JPS6155063B2 - - Google Patents
Info
- Publication number
- JPS6155063B2 JPS6155063B2 JP3409282A JP3409282A JPS6155063B2 JP S6155063 B2 JPS6155063 B2 JP S6155063B2 JP 3409282 A JP3409282 A JP 3409282A JP 3409282 A JP3409282 A JP 3409282A JP S6155063 B2 JPS6155063 B2 JP S6155063B2
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- gas
- power
- voltage
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 6
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 39
- 230000035945 sensitivity Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3409282A JPS58151547A (ja) | 1982-03-05 | 1982-03-05 | 電力帰還型ガス検知装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3409282A JPS58151547A (ja) | 1982-03-05 | 1982-03-05 | 電力帰還型ガス検知装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58151547A JPS58151547A (ja) | 1983-09-08 |
| JPS6155063B2 true JPS6155063B2 (de) | 1986-11-26 |
Family
ID=12404625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3409282A Granted JPS58151547A (ja) | 1982-03-05 | 1982-03-05 | 電力帰還型ガス検知装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58151547A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6454733A (en) * | 1987-08-26 | 1989-03-02 | Toshiba Corp | Production device for semiconductor |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110208686B (zh) * | 2019-07-19 | 2024-05-03 | 深圳市无眼界科技有限公司 | 一种电化学传感器模拟装置 |
-
1982
- 1982-03-05 JP JP3409282A patent/JPS58151547A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6454733A (en) * | 1987-08-26 | 1989-03-02 | Toshiba Corp | Production device for semiconductor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58151547A (ja) | 1983-09-08 |
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