JPS61425A - Air purification system - Google Patents

Abstract

PURPOSE:To perfectly remove fine particulate dust by springing out the dust to a porous cylinder, in an air purification method, by introducing air into the porous cylinder rotating at a high speed and allowing the same to pass through the wall of the porous cylinder. CONSTITUTION:Air is passed through an ultra-fine particle filter (HEPA filter) 3 while pressurized by a blower 2. At this time, the greater part of dust with a particle size of 0.1mum or more is adhered to the filter 3 and dust with a particle size of 0.1mum or less remains in air. When this air is passed through pores of a porous cylinder 5 rotating at a high speed in a wind tunnel 4, dust is impinged to the wall of the porous cylinder and sprung out to the inner surface of the wind tunnel 4 to be collected to the bottom surface 9 of said wind tunnel 4. Dustless air is taken out from the take-out port 10 provided to the upper part of the wind tunnel 4 and the dust accumulated to the bottom surface of the wind tunnel 4 is periodically removed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical field to which the invention pertains] The present invention relates to an air cleaning system suitable for cleaning air in a clean room.

[Prior art and its problems]

For air purification in conventional clean rooms, etc., use HEP
Although an ultrafine particle J141 filter called the A filter is used, the dust particles that can be removed are 0.1 ttm or more, and dust with smaller particles cannot be removed. As wafer microfabrication progresses in the future, the batten width will not be smaller than 0.1 μm.
The following dust causes defects in the conductor manufacturing report.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide an air cleaning method that can remove dust of 0.1 μm or less that cannot be removed with a HEPA filter.

[Summary of the invention]

The present invention is an air purification system in which a porous cylinder is rotated at high speed in an air stream to be purified, and the perforated cylinder repels dust to obtain clean air.

〔Effect of the invention〕

According to the present invention, particulate dust that could not be removed by a filter can be completely removed, contributing to the improvement of VLSI manufacturing technology.

[Embodiments of the invention]

An embodiment of the present invention will be described with reference to FIG.

The air 1 to be purified is pressurized by a blower 2 and passed through an ultrafine particle filter (hereinafter referred to as HEPA (High Efficiency)
Parti-culate Air) 3 (referred to as a filter) is passed through.

At this time, most of the dust of 0.1 μm or more adheres to the glass fibers of the filter, but the dust of 0.1 μm or less is removed. When this air is passed through the holes of a porous cylinder 5 that is rotated at high speed by an electric motor 6 in the wind tunnel 4, the air is
It becomes the flow. Dust in the air is repelled by the inner surface of the wind tunnel 4 and collected on the bottom surface 9 by the perforated cylinder rotating at high speed.

Dust-free air is supplied from an outlet 10 at the top of the wind tunnel to necessary semiconductor manufacturing equipment or a clean room. Dust collected on the bottom of the wind tunnel is periodically removed by an operator.

In the embodiment, only one perforated cylinder was used, but it is possible to increase the number of cylinders as needed, and it is possible to obtain highly clean air. Note that the porous cylinder that rotates at high speed can be made of CFR, P (carbon fiber reinforced plastic), etc. to withstand stress during high speed rotation, thereby making it possible to maintain strength while maintaining the porous cylinder. Further, the type may be an impeller type. Furthermore, continuous operation is possible by providing an initial outlet under the bottom surface 9 where dust collects.

The installation of the perforated cylinder, that is, the rotating body, is the j-th
As shown in FIG. 2, stabilization is attempted by rotatably supporting the cylindrical body 5 at its upper part. Further, in order to prevent a temperature rise due to wind damage of the rotating cylindrical body, it is better to cool the wind tunnel section 4 or to cool the incoming air at a filter section.

Further, the electric motor used in the present invention is a high-speed rotating electric motor capable of rotating at about 40,000 to 50,000 rpm.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view showing an embodiment of the present invention, and FIG. 2 is a cross-sectional view of essential parts showing another embodiment of the present invention. 1...Air to be purified, 2...Blower, 3...H
EPA filter, 4... Wind tunnel, 5... High-speed porous cylinder, 6... Electric motor, 7.8... Flow of purified air, 9... Bottom surface where dust collects, 10... Cleaned air outlet.

Claims (1)

[Claims] Bringing the air to be purified into contact with a high-speed rotating porous cylinder,
An air cleaning system characterized in that the air is configured to pass through the porous cylindrical wall to remove dust in the air.