JPS6170928U - - Google Patents
Info
- Publication number
- JPS6170928U JPS6170928U JP1984156772U JP15677284U JPS6170928U JP S6170928 U JPS6170928 U JP S6170928U JP 1984156772 U JP1984156772 U JP 1984156772U JP 15677284 U JP15677284 U JP 15677284U JP S6170928 U JPS6170928 U JP S6170928U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- heater
- room
- heating
- held
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984156772U JPS6170928U (cs) | 1984-10-16 | 1984-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984156772U JPS6170928U (cs) | 1984-10-16 | 1984-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6170928U true JPS6170928U (cs) | 1986-05-15 |
Family
ID=30714778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984156772U Pending JPS6170928U (cs) | 1984-10-16 | 1984-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6170928U (cs) |
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1984
- 1984-10-16 JP JP1984156772U patent/JPS6170928U/ja active Pending