JPS6124821B2 - - Google Patents
Info
- Publication number
- JPS6124821B2 JPS6124821B2 JP51089114A JP8911476A JPS6124821B2 JP S6124821 B2 JPS6124821 B2 JP S6124821B2 JP 51089114 A JP51089114 A JP 51089114A JP 8911476 A JP8911476 A JP 8911476A JP S6124821 B2 JPS6124821 B2 JP S6124821B2
- Authority
- JP
- Japan
- Prior art keywords
- metal wire
- tip
- wire
- ball
- bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/015—Manufacture or treatment of bond wires
- H10W72/01551—Changing the shapes of bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
- H10W72/07141—Means for applying energy, e.g. ovens or lasers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
- H10W72/07168—Means for storing or moving the material for the connector
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07502—Connecting or disconnecting of bond wires using an auxiliary member
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07511—Treating the bonding area before connecting, e.g. by applying flux or cleaning
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/551—Materials of bond wires
- H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
- H10W72/5524—Materials of bond wires comprising metals or metalloids, e.g. silver comprising aluminium [Al]
Landscapes
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Wire Bonding (AREA)
Description
【発明の詳細な説明】
本発明は電気的スパークでアルミニウム線等の
酸化しやすい金属線を溶かしてボールを成形し、
この金属線をボンデイングする方法に関する。[Detailed description of the invention] The present invention melts easily oxidized metal wire such as aluminum wire using electric spark to form a ball.
This invention relates to a method for bonding metal wires.
従来、アルミニウム線をネールヘツドボンデイ
ングで使うことができなかつた。その理由とし
て、アルミニウム線は水素トーチで熱してもボー
ルができないこと、加熱したときに酸化し、素子
表面を汚すこと、これを防ぐため窒素雰囲気中で
加熱しようとしてもトーチが点火しないことが上
げられる。 Previously, aluminum wire could not be used in nail head bonding. The reasons for this are that aluminum wire does not form a ball even when heated with a hydrogen torch, that it oxidizes when heated and contaminates the element surface, and that the torch does not ignite even if you try to heat it in a nitrogen atmosphere to prevent this. It will be done.
本発明はこのような従来の方法の欠点を解消す
るものであつて、その目的とするところはアルミ
ニウム線をつかつてネールヘツドボンデイングが
できるアルミニウム線のボール形成方法を提供す
るにある。 The present invention has been made to overcome the drawbacks of the conventional methods, and its object is to provide a method for forming a ball using aluminum wire, which allows nail head bonding using the aluminum wire.
このような目的を達成するための本発明の要旨
は、ボンデイング用金属線として酸化しやすい金
属線をい、この金属線の先端にボールを形成し、
前記先端にボールを有する金属線を被ボンデイン
グ部の所定領域に接続する金属線ボンデイング方
法であつて、前記酸化しやすいボンデイング用金
属線をキヤピラリから導出させ、少くとも前記導
出されたボンデイング用金属線の先端を不活性ガ
ス雰囲気中におき、前記ボール形成時前記金属線
の延びる方向で前記金属線の先端と所定距離離間
した第1の位置に電極を存在させ、この状態で前
記金属線と前記電極との間に電圧を印加して前記
離間した電極と前記金属線の先端との間に放電を
生じさせ、前記金属線の先端にボールを形成し、
前記ボール形成後前記電極を前記金属線の先端に
対し前記第1の位置よりも遠い第2の位置に移動
し、その後前記被ボンデイング部の所定領域に前
記金属線を接続することを特徴とする金属線ボン
デイング方法にある。以下、添付図面に関連して
本発明の実施例について説明する。 The gist of the present invention to achieve such an object is to use a metal wire that is easily oxidized as a bonding metal wire, form a ball at the tip of this metal wire,
A metal wire bonding method in which the metal wire having a ball at the tip is connected to a predetermined region of a bonding target part, the metal wire for bonding that is easily oxidized is led out from a capillary, and at least the metal wire for bonding that is easily oxidized is led out from the capillary. The tip of the metal wire is placed in an inert gas atmosphere, and when forming the ball, an electrode is placed at a first position spaced apart from the tip of the metal wire by a predetermined distance in the direction in which the metal wire extends, and in this state, the metal wire and the Applying a voltage between the electrodes to generate a discharge between the spaced apart electrodes and the tip of the metal wire, forming a ball at the tip of the metal wire;
After the ball is formed, the electrode is moved to a second position farther from the first position with respect to the tip of the metal wire, and then the metal wire is connected to a predetermined area of the bonded portion. In the metal wire bonding method. Embodiments of the present invention will be described below with reference to the accompanying drawings.
