JPS614772U - spray equipment - Google Patents

spray equipment

Info

Publication number
JPS614772U
JPS614772U JP8709184U JP8709184U JPS614772U JP S614772 U JPS614772 U JP S614772U JP 8709184 U JP8709184 U JP 8709184U JP 8709184 U JP8709184 U JP 8709184U JP S614772 U JPS614772 U JP S614772U
Authority
JP
Japan
Prior art keywords
substrate
support
spray device
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8709184U
Other languages
Japanese (ja)
Other versions
JPH049031Y2 (en
Inventor
潔文 山田
Original Assignee
ホ−ヤ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ホ−ヤ株式会社 filed Critical ホ−ヤ株式会社
Priority to JP8709184U priority Critical patent/JPS614772U/en
Publication of JPS614772U publication Critical patent/JPS614772U/en
Application granted granted Critical
Publication of JPH049031Y2 publication Critical patent/JPH049031Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来のスプレー装置を示し、同図ａは全体構造
図、同図ｂに支持具に基板を設置した状態の平面図及び
同図Ｃは支持具の平面図である。 第２図は本考案の実施例によるスプレー装置内の支持具
とその関連部分を示し、同図ａは支持具の組立図、同図
ｂは固定台の拡大図、同図ｃｃ’よ支持具に基板を設置
した状態の平面図及び同図ｄは同図ＣのＸ−Ｘ線箇所の
断面図、第３図は本考案の他の実施例によるスプレー装
置内の支持具に基板を設置した状態の平面図、同図ｂは
同図ａのＸＸ線箇所の断面図、及び同図Ｃは固定台の拡
大図である。 １３・・・・・・チャンバー、１４・・・・・・噴出孔
、１５・・・・・・噴出液、１７．３１・・・基板、１
８・・・・・・支持具、１９，２０・・・・・・支持棒
、２１〜２８・・・・・・１対の穴、２９・・・・・・
ネジ、３０，３２・・・・・・固定台、２１，３３・・
・・・・当接面、２７．３４・・・・・・載置面。FIG. 1 shows a conventional spray device, in which FIG. 1A is an overall structural diagram, FIG. 1B is a plan view of a state in which a substrate is installed on a support, and FIG. Figure 2 shows the support device and its related parts in the spray device according to the embodiment of the present invention, figure a is an assembled view of the support device, figure b is an enlarged view of the fixing base, figure cc' is the support device. Figure 3 is a plan view of the substrate installed in the substrate, and Figure 3 is a sectional view taken along the line X-X in Figure C, and Figure 3 is a plan view of the substrate installed in the support in the spray device according to another embodiment of the present invention. Figure b is a sectional view taken along the line XX in figure a, and figure C is an enlarged view of the fixing base. 13...Chamber, 14...Ejection hole, 15...Ejection liquid, 17.31...Substrate, 1
8...Support tool, 19, 20...Support rod, 21-28...Pair of holes, 29...
Screws, 30, 32... Fixing base, 21, 33...
...Abutting surface, 27.34...Placement surface.

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）基板をチャンバー内の支持具に設置し、前記チャ
ンバーに設けられた噴出孔から前記基板に向けて噴出液
を噴出するスプレー装置において、前記支持具が互いに
交叉する２本の支持棒と、前記交叉方向における前記基
板の前面部分に当接し、かつ前記端面近傍の底面部分を
載置する４個の固定台とからなり、前記支持には前記交
叉する点を中心にした１対の穴を前記基板の各種サイズ
に応じて複数個設け、前記穴にネジを通して前記固定台
を前記支持棒に固定することを特徴とするスプレー装置
。(1) In a spray device in which a substrate is installed on a support in a chamber and a jet liquid is ejected from an ejection hole provided in the chamber toward the substrate, the support has two support rods that intersect with each other. , consisting of four fixing bases that abut the front part of the substrate in the intersecting direction and on which the bottom part near the end face is placed, and the support has a pair of holes centered at the intersecting point. A spray device characterized in that a plurality of are provided according to various sizes of the substrate, and the fixing base is fixed to the support rod by passing a screw through the hole. （２）実用新案登録請求の範囲第１項において、前記基
板の形状が正方形であり、前記交叉方向が前記基板の対
角線方向であることを特徴とするスプレー装置。(2) Utility Model Registration The spray device according to claim 1, wherein the substrate has a square shape, and the intersecting direction is a diagonal direction of the substrate. （３）実用新案登録請求の範囲第１項において、前記基
板の形状が円形であり、前記交叉方向が前記基板の互い
に直向する方向であり、かつ前記交叉方向の前記基板の
端面部分が平坦状に形成されていることを特徴とするス
プレー装置。(3) Utility model registration In claim 1, the shape of the substrate is circular, the intersecting direction is a direction in which the substrates are perpendicular to each other, and the end face portion of the substrate in the intersecting direction is flat. A spray device characterized by being formed in a shape.
JP8709184U 1984-06-12 1984-06-12 spray equipment Granted JPS614772U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8709184U JPS614772U (en) 1984-06-12 1984-06-12 spray equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8709184U JPS614772U (en) 1984-06-12 1984-06-12 spray equipment

Publications (2)

Publication Number Publication Date
JPS614772U true JPS614772U (en) 1986-01-13
JPH049031Y2 JPH049031Y2 (en) 1992-03-06

Family

ID=30638992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8709184U Granted JPS614772U (en) 1984-06-12 1984-06-12 spray equipment

Country Status (1)

Country Link
JP (1) JPS614772U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636728U (en) * 1986-06-30 1988-01-18

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5043564U (en) * 1973-08-16 1975-05-01
JPS54167678U (en) * 1978-05-16 1979-11-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5043564U (en) * 1973-08-16 1975-05-01
JPS54167678U (en) * 1978-05-16 1979-11-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636728U (en) * 1986-06-30 1988-01-18

Also Published As

Publication number Publication date
JPH049031Y2 (en) 1992-03-06

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