JPS6149452U - - Google Patents
Info
- Publication number
- JPS6149452U JPS6149452U JP13506384U JP13506384U JPS6149452U JP S6149452 U JPS6149452 U JP S6149452U JP 13506384 U JP13506384 U JP 13506384U JP 13506384 U JP13506384 U JP 13506384U JP S6149452 U JPS6149452 U JP S6149452U
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- hardness
- semiconductor
- semiconductor scribe
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Dicing (AREA)
Description
図は本考案実施例の半導体スクライブブレーク
用シートを用いた分割工程の説明図である。
１…半導体スクライブブレーク用シート、１１
…軟質シート、１２…硬質シート、２…薄膜シー
ト、３…ウエハ、４…ローラ。
The figure is an explanatory diagram of a dividing process using a semiconductor scribe-break sheet according to an embodiment of the present invention. 1... Semiconductor scribe break sheet, 11
... Soft sheet, 12... Hard sheet, 2... Thin film sheet, 3... Wafer, 4... Roller.
Claims (1)
スクライブプレーク用シート。 (2) 前記硬度はウエハ側が下側より硬い事を特
徴とする前記半導体スクライブブレーク用シート
。[Claims for Utility Model Registration] (1) A sheet for semiconductor scribe plate made by laminating multiple sheets with different hardness. (2) The semiconductor scribe break sheet, wherein the hardness is higher on the wafer side than on the lower side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13506384U JPS6149452U (en) | 1984-09-05 | 1984-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13506384U JPS6149452U (en) | 1984-09-05 | 1984-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6149452U true JPS6149452U (en) | 1986-04-03 |
Family
ID=30693564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13506384U Pending JPS6149452U (en) | 1984-09-05 | 1984-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6149452U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5084172A (en) * | 1973-11-27 | 1975-07-07 | ||
| JPS5815355B2 (en) * | 1977-09-09 | 1983-03-25 | 日立造船株式会社 | Powder cargo carrier |
-
1984
- 1984-09-05 JP JP13506384U patent/JPS6149452U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5084172A (en) * | 1973-11-27 | 1975-07-07 | ||
| JPS5815355B2 (en) * | 1977-09-09 | 1983-03-25 | 日立造船株式会社 | Powder cargo carrier |
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