第1図は本発明を実施する際に用いるボール成
形装置の一部を断面し一部を省略した正面図であ
る。同図において、ネイルヘツドボンデイング用
のキヤピラリ1は軸線にそつてアルミニウム線2
を通す穴3を有し、アルミニウウ線2はワイヤ・
ボビン4にかなりの長さ巻き付けられていて、必
要に応じて穴3を通してキヤピラリ1の生端から
引き出される。またキヤピラリ1とワイヤ・ボビ
ン4の間にワイヤ・クランパ5を配置し適宜にア
ルミニウム線2を把持するようにするとともに、
これらの間にはキヤピラリ1の尻部に延長させて
窒素(N2)などの不活性ガスを穴3を通してキヤ
ピラリ1の先端に供給きるよう不活性ガス供給管
6を設けている。さらにキヤピラリ1の近接位置
に折曲した電極片7を配置し、キヤピラリ1の先
端からたとえば1mm程度離れた低い位置にその一
端があるように設け、他端は電源8に接続し、や
はり電源8と接続させたアルミニウム線2との間
で電気的回路を構成させて、電極片7とアルミニ
ウム線2の先端との間で、放電によるパークを生
じるようにしている。 FIG. 1 is a partially sectional and partially omitted front view of a ball forming apparatus used in carrying out the present invention. In the same figure, a capillary 1 for nail head bonding is connected to an aluminum wire 2 along the axis.
The aluminum wire 2 has a hole 3 through which the wire is passed.
It is wound around the bobbin 4 for a considerable length and is pulled out from the raw end of the capillary 1 through the hole 3 as required. In addition, a wire clamper 5 is arranged between the capillary 1 and the wire bobbin 4 to appropriately grip the aluminum wire 2, and
An inert gas supply pipe 6 is provided between these so as to extend to the butt of the capillary 1 so that an inert gas such as nitrogen (N 2 ) can be supplied to the tip of the capillary 1 through the hole 3. Further, a bent electrode piece 7 is arranged near the capillary 1, and one end thereof is placed at a low position, for example, about 1 mm away from the tip of the capillary 1, and the other end is connected to a power source 8. An electric circuit is constructed between the electrode piece 7 and the aluminum wire 2 connected to the aluminum wire 2, so that a park is generated between the electrode piece 7 and the tip of the aluminum wire 2 due to discharge.
また、電極片7はアルミニウム線2にボール9
をつくるときのみキヤピラリ1の先端に対応され
るよう動かせるように設けている。 Moreover, the electrode piece 7 is attached to the aluminum wire 2 with a ball 9.
It is provided so that it can be moved so that it corresponds to the tip of the capillary 1 only when making the capillary.
つぎに、この装置をつかつてのアルミニウム線
のボール成形方法を第2図で説明すれば、第2図
aはアルミニウム線2にボールを形成する前の状
態であつて、電極片7はその先端がキヤピラリ1
の先端から外れた位置にくるように動かされた位
置にある。この状態から第2図bのように、電極
片7をキヤピラリ1に近づくように動かし、電極
片7の先端内側をキヤピラリ1の先端に対応させ
て、同時に不活性ガス供給管6から窒素(N2)ガ
スを穴3を通してキヤピラリ1先端付近に流しな
がら、電源8から任意の電流を流して電極片7の
先端からアルミニウム線2に向けて放電すれば、
これらの間にスパークが発生し、このスパークに
よりアルミニウム線2は溶けて先端にボール9が
できる。 Next, the method of forming a ball on an aluminum wire using this device will be explained with reference to FIG. 2. FIG. is capillary 1
It is in a position where it is moved so that it is in a position off the tip of the. From this state, move the electrode piece 7 closer to the capillary 1 as shown in FIG. 2 ) While the gas is flowing through the hole 3 to the vicinity of the tip of the capillary 1, an arbitrary current is applied from the power source 8 to discharge from the tip of the electrode piece 7 toward the aluminum wire 2.
