JPH0512590B2 - - Google Patents

Info

Publication number
JPH0512590B2
JPH0512590B2 JP14679684A JP14679684A JPH0512590B2 JP H0512590 B2 JPH0512590 B2 JP H0512590B2 JP 14679684 A JP14679684 A JP 14679684A JP 14679684 A JP14679684 A JP 14679684A JP H0512590 B2 JPH0512590 B2 JP H0512590B2
Authority
JP
Japan
Prior art keywords
valve
poppet valve
fluid
poppet
pressure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14679684A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6127381A (ja
Inventor
Yoshiharu Yonekubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
Ishikawajima Harima Heavy Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishikawajima Harima Heavy Industries Co Ltd filed Critical Ishikawajima Harima Heavy Industries Co Ltd
Priority to JP14679684A priority Critical patent/JPS6127381A/ja
Publication of JPS6127381A publication Critical patent/JPS6127381A/ja
Publication of JPH0512590B2 publication Critical patent/JPH0512590B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K47/00—Means in valves for absorbing fluid energy

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
  • Fluid-Driven Valves (AREA)
  • Actuator (AREA)
JP14679684A 1984-07-17 1984-07-17 ポペツト弁駆動装置 Granted JPS6127381A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14679684A JPS6127381A (ja) 1984-07-17 1984-07-17 ポペツト弁駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14679684A JPS6127381A (ja) 1984-07-17 1984-07-17 ポペツト弁駆動装置

Publications (2)

Publication Number Publication Date
JPS6127381A JPS6127381A (ja) 1986-02-06
JPH0512590B2 true JPH0512590B2 (de) 1993-02-18

Family

ID=15415727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14679684A Granted JPS6127381A (ja) 1984-07-17 1984-07-17 ポペツト弁駆動装置

Country Status (1)

Country Link
JP (1) JPS6127381A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7148989B2 (ja) * 2017-07-04 2022-10-06 株式会社フジキン アクチュエータ、バルブ、流体供給システム、および半導体製造装置

Also Published As

Publication number Publication date
JPS6127381A (ja) 1986-02-06

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