JPS6157543U - - Google Patents
Info
- Publication number
- JPS6157543U JPS6157543U JP14126884U JP14126884U JPS6157543U JP S6157543 U JPS6157543 U JP S6157543U JP 14126884 U JP14126884 U JP 14126884U JP 14126884 U JP14126884 U JP 14126884U JP S6157543 U JPS6157543 U JP S6157543U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- semiconductor pressure
- diaphragm
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Description
第１図はこの考案の一実施例の構成を示す平面
図、第２図は従来の半導体圧力センサの構成を示
す平面図、第３図はゲージ抵抗の方向と感度温度
特性との関係を示す図である。 ５…シリコンダイヤフラム、６ａ〜６ｄ，７ａ
〜７ｄ，８ａ〜８ｄ，９ａ〜９ｄ…ゲージ抵抗。
図、第２図は従来の半導体圧力センサの構成を示
す平面図、第３図はゲージ抵抗の方向と感度温度
特性との関係を示す図である。 ５…シリコンダイヤフラム、６ａ〜６ｄ，７ａ
〜７ｄ，８ａ〜８ｄ，９ａ〜９ｄ…ゲージ抵抗。
Claims (1)
- 半導体圧力センサのダイヤフラム上の複数の所
定位置に各々、方向が異なる複数のゲージ抵抗を
形成してなる半導体圧力センサ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14126884U JPS6157543U (ja) | 1984-09-18 | 1984-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14126884U JPS6157543U (ja) | 1984-09-18 | 1984-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6157543U true JPS6157543U (ja) | 1986-04-17 |
Family
ID=30699611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14126884U Pending JPS6157543U (ja) | 1984-09-18 | 1984-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6157543U (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52139391A (en) * | 1976-05-17 | 1977-11-21 | Hitachi Ltd | Semiconductor strain gauge |
-
1984
- 1984-09-18 JP JP14126884U patent/JPS6157543U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52139391A (en) * | 1976-05-17 | 1977-11-21 | Hitachi Ltd | Semiconductor strain gauge |