JPS61277143A - Sample transfer device of electron microscope - Google Patents

Abstract

PURPOSE:To facilitate the transfer of a sample and a sample table, by preventing effectively an interference of the sample to the object lens. CONSTITUTION:When a sample transfer device 13 is activated to move and incline a sample 10 within an object lens, the second interfering member 17 is moved and inclined in the same manner within the first interfering member 16. When the sample 10 and the sample table 12 approach the object lens 11, the second interfering memory 17 contacts the first interfering member 16. In this case, since the second interfering member 17 is formed larger than the sample 10 and the sample table 12, the sample 10 and the sample table 12 don't interfere the object lens 11. Therefore, the sample can be transferred easily without any interference of the sample 10 and the sample table 12 to the object lens 11.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a sample moving device for slightly moving a sample to the left in an electron microscope, and particularly to a sample moving device used in an electron microscope of the type in which the sample is observed inside an objective lens. Relating to mobile devices.

[Conventional technology]

Generally, the sample moving device of an electron microscope is located in a sample chamber provided below the lens barrel of an electron microscope.
Some types include a sample moving device 13 that includes a moving device that moves in the y and z directions and a tilting device that allows rotation about a rotation axis T that is perpendicular to the optical axis of the objective lens.

Here, the X direction is a direction that passes through the center of the objective lens and is perpendicular to the optical axis O, and the Y direction is a direction that is perpendicular to the optical axis 0 and perpendicular to the X axis.
The two directions are parallel to the optical axis, and the rotation axis T is perpendicular to the optical axis O, usually in the same direction as the X direction and passing through the electron beam irradiation position of the sample.

Conventionally, there is a sample moving device 13 for this electron microscope as shown in FIG. In this case, a sample stage 2 on which a sample 1 is placed is provided on a first movable stage 3. The first moving table 3 is movable on a first rail 4 provided on the second moving table 6 along the Y direction. And, like the first moving table 3, this second moving table 6 has a second rail 5 provided on the third moving table 19 along the X direction.
The third movable table 19 is rotatable about the above-mentioned rotation axis T, and a fourth movable table is provided on the third rail T provided along two directions. It is installed on a moving table 8. These moving tables are moved manually or by a motor (not shown).

[Problem that the invention seeks to solve]

By the way, in order to improve the performance of an electron microscope, it is desirable to make the working distance Wd as small as possible, and in recent years there are devices in which a sample is placed inside an objective lens for observation. In this case,
If the movable range of the sample stage is narrow, there is a risk of interference between the sample stage and the objective lens and damage to the sample. For this reason, the observer must be extremely careful when moving the sample, which puts a heavy burden on the observer.

[Failure to solve the problem]

In order to solve the above-mentioned problems and facilitate the movement of a sample, the invention according to the present application provides a first invention in which a sample movement device of an electron microscope is connected to an objective lens of an electron microscope. A sample stage on which a sample is placed, a moving device that can move the sample stage in three orthogonal directions, a tilting device that rotates the sample stage about a rotation axis perpendicular to the optical axis of the objective lens, and an inside of the objective lens. a first interference member having an internal shape that is substantially the same as that of the sample stage on which the sample is placed; and a second interference member that prevents interference with the objective lens.

Further, in a second invention according to the present application, in addition to the configuration of the first invention described above, an interference position display device is provided that displays the contact positions of the first and second interference members. .

Furthermore, in the third invention, in addition to the configuration of the first invention, a moving direction display device is provided to display in which direction the sample can be moved.

〔Example〕

Embodiments of the sample moving device for an electron microscope according to the present invention will be described below.

1 to 3 show an embodiment of a sample moving device for an electron microscope according to the first invention of the present application. In this embodiment, a sample 10 is placed on a sample stage 12 so as to be located within an objective lens 11, and an electron beam E is directed onto the sample 10 from the objective lens 11.

And this sample stage 12 has x and y as in the conventional case.

