JPS6130077U - Single crystal manufacturing equipment - Google Patents
Single crystal manufacturing equipmentInfo
- Publication number
- JPS6130077U JPS6130077U JP11421684U JP11421684U JPS6130077U JP S6130077 U JPS6130077 U JP S6130077U JP 11421684 U JP11421684 U JP 11421684U JP 11421684 U JP11421684 U JP 11421684U JP S6130077 U JPS6130077 U JP S6130077U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- crystal manufacturing
- crucible
- manufacturing equipment
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図ａは本考案による単結晶製造装置の要部を示す平
面図、第１図ｂは本考案による単結晶製造装置の要部を
示す側断面図、第２図ａは結晶育成の初期段階における
るつぼと固液界面の位置関係を示子ための図・第２図ｂ
ｃよ本考案番こよる単結晶製造装置を用いて単結晶を製
造する場合において、第２図ａに示す状態における垂直
方向の温度分布を示すための図、第３図ａは結晶育成の
後期段階におけるるつぼと固液界面の位置関係を示すた
めの図、第３図ｂは従来の単結晶製造装置を用いて単結
晶を製造する場合において、第３図ａに示す状態におけ
る垂直方向の温度分布を示すための図、第３図Ｃは本考
案による単結晶製造装置を用いて単結晶を製造する場合
において、第３図ａに示す状態における垂直方向の温度
分布を示すための図である。
１・・・耐火性の支持ケース、２・・・るつぼ、３・・
・高周波コイル、４・・・ガス管、５・・・ガス量調整
部、６・・・流量計、７・・・ガスボンベ、８・・・原
料融液、９・・・単結晶。Figure 1a is a plan view showing the main parts of the single crystal manufacturing apparatus according to the present invention, Figure 1b is a side sectional view showing the main parts of the single crystal manufacturing apparatus according to the invention, and Figure 2a is the initial stage of crystal growth. Diagram to show the positional relationship between the crucible and the solid-liquid interface at different stages: Figure 2b
Figure 3a is a diagram showing the vertical temperature distribution in the state shown in Figure 2a, when a single crystal is manufactured using the single crystal manufacturing apparatus according to the present invention, and Figure 3a is the latter stage of crystal growth. Figure 3b is a diagram showing the positional relationship between the crucible and the solid-liquid interface at different stages, and Figure 3b shows the temperature in the vertical direction in the state shown in Figure 3a when a single crystal is manufactured using a conventional single crystal manufacturing apparatus. FIG. 3C is a diagram showing the temperature distribution in the vertical direction in the state shown in FIG. 3a when a single crystal is manufactured using the single crystal manufacturing apparatus according to the present invention. . 1... Fireproof support case, 2... Crucible, 3...
- High frequency coil, 4... Gas pipe, 5... Gas amount adjustment section, 6... Flow meter, 7... Gas cylinder, 8... Raw material melt, 9... Single crystal.
Claims (1)
装置において、該るつぼの壁直上に放射一 状に配列さ
れ、前記るつぼ内にガスを吐出するた−めの少なくとも
３本のガス管と、該ガスの吐出量を調節するための調節
機構とを有することを特徴とする単結晶製造装置。A single crystal manufacturing apparatus using a Czochralski method, which includes a crucible and includes at least three gas pipes arranged in a radial pattern directly above the wall of the crucible and for discharging gas into the crucible; 1. A single crystal manufacturing apparatus, comprising: an adjustment mechanism for adjusting the amount of gas discharged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11421684U JPS6130077U (en) | 1984-07-28 | 1984-07-28 | Single crystal manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11421684U JPS6130077U (en) | 1984-07-28 | 1984-07-28 | Single crystal manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6130077U true JPS6130077U (en) | 1986-02-22 |
| JPH0129241Y2 JPH0129241Y2 (en) | 1989-09-06 |
Family
ID=30673243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11421684U Granted JPS6130077U (en) | 1984-07-28 | 1984-07-28 | Single crystal manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6130077U (en) |
-
1984
- 1984-07-28 JP JP11421684U patent/JPS6130077U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0129241Y2 (en) | 1989-09-06 |
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