JPS6126246B2 - - Google Patents

Info

Publication number
JPS6126246B2
JPS6126246B2 JP58125759A JP12575983A JPS6126246B2 JP S6126246 B2 JPS6126246 B2 JP S6126246B2 JP 58125759 A JP58125759 A JP 58125759A JP 12575983 A JP12575983 A JP 12575983A JP S6126246 B2 JPS6126246 B2 JP S6126246B2
Authority
JP
Japan
Prior art keywords
surface wave
electrode
comb
distance
waves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58125759A
Other languages
Japanese (ja)
Other versions
JPS5925411A (en
Inventor
Tomosaburo Kitamura
Hiroshi Yamanoi
Yasutoshi Komatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP12575983A priority Critical patent/JPS5925411A/en
Publication of JPS5925411A publication Critical patent/JPS5925411A/en
Publication of JPS6126246B2 publication Critical patent/JPS6126246B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Description

【発明の詳細な説明】 本発明は表面波を利用した表面波フイルタの如
き表面波素子に係わる。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface wave element such as a surface wave filter that utilizes surface waves.

この種表面波素子は、例えば第1図に示す如
く、表面波伝播媒質、即ち圧電体基体1上に、
夫々対の櫛歯電極が交互に対向配置されてなる入
力電極2と出力電極3とが被着形成され両電極2
及び3間に接地電極4が配置されて成る。
This type of surface wave element, as shown in FIG.
Input electrodes 2 and output electrodes 3 each having a pair of comb-teeth electrodes arranged opposite to each other are adhered to each other.
A ground electrode 4 is arranged between the electrodes and 3.

この種表面波素子に於いては、その電極2及び
3の各対の櫛歯電極の対向幅Wをできるだけ大と
なして入力電極2によつて励起発生した表面波の
うち、直接出力電極3に向う有効表面波のエネル
ギーを大とし、他方向に回折によつて広がる不要
表面波の反射による不要波の影響をできるだけ小
さくするようにしている。
In this type of surface wave element, the opposing width W of each pair of comb-shaped electrodes of electrodes 2 and 3 is made as large as possible, so that the surface waves excited and generated by the input electrode 2 are directly transmitted to the output electrode 3. The energy of the effective surface waves directed toward is increased, and the influence of unnecessary waves due to reflection of unnecessary surface waves that spread in other directions due to diffraction is minimized.

ところがこのように櫛歯電極の対向幅Wを大と
すると、特に、例えばPZT(チタン酸鉛とジルコ
ン酸鉛との固溶体)系の圧電セラミツクのように
その誘電率εが1000前後という高誘電率を有する
表面波伝播媒質を用いた表面波素子では、そのイ
ンピーダンスが低く外部回路の負担が大きくな
る。
However, when the opposing width W of the comb-teeth electrodes is increased in this way, it is especially important to use piezoelectric ceramics with a high dielectric constant ε of around 1000, such as PZT (solid solution of lead titanate and lead zirconate)-based piezoelectric ceramics. In a surface wave element using a surface wave propagation medium having , the impedance is low and the load on the external circuit becomes heavy.

そこで、このような圧電セラミツクを用いた表
面波素子ではそのインピーダンスを高めるために
は、櫛歯電極の対向幅Wはできるだけ小さくする
ことが望まれる。今、圧電セラミツクを用いて
10.7MHzの表面波フイルタについて述べると、
この場合櫛歯電極の対向幅Wが1.5mm以上である
場合は本来の伝搬路を伝わる表面波のエネルギー
が大きいため不要表面波による影響は殆んど問題
にならないが、この幅を1.0mm以下とすると不要
表面波による影響が大となつてくる。これは回折
により広がつた表面波が音響インピーダンスの不
整合部即ち各電極2,3及び4の縁部、特にほぼ
表面波伝播方向(本明細書でいう表面波伝播方向
とは本来の表面波を伝播させるべき方向を指称
し、両電極2及び3を結ぶ方向をいう)に沿つて
延在する両外側縁部2a,2b,3a,3b及び
4a,4aにおいての反射が特に大きく影響して
いるのである。
Therefore, in order to increase the impedance of a surface acoustic wave element using such piezoelectric ceramic, it is desired that the opposing width W of the comb-teeth electrodes be made as small as possible. Now, using piezoelectric ceramics
Regarding the 10.7MHz surface wave filter,
In this case, if the opposing width W of the comb-teeth electrodes is 1.5 mm or more, the energy of the surface waves propagating through the original propagation path is large, so the influence of unnecessary surface waves will hardly be a problem, but this width should be set to 1.0 mm or less. In this case, the influence of unnecessary surface waves becomes large. This is because the surface waves spread by diffraction reach the mismatched areas of acoustic impedance, that is, the edges of each electrode 2, 3, and 4, especially in the direction of surface wave propagation (in this specification, the surface wave propagation direction is the original surface wave direction). Reflection at both outer edges 2a, 2b, 3a, 3b and 4a, 4a extending along the direction in which the electrodes 2 and 3 should be propagated has a particularly large influence. There is.

