JPS5510565A - Moisture-sensitive element - Google Patents

Moisture-sensitive element

Info

Publication number
JPS5510565A
JPS5510565A JP8420978A JP8420978A JPS5510565A JP S5510565 A JPS5510565 A JP S5510565A JP 8420978 A JP8420978 A JP 8420978A JP 8420978 A JP8420978 A JP 8420978A JP S5510565 A JPS5510565 A JP S5510565A
Authority
JP
Japan
Prior art keywords
moisture
change
inorganic polymer
paste
constitution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8420978A
Other languages
Japanese (ja)
Other versions
JPS612183B2 (en
Inventor
Mitsuhiro Murata
Sansei Okabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP8420978A priority Critical patent/JPS5510565A/en
Priority to US06/052,502 priority patent/US4263576A/en
Priority to DE2927634A priority patent/DE2927634C2/en
Priority to FR7917898A priority patent/FR2431125A1/en
Priority to GB7923967A priority patent/GB2025068B/en
Publication of JPS5510565A publication Critical patent/JPS5510565A/en
Publication of JPS612183B2 publication Critical patent/JPS612183B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE: To increase the variation range of the resistance value by using the specified moisture-sensitive film containing the inorganic polymer composed mainly of Zr as well as to realize the constitution from the moisture-sensitive sensor to the dew-condensation sensor by controlling the humidity-resistance curve.
CONSTITUTION: Comb-line electrode 2 and 3 are provided on insulated substrate 1 with the comb lines crossed each other, and lead terminal 5 and 6 are connected to electrode 2 and 3 respectively. The paste is obtained by adding the ethyl alcohol to the mixture of the (semi)conductor powder or the insulator powder, the inorganic polymer composed mainly of Zr such as the oxy-zirconium chloride and the organic higher molecule featuring the compatibility to the inorganic polymer. The paste thus composed is coated on substrate 1, and the burning is given from 100°C up to the temperature at which the organic polymer is never decomposed. Thus, moisture-sensitive film 4 is formed. Film 4 is so rigid that the change on standing is reduced and that a big change of characteristics is eliminated to the change of environment and with a quick response velocity.
COPYRIGHT: (C)1980,JPO&Japio
JP8420978A 1978-07-10 1978-07-10 Moisture-sensitive element Granted JPS5510565A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP8420978A JPS5510565A (en) 1978-07-10 1978-07-10 Moisture-sensitive element
US06/052,502 US4263576A (en) 1978-07-10 1979-06-27 Humidity sensitive device
DE2927634A DE2927634C2 (en) 1978-07-10 1979-07-09 Humidity sensor
FR7917898A FR2431125A1 (en) 1978-07-10 1979-07-10 MOISTURE SENSITIVE DEVICE AND ITS PREPARATION
GB7923967A GB2025068B (en) 1978-07-10 1979-07-10 Humidity sensitive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8420978A JPS5510565A (en) 1978-07-10 1978-07-10 Moisture-sensitive element

Publications (2)

Publication Number Publication Date
JPS5510565A true JPS5510565A (en) 1980-01-25
JPS612183B2 JPS612183B2 (en) 1986-01-23

Family

ID=13824083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8420978A Granted JPS5510565A (en) 1978-07-10 1978-07-10 Moisture-sensitive element

Country Status (1)

Country Link
JP (1) JPS5510565A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100486496B1 (en) * 2002-05-23 2005-04-29 엘지전자 주식회사 Thin film type humidity sensor and manufacturing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100486496B1 (en) * 2002-05-23 2005-04-29 엘지전자 주식회사 Thin film type humidity sensor and manufacturing method thereof

Also Published As

Publication number Publication date
JPS612183B2 (en) 1986-01-23

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