JPS6130701A - Magnetic scale and its preparation - Google Patents
Magnetic scale and its preparationInfo
- Publication number
- JPS6130701A JPS6130701A JP15363784A JP15363784A JPS6130701A JP S6130701 A JPS6130701 A JP S6130701A JP 15363784 A JP15363784 A JP 15363784A JP 15363784 A JP15363784 A JP 15363784A JP S6130701 A JPS6130701 A JP S6130701A
- Authority
- JP
- Japan
- Prior art keywords
- wire material
- ion
- magnetic scale
- heat treatment
- ion implantation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 10
- 238000010438 heat treatment Methods 0.000 claims abstract description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 14
- 239000000956 alloy Substances 0.000 claims description 14
- 150000002500 ions Chemical class 0.000 claims description 9
- 230000007797 corrosion Effects 0.000 abstract description 12
- 238000005260 corrosion Methods 0.000 abstract description 12
- 238000005468 ion implantation Methods 0.000 abstract description 8
- 230000006866 deterioration Effects 0.000 abstract description 2
- 230000002093 peripheral effect Effects 0.000 abstract 3
- 229910001339 C alloy Inorganic materials 0.000 abstract 2
- 238000007747 plating Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910002546 FeCo Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 238000005491 wire drawing Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、耐食性に優れた磁気スケールおよびその製造
方法に係る。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetic scale with excellent corrosion resistance and a method for manufacturing the same.
（従来技術とその問題点）
悪環境下でも記録媒体の酸化による磁気特性の劣化が生
じない磁気スケールの要求が強い。このような耐食性に
優れた磁気スケールおよびその製造方法として、本発明
者らによって、Ｎ１−Ｐ あるいはＺｎのメッキ層を形
成することが提案されている（特願昭５８−０５５４４
４〜５８−０５５４４６ ）。(Prior art and its problems) There is a strong demand for a magnetic scale that does not cause deterioration of magnetic properties due to oxidation of the recording medium even under adverse environments. As a magnetic scale with excellent corrosion resistance and a method for manufacturing the same, the present inventors have proposed forming a plating layer of N1-P or Zn (Japanese Patent Application No. 58-05544).
4-58-055446).
しかしながら、上記方法は、耐食性には優れているもの
の、機械的強度の点では、十分でない。即ち、メッキ層
が周囲からの衝撃によって剥れたり、また検出素子ある
いはその他構造部との摺動によって、摩耗したりするな
どの欠点があった。However, although the above method is excellent in corrosion resistance, it is not sufficient in terms of mechanical strength. That is, there have been drawbacks such as the plating layer peeling off due to impact from the surroundings, or being worn due to sliding with the detection element or other structural parts.
（発明の目的）
本発明は、このような従来の欠点を除去せしめて、耐食
性に優れた磁気スケールおよびその製造方法を提供する
ことにある。(Object of the Invention) An object of the present invention is to eliminate such conventional drawbacks and provide a magnetic scale with excellent corrosion resistance and a method for manufacturing the same.
（発明の構成）
Ｔなわち、本発明は、高保磁力ＦｅＣｏＭｎＣ系合金線
材を記録媒体とした磁気スケールにおいて、前記Ｆ’ｅ
ＯＯＭｎＯ系合金線材の全周面あるいはその一部にＣｒ
イオンが２００ｎｍ〜１μｍの深さ、イオン打ち込みさ
れていることを特徴とする磁気スケールおよびＦｅＣｏ
ＭｎＣ系合金線材を高保磁力とするための熱処理工程と
ＦｅＣｏＭｎＣ系合金線材ｌこＣｒイオンを打ち込む工
程とを有Ｔることを特徴とする磁気スケールの製造方法
である。(Structure of the Invention) In other words, the present invention provides a magnetic scale using a high coercive force FeCoMnC alloy wire as a recording medium.
Cr is added to the entire circumference or part of the OOMnO alloy wire.
Magnetic scale and FeCo characterized in that ions are implanted to a depth of 200 nm to 1 μm
This method of manufacturing a magnetic scale is characterized by comprising a heat treatment step for making the MnC alloy wire material high in coercive force and a step of implanting Cr ions into the FeCoMnC alloy wire material.