2. Movement in the direction and rotation around the rotation axis T Since this sample moving device 13 has the same structure as that shown previously, the same members are given the same reference numerals, and detailed description thereof will be omitted. Omitted. In the sample chamber 15 in which these sample moving devices and the like are housed, the rotation axis T and the objective lens 1
1 and the objective lens 1 in which the sample 10 is placed.
A first interference part # having the same internal shape as that of No. 1
, 16 are provided. This first interference member 16 is
Rotation 41] For the T, Y, and Z directions, the objective lens 11
It is fixed in the sample chamber 15 so as to be at the same position as .

Further, a second interference member 11 having a similar shape, which is slightly larger than the shape of the sample 10 placed on the sample stage 12, is attached to the first moving table 3 of the sample moving device 13 via an arm 11. Like the first interference member 16, this second interference member 11 is on the extension of the rotation axis T, and is connected to the sample stage 12 and Y.
the same position in the z direction, and the first interference member 16
It is supported by an arm 18 so that the positional relationship is the same as that between the objective lens 11 and the sample stage 12.

Therefore, according to this embodiment, when the sample moving device 13 is operated to move and tilt the sample 10 within the objective lens, as shown in FIGS. 2 and 3, the second interference member 17
similarly moves and tilts within the first interference member 16. Then, when the sample 10 and the sample stage 12 approach the objective lens 11, the second interference member 17 becomes larger than the sample 10 and the sample stage 16 because the second interference member is formed to be larger than the sample 10 and the sample stage 16. The sample 10 and sample stage 12 are in contact with the objective lens 1.
Do not interfere with 1.

Therefore, according to this embodiment, since no interference occurs between the sample 10 and the sample stage 12 and the objective lens 11, the sample can be easily moved.

Next, an embodiment of the second invention of the present application will be described. 4 to 7 show an embodiment of the second invention of the present application.

In this example, the structure of the sample moving device and the provision of the first and second interference members are the same as those described above.
Since it is similar to the embodiment of the invention, its explanation will be omitted. In the present invention, in addition to the configuration of the first invention described above, when the first interference member abuts the second interference member, the second interference member is located at which position on the first interference member. An interference position display device is provided to indicate whether contact has occurred. This interference position display device includes a first interference member 20 and a second interference member 21.
An electrode is provided on the first interference member 20, and when the first and second interference members 20, 21 are in contact with each other, the display panel displays which position of the first interference member 20 is in contact.

As shown in FIGS. 4 to 6, the electrodes provided on the interference member include rectangular electrodes 22 provided at equal angles on the inner surface of the side wall 20a over the entire circumference of the first interference member 20. On the inner surface of the top plate 20b, fan-shaped electrodes 23 are provided radially from the center at equal angles. Also, the second interference member 2
1 is provided with an electrode 24 that is integrated over substantially the entire surface.

The display panel is connected to the first interference member 20 as shown in FIG.
A display device 25, such as a light emitting diode, corresponding to the electrode 22 provided in the , and a similar display device 26 corresponding to the electrode 23
It consists of And these display devices 25 and 26
are assumed to light up when the respective corresponding electrodes and the electrodes 24 provided on the second interference member 21 come into contact.

Therefore, the observer can know to which position on the inner wall of the objective lens 11 the sample 10 and the sample stage 12 are close, and can easily move the sample 10 and the like.

In this embodiment, the contact point is detected by using electrodes provided on both interference members, but it may be detected by other means such as 7-inch length.

Next, the third invention of the present application will be explained in detail. Figures 8 to 1
Figure 0 shows an embodiment of the third invention of the present application, and in this embodiment, the structure of the sample moving device and the provision of the first and second interference members are similar to the first invention described above. Since it is similar to the embodiment, detailed explanation thereof will be omitted.

In the present invention, in addition to the configuration of the first invention described above,
A movement direction display device is provided to indicate in which direction the sample can be moved. In this moving direction display device, electrodes are provided on the first and second interference members similarly to the second invention described above, and as shown in FIG.
(X-axis direction) left and right (Y-axis direction) and divided into four parts, with switches S1, S2. S3
．． S4, and the electrodes 23 of the top plate 20b are set to the upper left and upper right, respectively, and the switches S5. It is configured as S6. Then, depending on where the electrode of the second interference member 17 comes into contact, one of the switches (two switches when the contact point is the front, rear, left and right ends) is activated to move the sample stage 12 in which direction. Show what you can move. For example, as shown in FIG. 8, the switches 30 for moving the operation panel in each direction are lit only in the directions in which they can be moved, and only the lit switches are operated.

