JPS6127381A - ポペツト弁駆動装置 - Google Patents
ポペツト弁駆動装置Info
- Publication number
- JPS6127381A JPS6127381A JP14679684A JP14679684A JPS6127381A JP S6127381 A JPS6127381 A JP S6127381A JP 14679684 A JP14679684 A JP 14679684A JP 14679684 A JP14679684 A JP 14679684A JP S6127381 A JPS6127381 A JP S6127381A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- poppet valve
- fluid
- poppet
- pressure chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 73
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 230000000694 effects Effects 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K47/00—Means in valves for absorbing fluid energy
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Valve-Gear Or Valve Arrangements (AREA)
- Fluid-Driven Valves (AREA)
- Actuator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14679684A JPS6127381A (ja) | 1984-07-17 | 1984-07-17 | ポペツト弁駆動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14679684A JPS6127381A (ja) | 1984-07-17 | 1984-07-17 | ポペツト弁駆動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6127381A true JPS6127381A (ja) | 1986-02-06 |
| JPH0512590B2 JPH0512590B2 (de) | 1993-02-18 |
Family
ID=15415727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14679684A Granted JPS6127381A (ja) | 1984-07-17 | 1984-07-17 | ポペツト弁駆動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6127381A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110730869A (zh) * | 2017-07-04 | 2020-01-24 | 株式会社富士金 | 致动器、阀、流体供给系统、以及半导体制造装置 |
-
1984
- 1984-07-17 JP JP14679684A patent/JPS6127381A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110730869A (zh) * | 2017-07-04 | 2020-01-24 | 株式会社富士金 | 致动器、阀、流体供给系统、以及半导体制造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0512590B2 (de) | 1993-02-18 |
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