（構成の詳細な説明）
本発明は、上述の構成をとることにより、従来の耐食の
ためのメッキ層の剥落や摩耗が生じるという問題点を解
決した。(Detailed Description of Configuration) The present invention solves the problem of peeling and wear of the conventional corrosion-resistant plating layer by adopting the above-described configuration.
本発明でいうＦｅＣｏＭｎＣ系合金線材は、Ｆｅ。The FeCoMnC alloy wire referred to in the present invention is Fe.
Ｃｏ、ＭｎおよびＣ元素の組成あるいはＦｅ 、 Ｃｏ
。Composition of Co, Mn and C elements or Fe, Co
.
Ｍｎ、Ｏ元素からなる組成にＳｉ 、Ｖ、Ｍｏ、ＶＶ、
Ｂ。In the composition consisting of Mn and O elements, Si, V, Mo, VV,
B.
Ｃｒ、Ｂｅ元素を１種以上の元素を添加したものである
（特願昭５６−１５４’３６９ 、５６−１５４３７０
．５６−１５４３７３ ）。One or more elements of Cr and Be are added (Japanese Patent Application No. 56-154'369, 56-154370
．． 56-154373).
ＦｅＣｏＭｎＣ系合金線材の全周面あるいは一部にＣｒ
イオンを打ち込む深さは、２００ｎｍ〜１μｍと限定す
る。その限定理由は、打ち込み深さが、２００ｒｍを下
まわると耐食性が劣化する。筐た１μｍを上まわってイ
オン打ち込みを行なっても耐食性が劣化する。Cr is added to the entire circumference or part of the FeCoMnC alloy wire.
The depth of ion implantation is limited to 200 nm to 1 μm. The reason for this limitation is that when the driving depth is less than 200 rm, corrosion resistance deteriorates. Even if ion implantation is performed at a depth exceeding 1 μm, the corrosion resistance will deteriorate.
以下、実施例に従って詳細に説明する。Hereinafter, a detailed explanation will be given according to examples.
実施例では、ＦｅＣｏＭｎＣ合金あるいはＦｅＯ。Examples include FeCoMnC alloy or FeO.
ＭｎＯ系合金のうち、重量比で４０％Ｃｏ −２０％Ｍ
ｎ−１，４％５ｉ−０，４％Ｃ−残部Ｆｅからなる合金
を使用する。前記合金は８５０℃で１時間溶体化処理・
急冷した後、減面率９３％の冷間伸線加工を施し、伸線
材を矯正機で直伸化したものを使用する。Among MnO-based alloys, 40%Co-20%M by weight
An alloy consisting of n-1,4%5i-0,4%C-balance Fe is used. The alloy was solution-treated at 850°C for 1 hour.
After quenching, a cold wire drawing process with an area reduction rate of 93% is performed, and the drawn wire material is straightened using a straightening machine.
製造工程は、下記のＡ、’Ｂ、０およびＤの４種類を選
んだ。Ｃｒイオン打ち込み時間は３０分、イオン加速電
圧は２０ＫｅＶ’ 、 ５０ＫｅＶ 、 、１００ Ｋ
ｅＶおよび２００ ＫｅＶ 、イオン注入値は５Ｘ１０
′６（イオン／−）真空度はｌＸｌ０ Ｔｏｒｒとし
た。The following four manufacturing processes, A, 'B, 0, and D, were selected. The Cr ion implantation time was 30 minutes, and the ion acceleration voltage was 20KeV', 50KeV, , 100K.
eV and 200 KeV, ion implantation value is 5X10
'6 (ion/-) The degree of vacuum was 1X10 Torr.
ＡＢ ＯＤ
線材の固定は、製造工程Ａ、Ｂの場合は第１図（ａ）の
ような記録媒体ｌを固定台２と止め具３を用いネジ４で
固定する構造の場合に行なわれ、０゜Ｄの場合は、第１
図（ｂ）のように固定台２中の記録媒体１の局面の一部
があられれている構造ζこ対して行なわれる。したがっ
て、イオン打ち込み時に、製造工程Ａ、Ｂでは、線材を
回転させながら、全周面にイオン打ち込みを行ない、Ｃ
１Ｄでは、回転させずに固定台でおおわれていない線材
の一部ζこイオン打ち込みを行なった。AB OD In manufacturing processes A and B, the fixing of the wire is carried out in the case of a structure in which the recording medium l is fixed with a screw 4 using a fixing base 2 and a stopper 3, as shown in FIG. In the case of ゜D, the first
This is performed on a structure ζ in which a part of the surface of the recording medium 1 in the fixing base 2 is roughened as shown in FIG. 2(b). Therefore, during ion implantation, in manufacturing steps A and B, ions are implanted onto the entire circumferential surface while rotating the wire rod, and C
In 1D, ions were implanted into a portion of the wire that was not covered by the fixed table without rotating.
