JPS61209909A - ポリッシング用コロイダルシリカの製造方法 - Google Patents

ポリッシング用コロイダルシリカの製造方法

Info

Publication number
JPS61209909A
JPS61209909A JP5166685A JP5166685A JPS61209909A JP S61209909 A JPS61209909 A JP S61209909A JP 5166685 A JP5166685 A JP 5166685A JP 5166685 A JP5166685 A JP 5166685A JP S61209909 A JPS61209909 A JP S61209909A
Authority
JP
Japan
Prior art keywords
silica
quat
colloidal silica
quaternary ammonium
silicate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5166685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0454616B2 (fr
Inventor
Shiyunren Chiyou
俊連 長
Mamoru Yoshizako
吉迫　守
Yoshiro Oota
好郎 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tama Kagaku Kogyo Co Ltd
Original Assignee
Tama Kagaku Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tama Kagaku Kogyo Co Ltd filed Critical Tama Kagaku Kogyo Co Ltd
Priority to JP5166685A priority Critical patent/JPS61209909A/ja
Publication of JPS61209909A publication Critical patent/JPS61209909A/ja
Publication of JPH0454616B2 publication Critical patent/JPH0454616B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F5/00—Compounds of magnesium
    • C01F5/02—Magnesia
    • C01F5/06—Magnesia by thermal decomposition of magnesium compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP5166685A 1985-03-15 1985-03-15 ポリッシング用コロイダルシリカの製造方法 Granted JPS61209909A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5166685A JPS61209909A (ja) 1985-03-15 1985-03-15 ポリッシング用コロイダルシリカの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5166685A JPS61209909A (ja) 1985-03-15 1985-03-15 ポリッシング用コロイダルシリカの製造方法

Publications (2)

Publication Number Publication Date
JPS61209909A true JPS61209909A (ja) 1986-09-18
JPH0454616B2 JPH0454616B2 (fr) 1992-08-31

Family

ID=12893202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5166685A Granted JPS61209909A (ja) 1985-03-15 1985-03-15 ポリッシング用コロイダルシリカの製造方法

Country Status (1)

Country Link
JP (1) JPS61209909A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6750257B2 (en) * 2000-08-04 2004-06-15 Fuso Chemical, Ltd. Colloidal silica slurry
JP2013256404A (ja) * 2012-06-12 2013-12-26 Gifu Univ 二酸化ケイ素前駆体ゾル、これを用いたムライト前駆体ゾル及びムライトの製造方法
CN107043599A (zh) * 2017-06-18 2017-08-15 沈水平 一种硅晶片抛光液

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6750257B2 (en) * 2000-08-04 2004-06-15 Fuso Chemical, Ltd. Colloidal silica slurry
JP2013256404A (ja) * 2012-06-12 2013-12-26 Gifu Univ 二酸化ケイ素前駆体ゾル、これを用いたムライト前駆体ゾル及びムライトの製造方法
CN107043599A (zh) * 2017-06-18 2017-08-15 沈水平 一种硅晶片抛光液

Also Published As

Publication number Publication date
JPH0454616B2 (fr) 1992-08-31

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