JPS61236302A - Conveying apparatus - Google Patents

Abstract

PURPOSE:To always shift stably a conveying base with a simple structure by levitating the base with a permanent magnet secured in a conveying passage groove and magnetic fluid interposed in the groove. CONSTITUTION:Each conveying passage 1 is formed with a stripe of recess groove formed on a conveying passage 11 and a cover 12 provided on the upper surface of the body 11 to form two stripes of grooves 13. The stators 2 of a linear motor are mounted at the prescribed interval over the traveling direction of the base in response to the passage 1. Permanent magnets 3 are secured over the entire length of the bottom of the groove of the body 11, and magnetic fluid 4 is filled in the prescribed quantity in the groove 13. Legs 5 formed of a nonmagnetic material to support the base 6 are disposed in the passage 11, and levitated by the fluid 4. Thus, the base can be smoothly fed stably along the passage.

Description

[Detailed Description of the Invention] , degree] Yu J Summer 11 Division The present invention is a conveyance system in which a magnetic fluid is interposed between a conveyance path and a support leg of a conveyance table to levitate the conveyance table, and the conveyance table is transported by a linear motor. Regarding equipment.

Straight sitting limb strain - Conventional examples of this type of transport device include, for example, a device installed on a transport platform or a flat plate-shaped movable element of a near motor, and a large number of nozzles installed on a table corresponding to the movable element to supply compressed air from below. There is known a conveyance device that transports by excitation of a stator of a linear motor while ejecting the liquid from the air and causing the conveyance table to float.

However, the above device requires a compressed air source, which increases the equipment cost.Furthermore, with this type of transfer device, it is difficult to constantly and stably transfer the transfer platform. However, it is necessary to separately equip a device for this purpose, which has the disadvantage of complicating the structure.

The present invention has been made in view of the above circumstances, and aims to provide a conveyance device that does not require compressed air to levitate the conveyance table, has a simple structure, and always transports the conveyance table in a stable manner. There is.

The conveying device according to the first invention is characterized in that a permanent magnet is fixed to the bottom surface of the conveying path groove, and a predetermined amount of magnetic fluid is put into the groove of the conveying path. The structure is such that the conveyance table is levitated by magnetic force generated by interaction with a permanent magnet, and thrust is applied to the conveyance table by a linear motor so that the conveyance table is constantly and stably conveyed.

The characteristics of the conveying device according to the second invention are as follows:
In addition, permanent magnets are fixedly installed on both sides of the conveyance path groove, and when the conveyance table runs, the inner wall of the conveyance path groove is fixed.
By adding a structure that allows the carriage to travel stably while maintaining a predetermined gap without coming into contact with the carriage, the carriage can be moved more stably than the first invention.

1 Lid■ Figure 1 is a cross-sectional view taken at right angles to the direction of movement of the conveyor table, showing an embodiment of the conveyance device according to the first invention, and Figure 2 is a cross-sectional view taken along the line A-A'' in Figure 1. It is.

In the figure, 1.1 is a conveyance path fixed by a frame (not shown), and the ordinary conveyance path 1.1 includes a single concave groove recessed in the conveyance path main body 11. Main body 11
Two grooves 13 are formed with a cover portion 12 provided on the upper surface of the cover. Reference numeral 2 denotes a stator of a linear motor, which is placed at predetermined intervals along the traveling direction of the conveyor table in correspondence with the conveyor path 1.1. Reference numerals 3 and 3 denote permanent magnets, which are fixed over the entire length on the bottom surfaces of the grooves of the conveyance path bodies 11 and 11, and when the magnetic fluid 4 is interposed in a predetermined amount in the conveyance path grooves 13 and 13, the permanent magnets 3 magnetic fluid 4 near the surface of
hold. Reference numerals 5 and 5 denote legs made of a non-magnetic material that support the conveyance table 6, and are disposed within the conveyance paths 11 and 11, and are levitated by the magnetic fluid 4. A conveyed object (not shown) is placed on the bottom surface 61 of the conveyance platform 6, and the bottom surface 61 is made of a conductive metal material such as aluminum or copper, and acts as a reaction plate for the linear motor stator 2. .

With the above configuration, the magnetic fluid 4 causes the legs 5 of the conveyance table to float due to the effect of increasing the apparent specific gravity due to the magnetic action of the permanent magnet 3, and the conveyance table 6 has extremely low running resistance. Therefore, linear motor stator 2
By energizing, a thrust is generated, and the conveyance table 6 can be stably and smoothly transferred along the conveyance path 1.

FIG. 3 is a sectional view taken at right angles to the direction of movement of the conveyor table, showing an embodiment of the conveyance device according to the second invention. In FIG. 3, the same parts as in FIG. 1 are indicated with the same reference numerals. The second invention differs from the first invention in that a lateral vibration guide is provided to prevent the transport platform 6 from lateral vibration during transportation. The configuration other than the above is the same as that of the first invention.

