JPS61270261A - 窒化珪素基セラミックスの製造方法 - Google Patents

窒化珪素基セラミックスの製造方法

Info

Publication number: JPS61270261A
Authority: JP; Japan
Prior art keywords: powder; silicon nitride; raw material; added; sintering
Prior art date: 1985-05-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP60111741A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0375504B2 (de

Inventor

宏爾林

晃山川

雅也三宅

久雄竹内

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sumitomo Electric Industries Ltd

Original Assignee

Sumitomo Electric Industries Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-05-23

Filing date

1985-05-23

Publication date

1986-11-29

1985-05-23 Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd

1985-05-23 Priority to JP60111741A priority Critical patent/JPS61270261A/ja

1986-11-29 Publication of JPS61270261A publication Critical patent/JPS61270261A/ja

1991-12-02 Publication of JPH0375504B2 publication Critical patent/JPH0375504B2/ja

Status Granted legal-status Critical Current

Links

229910052581 Si3N4 Inorganic materials 0.000 title claims description 11
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 11
239000000919 ceramic Substances 0.000 title claims description 10
238000004519 manufacturing process Methods 0.000 title claims description 6
239000000843 powder Substances 0.000 claims description 43
238000005245 sintering Methods 0.000 claims description 18
239000011812 mixed powder Substances 0.000 claims 1
239000002994 raw material Substances 0.000 description 18
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
238000012360 testing method Methods 0.000 description 6
230000007547 defect Effects 0.000 description 5
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
238000000034 method Methods 0.000 description 4
239000010703 silicon Substances 0.000 description 4
229910052710 silicon Inorganic materials 0.000 description 4
230000002411 adverse Effects 0.000 description 3
229910052681 coesite Inorganic materials 0.000 description 3
229910052906 cristobalite Inorganic materials 0.000 description 3
239000007791 liquid phase Substances 0.000 description 3
239000000203 mixture Substances 0.000 description 3
239000012071 phase Substances 0.000 description 3
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
229910010271 silicon carbide Inorganic materials 0.000 description 3
239000000377 silicon dioxide Substances 0.000 description 3
235000012239 silicon dioxide Nutrition 0.000 description 3
229910052682 stishovite Inorganic materials 0.000 description 3
229910052905 tridymite Inorganic materials 0.000 description 3
229910005091 Si3N Inorganic materials 0.000 description 2
MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
238000005452 bending Methods 0.000 description 2
150000001875 compounds Chemical class 0.000 description 2
230000007423 decrease Effects 0.000 description 2
230000000694 effects Effects 0.000 description 2
229910052757 nitrogen Inorganic materials 0.000 description 2
-1 Sialon Chemical compound 0.000 description 1
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
230000007797 corrosion Effects 0.000 description 1
238000005260 corrosion Methods 0.000 description 1
230000003247 decreasing effect Effects 0.000 description 1
230000006866 deterioration Effects 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
229910002804 graphite Inorganic materials 0.000 description 1
239000010439 graphite Substances 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
239000012535 impurity Substances 0.000 description 1
239000000463 material Substances 0.000 description 1
239000002184 metal Substances 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
238000005121 nitriding Methods 0.000 description 1
238000013001 point bending Methods 0.000 description 1
239000002861 polymer material Substances 0.000 description 1

Landscapes

Ceramic Products (AREA)

JP60111741A 1985-05-23 1985-05-23 窒化珪素基セラミックスの製造方法 Granted JPS61270261A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP60111741A JPS61270261A (ja)	1985-05-23	1985-05-23	窒化珪素基セラミックスの製造方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP60111741A JPS61270261A (ja)	1985-05-23	1985-05-23	窒化珪素基セラミックスの製造方法

Publications (2)

Publication Number	Publication Date
JPS61270261A true JPS61270261A (ja)	1986-11-29
JPH0375504B2 JPH0375504B2 (de)	1991-12-02

Family

ID=14569008

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP60111741A Granted JPS61270261A (ja)	1985-05-23	1985-05-23	窒化珪素基セラミックスの製造方法

Country Status (1)

Country	Link
JP (1)	JPS61270261A (de)

1985
- 1985-05-23 JP JP60111741A patent/JPS61270261A/ja active Granted

Also Published As

Publication number	Publication date
JPH0375504B2 (de)	1991-12-02

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