A spark is generated between these, and the spark melts the aluminum wire 2, forming a ball 9 at the tip.
そこで、再び電極片7をキヤピラリ1から遠ざ
けてから、図示しない被ボンデイング側の電極と
リード線の間を往来させてネイルヘツドワイヤボ
ンデイングを行なう。そして電極とリード線間の
ボンデイングを1回終る都度、電極片7をキヤピ
ラリ1に近づけてアルミニウム線2の先端にボー
ル9をつくる。 Therefore, after moving the electrode piece 7 away from the capillary 1 again, nail head wire bonding is performed by moving the electrode piece 7 back and forth between the lead wire and the electrode on the side to be bonded (not shown). Each time the bonding between the electrode and the lead wire is completed, the electrode piece 7 is moved closer to the capillary 1 to form a ball 9 at the tip of the aluminum wire 2.
なお、前記実施例においては不活性雰囲気をつ
くるためのガスとして窒素(N2)ガスを用いたが
アルゴン(Ar)ガスを用いてもよい。また装置
全体を窒素(N2)雰囲気中に置いて行つてもよ
い。また、電源8とアルミニウム線2との電気的
な接続は、第1図に示すようにワイヤ・ボビン4
側から行うのでなく、第3図に示すようにワイ
ヤ・ボビン4とクランパ5の間で接点10を介し
てアルミニウム線2に接続を図る方法であつても
よい。 In the above embodiments, nitrogen (N 2 ) gas was used as a gas for creating an inert atmosphere, but argon (Ar) gas may also be used. Alternatively, the entire apparatus may be placed in a nitrogen (N 2 ) atmosphere. Further, the electrical connection between the power source 8 and the aluminum wire 2 is made using a wire bobbin 4 as shown in FIG.
Instead of connecting from the side, it is also possible to connect the aluminum wire 2 through the contact 10 between the wire bobbin 4 and the clamper 5, as shown in FIG.
以上の説明から明らかなように本発明によれ
ば、アルミニウム線2の先端に電極片7を近づけ
て対応させ、この電極片7からアルミニウム線2
の先端に向けて放電させることによつて生ずるス
パークによりアルミニウム線2を溶かしてアルミ
ニウム線2の先端に任意の大きさのボール9をつ
くることができ、かつ窒素(N2)ガスなどでスパ
ーク発生付近を不活性化して酸化を防いでいるこ
とから、従来では不可能であつたアルミニウム線
2のネールヘツドワイヤボンデイングが可能とな
る。したがつて、アルミニウム線といつた金
(Au)などからみて安価な線材で所望のワイヤボ
ンデイングができ原価低減が図れる上に、製品の
信頼度の向上が図れかつ能率向上の点においても
寄与できる。 As is clear from the above description, according to the present invention, the electrode piece 7 is brought close to the tip of the aluminum wire 2 so that the electrode piece 7 corresponds to the tip of the aluminum wire 2, and the aluminum wire 2
The aluminum wire 2 can be melted by the spark generated by discharging toward the tip of the aluminum wire 2, and a ball 9 of any size can be made at the tip of the aluminum wire 2, and the spark can be generated by nitrogen (N 2 ) gas or the like. Since the vicinity is inactivated to prevent oxidation, nail head wire bonding of the aluminum wire 2, which was previously impossible, becomes possible. Therefore, it is possible to perform the desired wire bonding with inexpensive wire materials such as aluminum wire and gold (Au), and not only can it reduce costs, but it can also contribute to improving product reliability and efficiency. .
