JPH0454616B2 - - Google Patents

Info

Publication number
JPH0454616B2
JPH0454616B2 JP5166685A JP5166685A JPH0454616B2 JP H0454616 B2 JPH0454616 B2 JP H0454616B2 JP 5166685 A JP5166685 A JP 5166685A JP 5166685 A JP5166685 A JP 5166685A JP H0454616 B2 JPH0454616 B2 JP H0454616B2
Authority
JP
Japan
Prior art keywords
silica
quaternary ammonium
colloidal silica
polishing
silicate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5166685A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61209909A (ja
Inventor
Shunren Cho
Mamoru Yoshizako
Yoshiro Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tama Kagaku Kogyo Co Ltd
Original Assignee
Tama Kagaku Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tama Kagaku Kogyo Co Ltd filed Critical Tama Kagaku Kogyo Co Ltd
Priority to JP5166685A priority Critical patent/JPS61209909A/ja
Publication of JPS61209909A publication Critical patent/JPS61209909A/ja
Publication of JPH0454616B2 publication Critical patent/JPH0454616B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F5/00—Compounds of magnesium
    • C01F5/02—Magnesia
    • C01F5/06—Magnesia by thermal decomposition of magnesium compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP5166685A 1985-03-15 1985-03-15 ポリッシング用コロイダルシリカの製造方法 Granted JPS61209909A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5166685A JPS61209909A (ja) 1985-03-15 1985-03-15 ポリッシング用コロイダルシリカの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5166685A JPS61209909A (ja) 1985-03-15 1985-03-15 ポリッシング用コロイダルシリカの製造方法

Publications (2)

Publication Number Publication Date
JPS61209909A JPS61209909A (ja) 1986-09-18
JPH0454616B2 true JPH0454616B2 (fr) 1992-08-31

Family

ID=12893202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5166685A Granted JPS61209909A (ja) 1985-03-15 1985-03-15 ポリッシング用コロイダルシリカの製造方法

Country Status (1)

Country Link
JP (1) JPS61209909A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4435391B2 (ja) * 2000-08-04 2010-03-17 扶桑化学工業株式会社 コロイド状シリカスラリー
JP5908800B2 (ja) * 2012-06-12 2016-04-26 国立大学法人岐阜大学 ムライト前駆体ゾル及びムライトの製造方法
CN107043599A (zh) * 2017-06-18 2017-08-15 沈水平 一种硅晶片抛光液

Also Published As

Publication number Publication date
JPS61209909A (ja) 1986-09-18

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