本発明においては、上述したように、表面波伝
播媒質上に、表面波の伝播方向に所定の間隔をお
いて配され表面波の伝播方向に対して直角方向に
沿つて延び所定の長さに渡つて互いに対向するよ
うに交互に配された対の櫛歯電極を有して成る表
面波素子において、各電極の各櫛歯部の先端と、
互いに他の電極の各外側縁との距離dを、表面波
の波長の3倍以上に選定するものである。
In the present invention, as described above, the device is arranged on the surface wave propagation medium at predetermined intervals in the propagation direction of the surface wave, extends along a direction perpendicular to the propagation direction of the surface wave, and has a predetermined length. In a surface wave element comprising a pair of comb-teeth electrodes arranged alternately so as to face each other across the surface, a tip of each comb-teeth portion of each electrode;
The distance d between each electrode and each outer edge of the other electrode is selected to be at least three times the wavelength of the surface wave.

第2図ないし第8図は夫々表面波速度が2300
m/secの圧電セラミツクによる基体1を用いた
10.7MHz(波長215μm)の表面波フイルタの特
性(各周波数−減衰利得)を示すもので、第2図
は対向幅Wが2.5mm、距離dが550μmの場合、第
3図は、対向幅Wが1.7mm、距離dが550μmの場
合、第4図は対向幅Wが1.5mm、距離dが550μm
の場合、第5図は対向幅Wが1.0mm、距離dが550
μmの場合、第6図は対向幅Wが0.7mm、距離d
が550μmの場合の各特性で、第7図は対向幅W
が1.0mm、距離dが600μm(表面波波長の約2.8
倍)の場合、第8図は対向幅Wが0.7mm、距離d
が750μm(表面波波長の約3.5倍)の場合の各特
性で、これら特性より明らかなように対向幅Wが
1mm以下では、距離dが550μmのものでは第5
図及び第6図中破線で囲んで示したように回折・
反射の影響がでてきて、理論通りの特性が得られ
ず、第7図乃び第8図に示す如く対向幅Wを1mm
以下としてもその距離dを表面波の1波長の2.8
倍以上とするとき、更に確実性を考えて3倍以上
に選定したものにあつては、不要波による影響が
取り除かれるものであることがわかる。
In Figures 2 to 8, the surface wave velocity is 2300, respectively.
Using the base 1 made of piezoelectric ceramic of m/sec
It shows the characteristics (each frequency - attenuation gain) of a 10.7 MHz (wavelength 215 μm) surface wave filter. Figure 2 shows the opposing width W when the opposing width W is 2.5 mm and the distance d is 550 μm, and Figure 3 shows the opposing width W. When is 1.7mm and distance d is 550μm, Fig. 4 shows that opposing width W is 1.5mm and distance d is 550μm.
In the case of Fig. 5, the opposing width W is 1.0 mm and the distance d is 550 mm.
In the case of μm, Figure 6 shows that the facing width W is 0.7 mm and the distance d
Fig. 7 shows the characteristics when W is 550 μm.
is 1.0 mm, distance d is 600 μm (approximately 2.8 of the surface wave wavelength)
8), the facing width W is 0.7 mm and the distance d
is 750 μm (approximately 3.5 times the surface wave wavelength).As is clear from these characteristics, when the opposing width W is 1 mm or less, the 5th
Diffraction and
Due to the influence of reflection, the characteristics according to theory could not be obtained, and the opposing width W was set to 1 mm as shown in Figures 7 and 8.
Even if the distance d is less than 2.8 of one wavelength of the surface wave,
It can be seen that when the value is set to 3 times or more, and 3 times or more is selected in consideration of reliability, the influence of unnecessary waves is removed.

