JPS61287640A - Conveying device for lead frame - Google Patents

Abstract

PURPOSE:To make it easily conformable to a lead frame different in width by only altering width of two guide rails, by supporting a lead frame holding device slidably on one side of these two guide rails capable of adjusting an interval. CONSTITUTION:When a handle 66 is rotated, a screw shaft 63 rotates whereby guide blocks 60 and 61 move in contrary directions to each other, altering an interval between guide rails 4 and 5. In this case, a lead frame holding device 15 and its driving device both are locked to the guide rail 4 tight via a shifting shaft 16 so that even if such a lead frame as being different in width is used, each position of holding claw members 18 an 20 is in no case altered. Therefore, a side part of the lead frame is surely holdable at all times without minutely adjusting a positional relation with the lead frame.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a lead frame conveying device provided in a die bonder device mainly used for manufacturing semiconductor integrated circuits and the like.

Conventional technology Conventionally, as a technology for conveying lead frames, the ninth
There was something like the one shown in the picture. That is, 70 is the transfer hole 1 of the lead frame 1 as shown in FIG.
71 is a bar member to which the feed bin 70 is fixed; 72 is fixed to the bar member 71;
This is a guide member that guides the A roller 73 is connected to a driving means (not shown) and rotates the cam 75 via a belt 74. A roller 76 is fixed to the roller 73 and rotates the cam 75.
This is a crank rod that rotatably supports 7. The cam 75 is in contact with the rod member 71 and moves the rod member 71 up and down. 78 is a spring that presses the lead frame 1 appropriately.

In the lead frame conveyance device configured as described above, first, the roller 73 rotates to move the feed bin 70 in the six directions of the arrows via the guide means 72 and the rod member 71, and the cam 75 rotates according to the roller 73. to push up the rod member 71. Then, the feed bottle 70 moves in the direction of arrow B and penetrates into the transfer hole 1b of the lead frame 1. When the roller 73 further rotates, the guide means 72 moves to the right, and accordingly the bin 70 moves in the direction of arrow C while passing through the transport hole, thereby transporting the lead frame 1. When the lead frame 1 moves to a predetermined position, the cam 75 lowers the rod member 71 and the bottle 70 is removed from the lead frame 1. The bin 70 is moved in the direction of arrow A by the rotation of the roller 73 and returned to its original position. spring 7
8 presses the lead frame 1 appropriately to prevent the lead frame 1 from moving due to vibration or the like.

Problems to be Solved by the Invention However, with the above configuration, it is necessary for the bottle 70 to accurately penetrate the transfer hole 1b of the lead frame, and when changing the type of lead frame, the position of the bottle 70 must be changed. It was necessary to make fine adjustments, which required a lot of effort and time.

The present invention has been made in view of the above problems, and it is an object of the present invention to realize a lead frame conveying device that can easily accommodate many types of lead frames.

Means for Solving the Problem Two guide rails holding the lead frame are supported so that the interval between them can be adjusted, and one guide rail is supported so as to be slidable along the guide rail. A lead frame gripping device and a drive means for moving this gripping device were provided, and this gripping device was provided with a claw member for gripping the lead frame.

Function: With the above configuration, lead frames with different widths can be easily accommodated by simply changing the widths of the two guide rails. In this case, since the gripping device is fixed to one of the guide rails, the positional relationship between the gripping device and the lead frame does not change.

EXAMPLES The present invention will be described in detail below. FIG. 8 shows a die bonding apparatus using a lead frame conveying apparatus according to the present invention, and 1 is a lead frame, which is stacked and set on the left side of the die bonding apparatus when viewed from the front. 2
1 is a lead frame supply device for sucking lead frames 1 with a suction head 3 and placing them one by one on lead frame conveyance guide rails 4 and 5. The guide rail 4 is provided with a conveying device for conveying the lead frame 1, as shown in FIG. Reference numeral 6 denotes an adhesive supply device for applying a die attaching adhesive to the die attaching portion 1a of the lead frame 1 shown in FIG. 7 is a bonding device for attaching a die to the lead frame 1 positioned at a predetermined position on the guide rails 4 and 5.

