JPS6180618A - magnetic recording medium - Google Patents
magnetic recording mediumInfo
- Publication number
- JPS6180618A JPS6180618A JP20174184A JP20174184A JPS6180618A JP S6180618 A JPS6180618 A JP S6180618A JP 20174184 A JP20174184 A JP 20174184A JP 20174184 A JP20174184 A JP 20174184A JP S6180618 A JPS6180618 A JP S6180618A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- recording medium
- medium
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、磁気記録媒体に関し、更に詳しくいえば酸化
反応スパッタリングおよび熱処理で磁性媒体を形成する
磁気ディスクに関し、特に磁気ヘッドが磁気ディスクに
衝突することによって発生する摺動の信頼性を向上させ
るのに好適な磁気記録媒体に関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a magnetic recording medium, and more specifically to a magnetic disk in which a magnetic medium is formed by oxidation reaction sputtering and heat treatment. The present invention relates to a magnetic recording medium suitable for improving the reliability of sliding caused by this.
従来、Ｆｅ合金ターゲットまたはＦｅ酸化物ターゲット
を用いてスパッタリングおよび熱処理によって得られる
薄膜磁性媒体γ−Ｆｅ２０３は、特開昭５３−３０８０
０号公報に記載されているような方法によれば、スパッ
タリングおよび熱処理条件、製作工程等を考慮し、良好
な磁気特性を有するものが得られることになっている。Conventionally, a thin film magnetic medium γ-Fe203 obtained by sputtering and heat treatment using an Fe alloy target or Fe oxide target has been disclosed in Japanese Patent Application Laid-Open No. 53-3080.
According to the method described in Japanese Patent No. 0, it is possible to obtain a material having good magnetic properties by taking sputtering and heat treatment conditions, manufacturing steps, etc. into consideration.
しかし、薄膜磁性媒体γ−Ｆｅ２０３がどのような膜で
あれば、磁気ヘッドが磁気ディスクに衝突することによ
って発生ずる摺動の信頼性を向上できるかという点につ
いては配慮されていなかった。However, no consideration was given to what kind of film should be used for the thin film magnetic medium γ-Fe 203 to improve the reliability of the sliding movement that occurs when the magnetic head collides with the magnetic disk.
本発明の目的は、磁気ヘッドと磁気ディスクの衝突によ
って発生する摺動の信頼性を向上させる磁気記録媒体を
提供することにある。An object of the present invention is to provide a magnetic recording medium that improves the reliability of sliding caused by collision between a magnetic head and a magnetic disk.
上記目的を達成するために１本発明では、非磁性のディ
スク基板と該ディスク基板上にＦｅ合金ターゲット、ま
たはＦｅ酸化物ターゲットを用いて酸化反応スパッタリ
ングおよび熱処理により形成される薄膜磁性媒体γ−Ｆ
ｅ２０３より成る磁気ディスクにおいて、該薄膜磁性媒
体γ−Ｆｅ２ｏ３の保磁力をＨＣ（Ｏｅ）、上記ターゲ
ットに含まれるＧｏの含率（ｙｔ％）を〔ＣＯ３とする
とき、下記の式に示す範囲にある磁気特性を有すること
に特徴がある。In order to achieve the above object, the present invention provides a thin film magnetic medium γ-F formed by oxidation reaction sputtering and heat treatment using a non-magnetic disk substrate and an Fe alloy target or Fe oxide target on the disk substrate.
In a magnetic disk made of e203, the coercive force of the thin film magnetic medium γ-Fe2o3 is HC (Oe), and the Go content (yt%) in the target is [CO3, within the range shown in the following formula. It is characterized by having certain magnetic properties.
ＨＣ≧２００Ｘ（Ｃｏ〕＋２００ 〔本発明の実施例〕 以下１本発明の実施例を図面により説明する。HC≧200X(Co)+200 [Example of the present invention] An embodiment of the present invention will be described below with reference to the drawings.