尚、ここに各電極2及び3の各櫛歯電極の内側
の縁部2c,2d及び3c,3dは、これが櫛歯
によるジグザグパターンを有しているので、この
縁部においては、不要波が散乱されるので、之に
よる影響は殆んどない。
Incidentally, since the inner edges 2c, 2d and 3c, 3d of each comb-teeth electrode of each electrode 2 and 3 have a zigzag pattern due to the comb-teeth, unnecessary waves are not generated at these edges. Since it is scattered, there is almost no effect from this.

上述したように、本発明においては、表面波素
子においてその電極の実効部分即ち櫛歯電極の対
向部分から外側縁までの距離dを、伝播させるべ
き表面波の波長の3倍以上とするもので、このと
き、不要波の影響を回避することができるが、必
要に応じて更に不要波の影響を確実に除去するこ
とができるように表面波伝播媒質、即ち圧電基体
上に被着された電極のほぼ表面波伝播方向に沿つ
て延在する外縁部に表面波の吸収若しくは散乱手
段を設けることもできる。
As described above, in the present invention, the distance d from the effective part of the electrode, that is, the opposing part of the comb-shaped electrode, to the outer edge of the surface wave element is set to be three times or more the wavelength of the surface wave to be propagated. At this time, the influence of unnecessary waves can be avoided, but if necessary, in order to reliably eliminate the influence of unnecessary waves, a surface wave propagation medium, that is, an electrode coated on a piezoelectric substrate, is used. It is also possible to provide surface wave absorption or scattering means on the outer edge extending substantially along the surface wave propagation direction.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の説明に供する表面波素子の略
線的上面図、第2図ないし第8図は夫々その説明
に供する周波数−減衰利得曲線である。 1は表面波伝播媒質としての圧電基体、2は入
力電極、2a及び2bはその外側縁、2c及び2
dはその内側縁、3は出力電極、3a及び3bは
その外側縁、3c及び3dはその内側縁、4は接
地電極、4a及び4bはその外側縁である。
FIG. 1 is a schematic top view of a surface wave element for explaining the present invention, and FIGS. 2 to 8 are frequency-attenuation gain curves for explaining the invention. 1 is a piezoelectric substrate as a surface wave propagation medium, 2 is an input electrode, 2a and 2b are its outer edges, 2c and 2
d is its inner edge, 3 is its output electrode, 3a and 3b are its outer edges, 3c and 3d are its inner edges, 4 is a ground electrode, and 4a and 4b are its outer edges.

Claims (1)

【特許請求の範囲】[Claims] 1 表面波伝播媒質上に、表面波の伝播方向に所
定の間隔をおいて配され、上記表面波の伝播方向
に対して直角方向に沿つて延び所定の長さに渡つ
て互いに対向するように交互に配された対の櫛歯
電極を有して成る表面波素子において、各電極の
各櫛歯部の先端と、互いに他の電極の各外側縁と
の距離dを、上記表面波の波長の3倍以上に選定
した表面波素子。
1 Disposed on the surface wave propagation medium at a predetermined interval in the propagation direction of the surface wave, extending along a direction perpendicular to the propagation direction of the surface wave and facing each other over a predetermined length. In a surface wave element having pairs of comb-teeth electrodes arranged alternately, the distance d between the tip of each comb-teeth portion of each electrode and each outer edge of the other electrode is defined as the wavelength of the surface wave. Surface wave element selected to be more than 3 times more efficient.
JP12575983A 1983-07-11 1983-07-11 Surface wave element Granted JPS5925411A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12575983A JPS5925411A (en) 1983-07-11 1983-07-11 Surface wave element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12575983A JPS5925411A (en) 1983-07-11 1983-07-11 Surface wave element

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP14887575A Division JPS5931246B2 (en) 1975-12-12 1975-12-12 Hyomen Hasoshi

Publications (2)

Publication Number Publication Date
JPS5925411A JPS5925411A (en) 1984-02-09
JPS6126246B2 true JPS6126246B2 (en) 1986-06-19

Family

ID=14918111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12575983A Granted JPS5925411A (en) 1983-07-11 1983-07-11 Surface wave element

Country Status (1)

Country Link
JP (1) JPS5925411A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62127648U (en) * 1986-02-05 1987-08-13
US11255257B2 (en) 2017-08-28 2022-02-22 Kabushiki Kaisha Toyota Jidoshokki Turbocharger

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534609B2 (en) * 1974-06-12 1980-09-08

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62127648U (en) * 1986-02-05 1987-08-13
US11255257B2 (en) 2017-08-28 2022-02-22 Kabushiki Kaisha Toyota Jidoshokki Turbocharger

Also Published As

Publication number Publication date
JPS5925411A (en) 1984-02-09

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