In order to realize such a control panel, a circuit configuration as shown in FIG. 10 may be used. In the figure, M indicates a motor that moves the sample stage 12 in each direction, and R8z...R
85 is a switch that is turned off by the operation of switch S]...S6, PB is a movable switch 30 on the operation panel, L is a light rail of each movable switch, and LS is provided at the lower limit in two directions. A limit switch is shown.

According to this circuit, for example, if the switch Sl is activated, movements to the left, forward, up, right rotation, down, and left rotation are prohibited;
Only the right and rear operation switch lights will light up, and only these operation switches can be operated.

Therefore, according to this embodiment, the observer can determine the direction in which the sample can be moved by looking at the illuminated operation buttons on the operation panel. &! In addition, the sample will not move even if you accidentally press an operation switch that is not lit, making it extremely easy to move the sample.

〔Effect of the invention〕

As explained above, according to the inventions of the present application, interference between the sample and the objective lens is effectively prevented.
In addition to making it easier to move the sample and the sample stage, in the second invention it is possible to know the closest point of the sample to the objective lens, and in the third invention it is possible to know the movable direction of the sample and the sample stage. Therefore, it is possible to move the sample more easily.

[Brief explanation of drawings]

FIG. 1 is a partial sectional view showing an embodiment of the sample moving device according to the first invention of the present application, and FIG. 2 is an IF in FIG. 1 showing the objective lens and sample stage of the sample moving device shown in FIG. 3 is a sectional view taken along the line ■-■ in FIG. 1 showing the first and second interference members of the sample moving device shown in FIG. 1, and FIGS. 4 to 6 are FIG. 7 is a diagram showing the display panel of the sample moving device according to the second invention of the present application, FIG. 8 is a diagram showing the operation panel used in the embodiment of the sample moving device according to the third invention of the present application, and FIG. 9 is a diagram showing the electrode division of the first interference member in the embodiment of the third invention of the present application. , FIG. 10 is a circuit diagram showing a circuit for operating the operating panel shown in FIG. 8, and FIG. 11 is a perspective view showing a conventional sample moving device. 10... Sample 11... Objective lens 12
...Sample stand 13...Sample moving device 16.
...First interference member 17...Second interference member patent applicant Akashi Seisakusho Co., Ltd. Figure 2 Figure 3 Figure 1! Figure 5 Figure IIB Figure 8 Figure 9 Figure 10 Figure 11

Claims (1)

[Claims] 1) A sample stage for placing a sample inside the objective lens of an electron microscope, a moving device capable of moving the sample stage in three orthogonal directions, and a device perpendicular to the optical axis of the objective lens. a first interference member having an internal shape substantially the same as the inside of the objective lens; and a first interference member having an internal shape substantially the same as the sample stage on which the sample is placed. and a second interference member that prevents interference between the sample and the objective lens by moving the sample according to the positional relationship between the sample and the objective lens. 2) A sample stage that places a sample inside the objective lens of an electron microscope, a moving device that can move this sample stage in three orthogonal directions, and a rotating axis that is perpendicular to the optical axis of the objective lens. a tilting device, a first interference member having an internal shape substantially the same as the inside of the objective lens, and a first interference member having substantially the same shape as the sample stage on which the sample is placed, the sample and the objective lens being moved inside the first interference member; a second interference member that moves in a positional relationship to prevent interference between the sample and the objective lens; and an interference position display device that displays which part of the first interference member the second interference member is in contact with. A sample moving device for an electron microscope, comprising: 3) A sample stage on which a sample is placed inside the objective lens of an electron microscope, a moving device that can move this sample stage in three orthogonal directions, and a rotating axis that is perpendicular to the optical axis of the objective lens. a tilting device, a first interference member having an internal shape substantially the same as the inside of the objective lens, and a first interference member having substantially the same shape as the sample stage on which the sample is placed, the sample and the objective lens being moved inside the first interference member; An electron microscope comprising: a second interference member that moves in a positional relationship to prevent interference between the sample and the objective lens; and a movement direction display device that displays in which direction the sample can be moved. Sample moving device.