JPS6153472A - 真空ポンプ - Google Patents

真空ポンプ

Info

Publication number
JPS6153472A
JPS6153472A JP17259284A JP17259284A JPS6153472A JP S6153472 A JPS6153472 A JP S6153472A JP 17259284 A JP17259284 A JP 17259284A JP 17259284 A JP17259284 A JP 17259284A JP S6153472 A JPS6153472 A JP S6153472A
Authority
JP
Japan
Prior art keywords
vacuum
degree
vacuum pump
valve
detection means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17259284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435632B2 (de
Inventor
Michio Nitta
新田　道夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Tokico Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokico Ltd filed Critical Tokico Ltd
Priority to JP17259284A priority Critical patent/JPS6153472A/ja
Publication of JPS6153472A publication Critical patent/JPS6153472A/ja
Publication of JPH0435632B2 publication Critical patent/JPH0435632B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Check Valves (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP17259284A 1984-08-20 1984-08-20 真空ポンプ Granted JPS6153472A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17259284A JPS6153472A (ja) 1984-08-20 1984-08-20 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17259284A JPS6153472A (ja) 1984-08-20 1984-08-20 真空ポンプ

Publications (2)

Publication Number Publication Date
JPS6153472A true JPS6153472A (ja) 1986-03-17
JPH0435632B2 JPH0435632B2 (de) 1992-06-11

Family

ID=15944704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17259284A Granted JPS6153472A (ja) 1984-08-20 1984-08-20 真空ポンプ

Country Status (1)

Country Link
JP (1) JPS6153472A (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100427935B1 (ko) * 2001-06-15 2004-04-28 현대자동차주식회사 엘피지 붐베의 압력조절장치
CN111720323A (zh) * 2020-06-29 2020-09-29 安徽美芝精密制造有限公司 压缩机的压缩机构
CN111720324A (zh) * 2020-06-29 2020-09-29 安徽美芝精密制造有限公司 压缩机构、旋转式压缩机和制冷装置
CN111720322A (zh) * 2020-06-29 2020-09-29 安徽美芝精密制造有限公司 压缩机
CN111720321A (zh) * 2020-06-29 2020-09-29 安徽美芝精密制造有限公司 压缩机构

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100427935B1 (ko) * 2001-06-15 2004-04-28 현대자동차주식회사 엘피지 붐베의 압력조절장치
CN111720323A (zh) * 2020-06-29 2020-09-29 安徽美芝精密制造有限公司 压缩机的压缩机构
CN111720324A (zh) * 2020-06-29 2020-09-29 安徽美芝精密制造有限公司 压缩机构、旋转式压缩机和制冷装置
CN111720322A (zh) * 2020-06-29 2020-09-29 安徽美芝精密制造有限公司 压缩机
CN111720321A (zh) * 2020-06-29 2020-09-29 安徽美芝精密制造有限公司 压缩机构
CN111720323B (zh) * 2020-06-29 2022-03-01 安徽美芝精密制造有限公司 压缩机的压缩机构
CN111720322B (zh) * 2020-06-29 2022-03-01 安徽美芝精密制造有限公司 压缩机
CN111720321B (zh) * 2020-06-29 2022-04-15 安徽美芝精密制造有限公司 压缩机构
CN111720324B (zh) * 2020-06-29 2022-04-15 安徽美芝精密制造有限公司 压缩机构、旋转式压缩机和制冷装置

Also Published As

Publication number Publication date
JPH0435632B2 (de) 1992-06-11

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