JPS6155334U - - Google Patents
Info
- Publication number
- JPS6155334U JPS6155334U JP13937584U JP13937584U JPS6155334U JP S6155334 U JPS6155334 U JP S6155334U JP 13937584 U JP13937584 U JP 13937584U JP 13937584 U JP13937584 U JP 13937584U JP S6155334 U JPS6155334 U JP S6155334U
- Authority
- JP
- Japan
- Prior art keywords
- push rod
- semiconductor manufacturing
- flexible body
- expands
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Description
第１図はこの考案の半導体製造装置の一実施例
の構成を示す断面図、第２図は第１図の円Ａの部
分の拡大断面図、第３図および第４図はそれぞれ
従来の熱処理装置の断面図である。
４…炉芯管、５…ガス流入口、６…押し棒挿入
用穴、７…キヤツプ、９…押し棒空間、１０…押
し棒、１２…フレキシブル体。
FIG. 1 is a cross-sectional view showing the configuration of an embodiment of the semiconductor manufacturing apparatus of this invention, FIG. 2 is an enlarged cross-sectional view of the circle A in FIG. 1, and FIGS. FIG. 2 is a cross-sectional view of the device. 4...Furnace core tube, 5...Gas inlet, 6...Push rod insertion hole, 7...Cap, 9...Push rod space, 10...Push rod, 12...Flexible body.
Claims (1)
縮ガスのガス圧力で膨張および収縮するフレキシ
ブル本体を設けたことを特徴とする半導体製造装
置。 A semiconductor manufacturing device characterized in that a push rod for automatically inserting a workpiece into a heat treatment furnace is provided with a flexible body that expands and contracts under the pressure of compressed gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13937584U JPS6155334U (en) | 1984-09-17 | 1984-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13937584U JPS6155334U (en) | 1984-09-17 | 1984-09-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6155334U true JPS6155334U (en) | 1986-04-14 |
Family
ID=30697752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13937584U Pending JPS6155334U (en) | 1984-09-17 | 1984-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6155334U (en) |
-
1984
- 1984-09-17 JP JP13937584U patent/JPS6155334U/ja active Pending
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