第1図は本発明を実施する場合に用いるボール
形成装置、第2図a,bは第1図の装置によりボ
ールを形成する方法を示す説明図、第3図は電源
とアルミニウム線の他の接続方法を示す説明図で
ある。
1……キヤピラリ、2……アルミニウム線、3
……穴、4……ワイヤ・ボビン、5……ワイヤ・
クランパ、6……不活性ガス供給管、7……電極
片、8……電源、9……ボール、10……接点。
Fig. 1 is a ball forming apparatus used in carrying out the present invention, Figs. 2 a and b are explanatory diagrams showing a method of forming a ball using the apparatus of Fig. 1, and Fig. 3 is an illustration of a method for forming balls using the apparatus shown in Fig. 1. It is an explanatory diagram showing a connection method. 1... Capillary, 2... Aluminum wire, 3
... Hole, 4 ... Wire bobbin, 5 ... Wire
Clamper, 6... Inert gas supply pipe, 7... Electrode piece, 8... Power supply, 9... Ball, 10... Contact.
Claims (1)
属線を用い、この金属線の先端にボールを形成
し、前記先端にボールを有する金属線を被ボンデ
イング部の所定領域に接続する金属線ボンデイン
グ方法であつて、前記酸化しやすいボンデイング
用金属線をキヤピラリから導出させ、少くとも前
記導出されたボンデイング用金属線の先端を不活
性ガス雰囲気中におき、前記ボール形成時前記金
属線の延びる方向で前記金属線の先端と所定距離
離間した第1の位置に電極を存在させ、この状態
で前記金属線と前記電極との間に電圧を印加して
前記離間した電極と前記金属線の先端との間に放
電を生じさせ、前記金属線の先端にボールを形成
し、前記ボール形成後前記電極を前記金属線の先
端に対し前記第1の位置よりも遠い第2の位置に
移動し、その後前記被ボンデイング部の所定領域
に前記金属線を接続することを特徴とする金属線
ボンデイング方法。1. A metal wire bonding method in which a metal wire that is easily oxidized is used as a bonding metal wire, a ball is formed at the tip of the metal wire, and the metal wire having the ball at the tip is connected to a predetermined area of a bonded part. , leading out the easily oxidized bonding metal wire from the capillary, placing at least the tip of the leading out bonding metal wire in an inert gas atmosphere, and arranging the metal wire in the direction in which the metal wire extends when forming the ball. An electrode is placed at a first position spaced a predetermined distance from the tip of the metal wire, and in this state, a voltage is applied between the metal wire and the electrode to generate a discharge between the separated electrode and the tip of the metal wire. a ball is formed at the tip of the metal wire, and after the ball is formed, the electrode is moved to a second position that is farther from the first position with respect to the tip of the metal wire, and then the bonded part A metal wire bonding method, characterized in that the metal wire is connected to a predetermined region of the metal wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8911476A JPS5314650A (en) | 1976-07-28 | 1976-07-28 | Ball forming of alminum wire |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8911476A JPS5314650A (en) | 1976-07-28 | 1976-07-28 | Ball forming of alminum wire |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58135806A Division JPS5946038A (en) | 1983-07-27 | 1983-07-27 | Bonding device |
| JP59259151A Division JPS6156425A (en) | 1984-12-10 | 1984-12-10 | Bonding device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5314650A JPS5314650A (en) | 1978-02-09 |
| JPS6124821B2 true JPS6124821B2 (en) | 1986-06-12 |
Family
ID=13961855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8911476A Granted JPS5314650A (en) | 1976-07-28 | 1976-07-28 | Ball forming of alminum wire |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5314650A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02195527A (en) * | 1989-01-23 | 1990-08-02 | Mitsubishi Electric Corp | Objective lens driver |
-
1976
- 1976-07-28 JP JP8911476A patent/JPS5314650A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02195527A (en) * | 1989-01-23 | 1990-08-02 | Mitsubishi Electric Corp | Objective lens driver |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5314650A (en) | 1978-02-09 |
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