以上のようにして製造された磁気スケール用着磁体は、
８５℃で１００％湿度の環境で耐食試験を行なった。そ
の結果を第１表に示す。The magnetized body for magnetic scale manufactured as described above is
A corrosion resistance test was conducted in an environment of 85° C. and 100% humidity. The results are shown in Table 1.
○：記録媒体表面が酸化しなかった。○: The surface of the recording medium was not oxidized.
×：記録媒体表面が酸化し７た。x: The surface of the recording medium was oxidized.
また、センダスト磁気ヘッドを記録媒体ｌこ接触させて
、１万往準摺動させた場合についても、上記と同様の耐
食試験を行なった。その結果、第１表と同様の結果が得
られた。In addition, the same corrosion resistance test as above was conducted when the Sendust magnetic head was brought into contact with the recording medium and slid 10,000 times. As a result, the same results as in Table 1 were obtained.
製造工程人において、イオン打ち込みのイオン加速電圧
を１０ＫｅＶ 、 ５００ ＫｅＶとした場合について
上記と同様の耐食試験を行なったところ、１０ ＫｅＶ
の場合は、３００時間、 ５００ ＫｅＶの場合は４０
０時間で、記録媒体表面が酸化し始めた。When the manufacturing process personnel conducted a corrosion resistance test similar to the above when the ion acceleration voltage of ion implantation was 10 KeV and 500 KeV, it was found that 10 KeV
300 hours for 500 KeV, 40 hours for 500 KeV
At 0 hours, the surface of the recording medium began to oxidize.
（発明の効果）
以上のようｌこ、本発明の磁気スケールおよびその製造
方法は、磁気スケールの応用範囲が広がり、しかも悪環
境での用途も広がる最近の状況で、その工業的価値が大
きい。(Effects of the Invention) As described above, the magnetic scale of the present invention and the method for manufacturing the same have great industrial value in the recent situation where the range of application of magnetic scales is expanding, and moreover, their use in adverse environments is also expanding.
【図面の簡単な説明】
第１図は磁気スケールの一部を示す斜視図。図で１は記
録媒体、２は固定台、３は止め具、４はネジである。
７１ 図
と
（ｂ）BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing a part of the magnetic scale. In the figure, 1 is a recording medium, 2 is a fixing base, 3 is a stopper, and 4 is a screw. 71 Figure and (b)
Claims (2)
した磁気スケールにおいて、前記ＦｅＣｏＭｎＣ系合金
線材の全周面あるいはその一部に、Ｃｒイオンが２００
ｎｍ〜１μｍの深さに分布していることを特徴とする磁
気スケール。(1) In a magnetic scale using a high coercive force FeCoMnC alloy wire as a recording medium, 200% of Cr ions are present on the entire circumferential surface or a part of the FeCoMnC alloy wire.
A magnetic scale characterized by being distributed at a depth of nm to 1 μm.
の熱処理工程と、ＦｅＣｏＭｎＣ系合金線材にＣｒイオ
ンを打ち込む工程とを有することを特徴とする磁気スケ
ールの製造方法。(2) A method for manufacturing a magnetic scale, comprising a heat treatment step for making the FeCoMnC alloy wire material high in coercive force, and a step of implanting Cr ions into the FeCoMnC alloy wire material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15363784A JPS6130701A (en) | 1984-07-24 | 1984-07-24 | Magnetic scale and its preparation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15363784A JPS6130701A (en) | 1984-07-24 | 1984-07-24 | Magnetic scale and its preparation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6130701A true JPS6130701A (en) | 1986-02-13 |
Family
ID=15566865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15363784A Pending JPS6130701A (en) | 1984-07-24 | 1984-07-24 | Magnetic scale and its preparation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6130701A (en) |
-
1984
- 1984-07-24 JP JP15363784A patent/JPS6130701A/en active Pending
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