JPS6155336U - - Google Patents

Info

Publication number
JPS6155336U
JPS6155336U JP1984141406U JP14140684U JPS6155336U JP S6155336 U JPS6155336 U JP S6155336U JP 1984141406 U JP1984141406 U JP 1984141406U JP 14140684 U JP14140684 U JP 14140684U JP S6155336 U JPS6155336 U JP S6155336U
Authority
JP
Japan
Prior art keywords
substrate
masking
jig
resist
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984141406U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984141406U priority Critical patent/JPS6155336U/ja
Publication of JPS6155336U publication Critical patent/JPS6155336U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1984141406U 1984-09-17 1984-09-17 Pending JPS6155336U (bs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984141406U JPS6155336U (bs) 1984-09-17 1984-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984141406U JPS6155336U (bs) 1984-09-17 1984-09-17

Publications (1)

Publication Number Publication Date
JPS6155336U true JPS6155336U (bs) 1986-04-14

Family

ID=30699748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984141406U Pending JPS6155336U (bs) 1984-09-17 1984-09-17

Country Status (1)

Country Link
JP (1) JPS6155336U (bs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0356678U (bs) * 1989-09-27 1991-05-30
JP2001162207A (ja) * 1999-10-01 2001-06-19 Tokyo Electron Ltd 塗布装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0356678U (bs) * 1989-09-27 1991-05-30
JP2001162207A (ja) * 1999-10-01 2001-06-19 Tokyo Electron Ltd 塗布装置

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