JPS6177709A - 表面粗さ計測装置 - Google Patents

表面粗さ計測装置

Info

Publication number
JPS6177709A
JPS6177709A JP20004884A JP20004884A JPS6177709A JP S6177709 A JPS6177709 A JP S6177709A JP 20004884 A JP20004884 A JP 20004884A JP 20004884 A JP20004884 A JP 20004884A JP S6177709 A JPS6177709 A JP S6177709A
Authority
JP
Japan
Prior art keywords
data
contrast
surface roughness
measured
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20004884A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0536728B2 (fr
Inventor
Hiroshi Kitajima
博史 北島
Maki Yamashita
山下　牧
Nobuo Nakatsuka
中塚　信雄
Koji Morishita
森下　耕次
Tomiyoshi Yoshida
吉田　富省
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP20004884A priority Critical patent/JPS6177709A/ja
Publication of JPS6177709A publication Critical patent/JPS6177709A/ja
Publication of JPH0536728B2 publication Critical patent/JPH0536728B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP20004884A 1984-09-25 1984-09-25 表面粗さ計測装置 Granted JPS6177709A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20004884A JPS6177709A (ja) 1984-09-25 1984-09-25 表面粗さ計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20004884A JPS6177709A (ja) 1984-09-25 1984-09-25 表面粗さ計測装置

Publications (2)

Publication Number Publication Date
JPS6177709A true JPS6177709A (ja) 1986-04-21
JPH0536728B2 JPH0536728B2 (fr) 1993-05-31

Family

ID=16417958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20004884A Granted JPS6177709A (ja) 1984-09-25 1984-09-25 表面粗さ計測装置

Country Status (1)

Country Link
JP (1) JPS6177709A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0586795A1 (fr) * 1992-09-09 1994-03-16 TZN Forschungs- und Entwicklungszentrum Unterlüss GmbH Dispositif et procédé pour la détermination sans contact de la rugosité de surface de matériaux

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0586795A1 (fr) * 1992-09-09 1994-03-16 TZN Forschungs- und Entwicklungszentrum Unterlüss GmbH Dispositif et procédé pour la détermination sans contact de la rugosité de surface de matériaux

Also Published As

Publication number Publication date
JPH0536728B2 (fr) 1993-05-31

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