JPS6143158B2 - - Google Patents

Info

Publication number: JPS6143158B2
Authority: JP; Japan
Prior art keywords: workpiece; chamber; holder arm; drum; notch
Prior art date: 1981-07-11
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP10843781A

Other languages

English (en)

Japanese (ja)

Other versions

JPS5813485A (ja

Inventor

Yasumasa Fukuda

Mitsuo Nakamori

Isao Yamada

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

TOKYO SEIMITSU SOKUKI KK

Original Assignee

TOKYO SEIMITSU SOKUKI KK

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1981-07-11

Filing date

1981-07-11

Publication date

1986-09-26

1981-07-11 Application filed by TOKYO SEIMITSU SOKUKI KK filed Critical TOKYO SEIMITSU SOKUKI KK

1981-07-11 Priority to JP10843781A priority Critical patent/JPS5813485A/ja

1983-01-25 Publication of JPS5813485A publication Critical patent/JPS5813485A/ja

1986-09-26 Publication of JPS6143158B2 publication Critical patent/JPS6143158B2/ja

Status Granted legal-status Critical Current

Links

230000007246 mechanism Effects 0.000 claims description 17
230000001133 acceleration Effects 0.000 description 18
238000010894 electron beam technology Methods 0.000 description 12
238000012545 processing Methods 0.000 description 9
239000002245 particle Substances 0.000 description 7
238000003466 welding Methods 0.000 description 7
238000000034 method Methods 0.000 description 5
238000010586 diagram Methods 0.000 description 4
238000011161 development Methods 0.000 description 2
230000005540 biological transmission Effects 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
238000003780 insertion Methods 0.000 description 1
230000037431 insertion Effects 0.000 description 1
239000000463 material Substances 0.000 description 1
238000005259 measurement Methods 0.000 description 1
238000002844 melting Methods 0.000 description 1
230000008018 melting Effects 0.000 description 1
230000002093 peripheral effect Effects 0.000 description 1
230000035939 shock Effects 0.000 description 1
239000010409 thin film Substances 0.000 description 1
238000012546 transfer Methods 0.000 description 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K15/00—Electron-beam welding or cutting
- B23K15/06—Electron-beam welding or cutting within a vacuum chamber

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Particle Accelerators (AREA)
Sealing Devices (AREA)
Welding Or Cutting Using Electron Beams (AREA)

JP10843781A 1981-07-11 1981-07-11 ワ−ク交換装置 Granted JPS5813485A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP10843781A JPS5813485A (ja)	1981-07-11	1981-07-11	ワ−ク交換装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP10843781A JPS5813485A (ja)	1981-07-11	1981-07-11	ワ−ク交換装置

Publications (2)

Publication Number	Publication Date
JPS5813485A JPS5813485A (ja)	1983-01-25
JPS6143158B2 true JPS6143158B2 (fr)	1986-09-26

Family

ID=14484743

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP10843781A Granted JPS5813485A (ja)	1981-07-11	1981-07-11	ワ−ク交換装置

Country Status (1)

Country	Link
JP (1)	JPS5813485A (fr)

1981
- 1981-07-11 JP JP10843781A patent/JPS5813485A/ja active Granted

Also Published As

Publication number	Publication date
JPS5813485A (ja)	1983-01-25

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