JPS6149965U - - Google Patents

Info

Publication number
JPS6149965U
JPS6149965U JP13390684U JP13390684U JPS6149965U JP S6149965 U JPS6149965 U JP S6149965U JP 13390684 U JP13390684 U JP 13390684U JP 13390684 U JP13390684 U JP 13390684U JP S6149965 U JPS6149965 U JP S6149965U
Authority
JP
Japan
Prior art keywords
cathode
extraction electrode
emission current
high voltage
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13390684U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13390684U priority Critical patent/JPS6149965U/ja
Publication of JPS6149965U publication Critical patent/JPS6149965U/ja
Pending legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本案の一実施例を示した電界放射電子
鏡の概略図である。 ２…陰極、３…引出電極、６…引出電圧発生装
置、７…エミツシヨン電流検出器、８…比較器、
９…スイツチ制御器、１０…スイツチ回路、１１
…高電圧発生制御器。 FIG. 1 is a schematic diagram of a field emission electron mirror showing an embodiment of the present invention. 2... Cathode, 3... Extracting electrode, 6... Extracting voltage generator, 7... Emission current detector, 8... Comparator,
9...Switch controller, 10...Switch circuit, 11
...High voltage generation controller.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 陰極、該陰極に対向して置かれた引出電極、前
記陰極と前記引出電極間に直流高電圧を印加する
為の直流高電圧発生手段から成る電界放射電子銃
において、エミツシヨン電流を検出する手段、該
検出されたエミツシヨン電流値と基準値とを比較
する手段、及び該比較手段において検出されたエ
ミツシヨン電流値が基準値を越えると前記陰極と
前記引出電極間を短絡させる手段を具備したこと
を特徴とする電界放射電子銃。 In a field emission electron gun comprising a cathode, an extraction electrode placed opposite to the cathode, and a DC high voltage generating means for applying a DC high voltage between the cathode and the extraction electrode, means for detecting an emission current; It is characterized by comprising means for comparing the detected emission current value with a reference value, and means for short-circuiting between the cathode and the extraction electrode when the emission current value detected by the comparison means exceeds the reference value. A field emission electron gun.
JP13390684U 1984-09-05 1984-09-05 Pending JPS6149965U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13390684U JPS6149965U (en) 1984-09-05 1984-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13390684U JPS6149965U (en) 1984-09-05 1984-09-05

Publications (1)

Publication Number Publication Date
JPS6149965U true JPS6149965U (en) 1986-04-03

Family

ID=30692434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13390684U Pending JPS6149965U (en) 1984-09-05 1984-09-05

Country Status (1)

Country Link
JP (1) JPS6149965U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012127963A1 (en) * 2011-03-18 2012-09-27 電気化学工業株式会社 Enclosure and method for handling electron gun or ion gun

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012127963A1 (en) * 2011-03-18 2012-09-27 電気化学工業株式会社 Enclosure and method for handling electron gun or ion gun
JP5925764B2 (en) * 2011-03-18 2016-05-25 デンカ株式会社 Handling method and container of electron gun or ion gun
US9496673B2 (en) 2011-03-18 2016-11-15 Denka Company Limited Enclosure and method for handling electron gun or ion gun

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