JPS612183B2 - - Google Patents

Info

Publication number
JPS612183B2
JPS612183B2 JP53084209A JP8420978A JPS612183B2 JP S612183 B2 JPS612183 B2 JP S612183B2 JP 53084209 A JP53084209 A JP 53084209A JP 8420978 A JP8420978 A JP 8420978A JP S612183 B2 JPS612183 B2 JP S612183B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53084209A
Other versions
JPS5510565A (en
Inventor
Mitsuhiro Murata
Kazumi Okabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP8420978A priority Critical patent/JPS5510565A/ja
Priority to US06/052,502 priority patent/US4263576A/en
Priority to DE2927634A priority patent/DE2927634C2/de
Priority to FR7917898A priority patent/FR2431125A1/fr
Priority to GB7923967A priority patent/GB2025068B/en
Publication of JPS5510565A publication Critical patent/JPS5510565A/ja
Publication of JPS612183B2 publication Critical patent/JPS612183B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)
JP8420978A 1978-07-10 1978-07-10 Moisture-sensitive element Granted JPS5510565A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP8420978A JPS5510565A (en) 1978-07-10 1978-07-10 Moisture-sensitive element
US06/052,502 US4263576A (en) 1978-07-10 1979-06-27 Humidity sensitive device
DE2927634A DE2927634C2 (de) 1978-07-10 1979-07-09 Feuchtigkeitsmeßfühler
FR7917898A FR2431125A1 (fr) 1978-07-10 1979-07-10 Dispositif sensible a l'humidite et sa preparation
GB7923967A GB2025068B (en) 1978-07-10 1979-07-10 Humidity sensitive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8420978A JPS5510565A (en) 1978-07-10 1978-07-10 Moisture-sensitive element

Publications (2)

Publication Number Publication Date
JPS5510565A JPS5510565A (en) 1980-01-25
JPS612183B2 true JPS612183B2 (ja) 1986-01-23

Family

ID=13824083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8420978A Granted JPS5510565A (en) 1978-07-10 1978-07-10 Moisture-sensitive element

Country Status (1)

Country Link
JP (1) JPS5510565A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100486496B1 (ko) * 2002-05-23 2005-04-29 엘지전자 주식회사 박막형 습도센서 및 그 제조방법

Also Published As

Publication number Publication date
JPS5510565A (en) 1980-01-25

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