985-06-05 | 1985-06-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61201340U true JPS61201340U (en) | 1986-12-17 |
| JPH0219959Y2 JPH0219959Y2 (en) | 1990-05-31 |
Family
ID=30632962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8391085U Expired JPH0219959Y2 (en) | 1985-06-05 | 1985-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0219959Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0165130U (en) * | 1987-10-20 | 1989-04-26 |
-
1985
- 1985-06-05 JP JP8391085U patent/JPH0219959Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0165130U (en) * | 1987-10-20 | 1989-04-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0219959Y2 (en) | 1990-05-31 |
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