JPS6149452U - - Google Patents

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Publication number
JPS6149452U
JPS6149452U JP13506384U JP13506384U JPS6149452U JP S6149452 U JPS6149452 U JP S6149452U JP 13506384 U JP13506384 U JP 13506384U JP 13506384 U JP13506384 U JP 13506384U JP S6149452 U JPS6149452 U JP S6149452U
Authority
JP
Japan
Prior art keywords
sheet
hardness
semiconductor
semiconductor scribe
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13506384U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13506384U priority Critical patent/JPS6149452U/ja
Publication of JPS6149452U publication Critical patent/JPS6149452U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
図は本考案実施例の半導体スクライブブレーク
用シートを用いた分割工程の説明図である。 1…半導体スクライブブレーク用シート、11
…軟質シート、12…硬質シート、2…薄膜シー
ト、3…ウエハ、4…ローラ。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 硬度の異なる複数枚を積層してなる半導体
    スクライブプレーク用シート。 (2) 前記硬度はウエハ側が下側より硬い事を特
    徴とする前記半導体スクライブブレーク用シート
JP13506384U 1984-09-05 1984-09-05 Pending JPS6149452U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13506384U JPS6149452U (ja) 1984-09-05 1984-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13506384U JPS6149452U (ja) 1984-09-05 1984-09-05

Publications (1)

Publication Number Publication Date
JPS6149452U true JPS6149452U (ja) 1986-04-03

Family

ID=30693564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13506384U Pending JPS6149452U (ja) 1984-09-05 1984-09-05

Country Status (1)

Country Link
JP (1) JPS6149452U (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5084172A (ja) * 1973-11-27 1975-07-07
JPS5815355B2 (ja) * 1977-09-09 1983-03-25 日立造船株式会社 粉粒状貨物運搬船

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5084172A (ja) * 1973-11-27 1975-07-07
JPS5815355B2 (ja) * 1977-09-09 1983-03-25 日立造船株式会社 粉粒状貨物運搬船

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