JPS6124822B2 - - Google Patents

Info

Publication number
JPS6124822B2
JPS6124822B2 JP52058845A JP5884577A JPS6124822B2 JP S6124822 B2 JPS6124822 B2 JP S6124822B2 JP 52058845 A JP52058845 A JP 52058845A JP 5884577 A JP5884577 A JP 5884577A JP S6124822 B2 JPS6124822 B2 JP S6124822B2
Authority
JP
Japan
Prior art keywords
semiconductor device
testing
present
cooling
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52058845A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53144682A (en
Inventor
Takehisa Sugawara
Tatsuo Hatanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5884577A priority Critical patent/JPS53144682A/ja
Publication of JPS53144682A publication Critical patent/JPS53144682A/ja
Publication of JPS6124822B2 publication Critical patent/JPS6124822B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP5884577A 1977-05-23 1977-05-23 Testing method of semiconductor devices Granted JPS53144682A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5884577A JPS53144682A (en) 1977-05-23 1977-05-23 Testing method of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5884577A JPS53144682A (en) 1977-05-23 1977-05-23 Testing method of semiconductor devices

Publications (2)

Publication Number Publication Date
JPS53144682A JPS53144682A (en) 1978-12-16
JPS6124822B2 true JPS6124822B2 (de) 1986-06-12

Family

ID=13095989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5884577A Granted JPS53144682A (en) 1977-05-23 1977-05-23 Testing method of semiconductor devices

Country Status (1)

Country Link
JP (1) JPS53144682A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5890734A (ja) * 1981-11-25 1983-05-30 Clarion Co Ltd 計測用試料台
JPS5974731U (ja) * 1982-11-10 1984-05-21 クラリオン株式会社 試料測定装置
JPS61131834U (de) * 1985-02-06 1986-08-18
JP2006250579A (ja) 2005-03-08 2006-09-21 Denso Corp 湿度センサの検査装置及び特性調整方法

Also Published As

Publication number Publication date
JPS53144682A (en) 1978-12-16

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