Reference numeral 8 denotes a magazine in which the lead frames 1 that have been bonded are stacked and stored therein. 9 is silicon wafer 10
The wafer pallets are stacked on the left side. The silicon wafer 10 is placed on a wafer pallet 9, set at a predetermined position by an automatic wafer supply device, and divided into dies. Further, the wafer pallet 9 after bonding is stored in the empty pallet storage device 11 on the right side when viewed from the front with the remaining defective dies on it.

Next, the lead frame conveying device in this embodiment will be explained based on FIG.

A support member 12 is attached to the outer side of the guide rail 4 with screws 13 and 14, and slidably supports a moving shaft 16 to which the gripping device 15 is fixed. Support member 1
In addition to the one shown in FIG. 1, the guide rail 2 is also provided on the lead frame transport direction side of the guide rail 4 in order to reliably support the moving shaft 16. The gripping device 15 includes a lead frame gripping claw member 18 rotatably supported by a shaft 17.
, lead frame gripping claw members 20 rotatably supported by a shaft 19 are provided, respectively, and these are configured to be driven by an air cylinder 21.

FIG. 2 is an exploded view of the gripping device 15. 22 is a support body that supports each part, and a claw member 18 is provided on the front surface of the support body 22.
Guide parts 23 and 24 that support and 20 are provided, and gripping parts 25 and 26 that sandwich the moving shaft 16 are provided at the lower part, respectively. 27 is a screw 28 for pinching the moving shaft 16
is the screw hole into which it is inserted. Reference numerals 29 and 30 are shaft holes provided at the upper portions of the guide portions 23 and 24, into which the shaft 17 is fitted. On the other hand, 31 and 32 are shaft holes provided at the lower part of the guide parts 23 and 24, into which the shaft 19 is fitted.

33 is a shaft hole provided in the claw member 18 into which the shaft 17 is fitted. 3.4 is a shaft hole provided in the claw member 20 into which the shaft 19 is fitted. A protrusion 35 is provided at the base of the claw member 20, and a recess 37 into which one end of a spring 36 fits is provided on the back side of the protrusion 35. Super steels 18a and 20a are joined to the tips of the claw members 18 and 20, and the claw members 1
Protrusions 18b and 18C are provided at both ends of the portions that hold down the lead frames in the eight examples.

A gear 37 is fixed to one end of the shaft 17, while the shaft 19
A gear 38 that meshes with the gear 37 is fixed to one end of the .

The claw member 20 is inserted between the guide members 23 and 24 so that the shaft hole 34 is aligned with the shaft holes 31 and 32, and the shaft 1
It is held by passing 9 through each shaft hole. Then, the shaft 19 and the claw member 20 are fixed by fitting the screw 40 into the screw hole 39 provided in the claw member 23 and tightening it. As shown in FIG.
inserted between.

On the other hand, the claw member 18 is similarly inserted between the guide members 23 and 24 and is held by passing through the shaft 17. Then, by fitting the screw 43 into the screw hole 42 and tightening it, the shaft 17 and the claw member 18 are fixed. When the claw members 18 and 20 are attached in this way, the gears 37 and 38 mesh with each other as shown in FIG.
9 will rotate in opposite directions.

The clamping parts 25 and 26 clamp the cylindrical moving shaft 16, and fix the gripping device 15 to the moving shaft 16 by tightening the screw 28. For this purpose, loosen the screw 28 and move the gripping device 15 to the fourth position.
By rotating in the direction of arrow H shown in the figure, the height at which the gripping device 15 grips the lead frame 1 can be adjusted. In this embodiment, as shown in FIG. 5, the gripping device 15 is positioned so that when the lead frame is gripped, the gripped portion of the lead frame does not hit the protrusions 4a and 4b of the guide rail 4. Adjust.

44 is a screw hole provided in the center of the support body 22;
As shown in the figure, an air cylinder 21 is accommodated and fixed inside.

The tip of the rod 45 of the air cylinder 24 is located above the protrusion 35 of the claw member 20, and the air cylinder 24
When air pressure is applied to the rod 45, the rod 45 protrudes and presses the protrusion 35 from above, and the claw member 20 rotates slightly in the direction of arrow E in FIG. 4 about the shaft 19 as a fulcrum. As the shaft 19 rotates, the action of the gears 38 and 37 causes the shaft 17 to rotate.
rotates in the opposite direction to one shaft, and the claw member 18 fixed to the shaft 17 slightly rotates in the direction of arrow F. That is, the pawl members 18, 20 rotate in opposite directions and their tips approach each other so as to abut each other.