In FIG. 3, a permanent magnet 31 is attached to the bottom of the transport path 1.
31 is fixedly installed over the entire length of the conveyance path 1, as in the first invention, but in this embodiment, permanent magnets 32 are installed on both sides of the conveyance path grooves 13, 13 over the entire length of the conveyance path 1. To be fixed. In this embodiment, the magnetic fluid 4 injected in a predetermined amount is transferred from the bottom and both sides of the conveyance path bodies 11 to the conveyor table legs 5.
A force is generated to levitate. A buoyant force acts from the bottom of the conveyance path bodies 11, 11, and a repulsive force acts from both sides of the conveyance path body 11-11, so that when the conveyance platform 6 travels, the conveyance is carried out without contacting the inner wall surface of the conveyance path groove 13. This has the effect of eliminating lateral vibration during conveyance of the platform and allowing it to travel while maintaining a predetermined gap. Effects other than the above are similar to those of the first invention.

In the embodiment shown in FIGS. 1 and 3, a cover is provided on the upper surface of the conveyance path main bodies 11 and 11 in order to prevent the magnetic fluid 4 from scattering and flowing out, and to prevent foreign matter from entering from the outside. 12 in some parts.

In both the first and second inventions, since the permanent magnet is fixed in the conveyance path groove, the weight of the conveyance table can be reduced compared to a method in which the conveyance table is provided with a permanent magnet. This also has the effect of reducing the required capacity of the linear motor that provides thrust to the carrier.

The first aspect of the invention, as detailed above, is simple because the conveyance table is levitated by the permanent magnet fixed in the conveyance path groove and the magnetic fluid interposed in the conveyance path groove. With this configuration,
The conveyor table can always be transferred stably. Furthermore, compared to conventional flotation means using compressed air, the entire device can be made smaller and is superior in terms of equipment costs and maintenance costs.

Further, by fixing the permanent magnet in the conveyance path groove, the weight of the conveyance table is also reduced, and the necessary thrust of the linear motor for transporting the conveyance table can be reduced. Furthermore, since almost no dust is generated, it is especially suitable as a transport device for use in a clean room.

The second invention further adds to the first invention a structure in which permanent magnets are fixedly installed on both sides of the conveyance path groove, so that the same effects as those of the first invention can be obtained. When the conveyance table moves, it can travel while maintaining a predetermined gap without contacting the inner wall surface of the conveyance path, and the conveyance table can be transported more stably than the first invention.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view taken perpendicular to the direction of movement of the conveyor table, showing an embodiment of the conveying device according to the first invention, and FIG. 2 is a cross-sectional view taken along the line A-A in FIG. 1. The figure is a cross-sectional view taken perpendicular to the direction of movement of the conveyor platform, showing an embodiment of the conveyance device according to the second invention. 1... Conveyance path, 2... Stator, 3.31.32・・・
・Permanent magnet, 4...Magnetic fluid, 5...Legs, 6...
・Transportation table, 61...Bottom surface of the conveyance table.

Claims (4)

[Claims] (1) In a conveyance device using a linear motor that uses a reaction plate as the bottom surface of the conveyance table, and a stator provided opposite to the reaction plate and the reaction plate, the linear motor is interposed in a groove-shaped conveyance path groove. The magnetic fluid includes a magnetic fluid and a permanent magnet fixed to the bottom surface of the conveying path groove, and a predetermined amount of magnetic fluid is attached to the upper surface of the permanent magnet, so that the conveying table is always levitated from the conveying path by the magnetic fluid. , a conveyance device characterized in that the conveyance is carried out by the thrust of a linear motor. (2) The conveyance device according to claim 1, wherein the permanent magnet is fixedly installed over the entire length of the travel range of the conveyance path. (3) In a conveyance device using a linear motor that uses a reaction plate as the bottom surface of the conveyance table and a stator provided opposite to the reaction plate and the reaction plate, the conveyance plate is interposed in a groove-shaped conveyance path groove. The magnet includes a magnetic fluid, a permanent magnet fixed to the bottom surface of the conveyance path groove, and a permanent magnet fixed to both sides of the conveyance path groove, and a predetermined amount of the magnetic fluid is fixed to the bottom surface of the conveyance path groove. The permanent magnets are attached to the upper surface of the conveyor path groove, and while the conveyor table is always levitated from the conveyor path by the magnetic fluid, the permanent magnets fixed to both sides of the conveyor path groove keep it in a predetermined position without coming into contact with the inner wall surface of the conveyor path groove. A conveyance device characterized in that the conveyance is carried out by the thrust of a linear motor while maintaining an interval of . (4) The conveyance device according to claim 3, wherein the permanent magnets fixed to the bottom and both side surfaces of the conveyance path groove are fixed over the entire length of the travel range of the conveyance path.