When the air pressure in the air cylinder is reduced, lot 45
moves backward, and the claw members 20 and 18 rotate in opposite directions due to the repulsive force of the spring 36.

Only one gripping device configured as described above is shown in the figure, but in this embodiment, a total of three gripping devices are provided along the guide rail 4, each of which has a single movement axis 1.
It is fixed at 6.

Projection part 4 on which the lead frame of guide rail 4 is placed
In the range in which the claw members 18 and 20 of (a) move, cutout portions 4c are provided so as to avoid the respective tips of the claw members. Further, the guide rail 4.5 is provided with a protrusion 4b for preventing the lead frame 1 from coming off during transportation. 46 has one side fixed to the moving shaft 16,
The other is a clamping member that clamps the timing belt 47 and moves the gripping device 15 as the timing belt 47 moves.

Next, a driving device for moving the gripping device 15 in the direction of arrow G along the guide rail 4 will be described. Reference numeral 48 denotes a motor mounting plate that is attached to the outer part of the guide rail 4 with screws 49 and 50. Motor 51 is screw 52
The drive shaft is attached to the front side of the motor mounting plate 48 with its drive shaft protruding toward the back side. A timing belt pulley 53 is attached to the drive shaft of the motor 51, and rotation is transmitted via a timing belt 54 to a pulley 55 freely attached to the back surface. A boolean IJ 56 is coaxially fixed to the pulley 55, and the timing belt 47 is hung around the pulley 56. Note that the other end of the timing belt 47 is hung on a pulley 57 fixedly provided on the guide rail 4. 58 is pulley 55
and a root portion attached to the motor mounting plate 48 of the shaft supporting the pulley 56. Note that the operation of the motor 51 is numerically controlled by a computer provided within the die bonder apparatus.

5 is a support member whose lower part is fixed to the base and supports the guide rails 4 and 5; 60 is guide rail 4
A guide block 61 is attached to the back side of the outer side of the guide rail 5 with screws, and a guide plotter 61 is attached to the back side of the outer side of the guide rail 5 with screws. is slidably supported. A screw shaft 63 is provided on the support member 59 and rotatably supported by a bearing 64, and both ends thereof are connected to the guide block 43.
．． It penetrates the hole provided in 44. Regarding the screw shaft 63, the threads cut at one end have an opposite pitch to the threads cut at the other end. 65 is fixedly attached to the guide block 61, and the screw shaft 6
This is a female threaded member having a threaded hole into which one end of 3 fits.

Although not shown in the figure, the guide block 60 (III) is equipped with a female threaded member having screw holes having a pitch opposite to that of the female threaded member 65, and the other end of the screw shaft 63 is attached to this female threaded member. 66 is a handle provided at the end of the screw shaft 63 for rotating the screw shaft.

Support member 59 and guide block 60.6 explained above
1. The device for adjusting the distance between the guide rails 4 and 5, which includes a guide rod 62, a screw shaft 63, a bearing 64, a female threaded member 65, and a handle 66, is shown at only one location in the figure, but the device for adjusting the distance between the guide rails 4 and 5 is 2 along the length of
The guide rails 4 and 5 are provided at two locations and hold the guide rails 4 and 5.

The operation of the lead frame conveying device configured as above will be described below. First, when starting up the apparatus, the lead frame gripping device 15 is retracted to the right from the position shown in the first figure so that the lead frame 1 placed on the guide rail by the lead frame supply device and the gripping claw members 18 do not intersect. It is necessary to keep it. The support member 12 is provided with a photo ink club taro 7 for detecting the initial position of the gripping device 15, and the left end of the moving shaft 16 is provided with a blocking piece 68 for blocking light from a photo interrupter 67. When activated, the gripping device 15 is programmed to be in a position where the light from the photointerrupter is blocked by the blocking piece 68.

Next, the operation during bonding will be explained.

The lead frame 1 is placed on guide rails 4 and 5 by a lead frame supply device 2 shown in FIG.

The gripping device 15 moves to the left side with the gripping claw members 18.20 open, and the gripping claw tips are attached to the lead frame 1 (
It stops when it reaches a predetermined position (not shown). Next, air pressure is applied to the air cylinder 21, and the claw members 18, 20 clamp the lead frame 1 as shown in FIGS. 5 and 6. At this time, the gripped portion of the lead frame 1 is separated from the protrusion 4a of the guide rail 4 with which the lead frame 1 comes into contact.

Next, the gripping device 15 moves to the left and conveys the lead frame 1 to a predetermined position. When the gooey attachment portion 1a of the lead frame 1 reaches a predetermined position, the gripping device 15 stops, the air pressure in the air cylinder 21 decreases, and the claw members 21 and 22 are opened by the springs 36. Thereafter, the die is bonded to the attachment portion 1a by the bonding device 7. The gripping bag M15 returns to its original position, grips the lead frame 1 again, and transports the lead frame 1 so that the next gooey attachment portion reaches a predetermined position.

In this embodiment, the above-described operations are repeated, and the wires are bonded onto the lead frame one after another. Movement of the gripping device 15 and control of air pressure to the air cylinder are as follows:
Everything is done according to a program stored in the computer.

In the lead frame transport device as described above, the gripping claw members 18 and 20 can grip the lead frame 1 at any position on the lead frame 1, so that it can easily accommodate many types of lead frames. .

Also, to accommodate lead frames of different widths, the handle 66 shown in FIG. 1 is turned. As a result, the screw shaft 63 rotates, and the guide block 60
．． 61 can be moved in opposite directions to change the distance between the guide rails 4.5. However, the gripping device for lead frame! 15 and its driving device are fixed to the guide rail 4, even if lead frames of different widths are used, the gripping position of the gripping claw members 18, 20 on the lead frame will not change.

Also, depending on the type of lead frame, the gripping claw member 1
8.20 may hold the ends of adjacent lead frames together at the end of the lead frame. If the ends of the lead frames are deformed as shown in FIG. 7 and the tip surfaces of the gripping claw members 18 and 20 are flat, it will be difficult to securely grip both lead frames. becomes. In this embodiment, in consideration of this problem, protrusions 18b and 18c are provided on the claw member 18 side. This results in
Even if the end of the lead frame is slightly deformed, the space between the protrusions 18b and 18c absorbs the deformation, and both lead frames can be reliably gripped.

Furthermore, when the lead frame 1 is gripped, the gripped portion of the lead frame 1 is floating from the gadrail 4 as shown in FIG. 5, so there is a problem that the lead frame 1 is damaged during transportation. It can be resolved.

Effects of the Invention The present invention provides a lead frame gripping device movable along this guide rail and a drive means for moving this gripping device on one side of the guide rail that holds the lead frame, thereby increasing the width. Even when using many different types of lead frames, since the gripping device is fixed to the guide rail, it is possible to always reliably grip the sides of the lead frame without having to make detailed adjustments to the positional relationship with the lead frame. .

[Brief explanation of the drawing]

FIG. 1 is a perspective view of essential parts of a lead frame conveyance device according to an embodiment of the present invention, FIG. 2 is an exploded view of a lead frame gripping device in the same conveyance device, and FIG. 3 is a side view of the same gripping device. Figure 4 is a sectional view of the gripping device fixed to the moving shaft, Figure 5 is a sectional view of the main part of the gripping device gripping the lead frame, and Figure 6 is the gripping device gripping the lead frame. FIG. 7 is a front view of the gripping device in a state where the end of the lead frame is gripped, and a plan view of the arm. 4.5... Guide rail 12... Support member 15... Lead frame gripping device 16...
Moving axis 18...Claw member 20...
・Claw member 21...Air cylinder 22...
・・Support body 47・・・Timing belt 48・
... Motor mounting plate 51 ... Motor 59
...Supporting member 60.61 ...Guide block 62 ...Guide rod 63 ...Screw shaft 65 ...Female thread member Name of agent Patent attorney Toshio Nakao and 1 other person 2nd (21 Fig. 4 Fig. 6 Fig. 7 R #!9 Fig. 7 δ Fig. 10

Claims (1)

[Claims] A first guide rail that holds one side of the lead frame, a second guide rail that holds the other side of the lead frame, and a distance between the first guide rail and the second guide rail. a lead frame gripping device having support means for variable support and slidably supported on a first guide rail along the guide rail; and a drive for moving the gripping device along the guide rail. The method is characterized in that a pair of claw members, at least one of which is rotatable at least one of which is rotatable at the gripping device, is provided so as to surround the first guide rail. Conveying device for lead frames.