一般的に磁気ディスクの磁性媒体の強度評価試験として
Ｃｏｎｔ、ａｃｔ Ｓ ｔａｒｔ、 Ｓ ｔｏｐ試
験〈以下。Cont, act start, and stop tests (hereinafter referred to as below) are generally used as strength evaluation tests for magnetic media of magnetic disks.
Ｃ，Ｓ、Ｓ、試験と略す〉がある、このＣ，Ｓ、Ｓ、試
験での薄膜磁性媒体γ−Ｆｅ２０３の摺動過程は、表面
層から徐々に削り取られていることがわかった。この現
象の原因は、薄膜磁性媒体γ−Ｆｅ２０３が数百λの微
粒子で構成されているためと考えられる。したがって、
このような数百への微粒子の離脱の度合が、Ｎ′ｃ、磁
性媒体γ−Ｆｅ２０３の保磁力ＨＣとの間に相関がある
といえる。It was found that the sliding process of the thin film magnetic medium γ-Fe203 in the C, S, S test was gradually scraped away from the surface layer. The reason for this phenomenon is considered to be that the thin film magnetic medium γ-Fe203 is composed of fine particles of several hundred λ. therefore,
It can be said that the degree of separation of fine particles into hundreds of particles is correlated with N'c and the coercive force HC of the magnetic medium γ-Fe203.
第１図は、本発明の一実施例を説明するためのスパッタ
装置構成図である。FIG. 1 is a configuration diagram of a sputtering apparatus for explaining one embodiment of the present invention.
第１図に、６いて、■は真空ポンプ、２はチャンバー、
３はガス導入口、４はＦ ｅ −Ｃｏ合金ターゲット、
５はＲＦ電源、６はディスク基板である。In Figure 1, 6 is a vacuum pump, 2 is a chamber,
3 is a gas inlet, 4 is an Fe-Co alloy target,
5 is an RF power supply, and 6 is a disk substrate.
真空ポンプ１によりチャンバー２の内部が真空にされた
状態でガス導入口３からアルゴンと酸素の混合ガスを導
入する。次に、Ｆｅ−Ｃｏ合金ターゲット４にＲＦ？！
！１ｌｌＸ５より電圧を印加して、ディスク基１１Ｊ６
の表面にＦｅ３Ｏ４膜をＱ、１６μｍの膜厚で形成する
。その後、大気空気中で３００°Ｃの状態で３時間の熱
酸化処理を行い、薄膜磁性媒体γ−Ｆｃ２０３膜を形成
する。このような形成方法において、チャンバー２内の
真空度、アルゴンとｉ！２素の混合比、印加電圧、Ｆｅ
−Ｃｏ合金ターゲット４のＣｏ含率等を制御して、保磁
力Ｈｅの異なる薄膜磁性媒体γ−Ｆｅｚ０３が形成でき
る。A mixed gas of argon and oxygen is introduced from the gas inlet 3 while the inside of the chamber 2 is evacuated by the vacuum pump 1 . Next, RF? !
! Applying voltage from 1llX5, disk base 11J6
A Fe3O4 film is formed on the surface of Q with a thickness of 16 μm. Thereafter, thermal oxidation treatment is performed for 3 hours at 300° C. in atmospheric air to form a thin magnetic medium γ-Fc203 film. In such a forming method, the degree of vacuum in the chamber 2, argon and i! Mixing ratio of two elements, applied voltage, Fe
By controlling the Co content etc. of the -Co alloy target 4, thin film magnetic media γ-Fez03 having different coercive forces He can be formed.
以上のようにして形成された膜をＦｅ−Ｃｏ合金ターゲ
ット４のＣｏ含率と保磁力ＨＣの関係についてまとめた
グラフを第２図に示す。FIG. 2 shows a graph summarizing the relationship between the Co content of the Fe--Co alloy target 4 and the coercive force HC of the film formed as described above.
第２図において、縦軸は保磁力Ｈｅ（Ｏｅ）、横軸はＣ
ｏ含率（ｗｔ％）を示しており、Ｑ内数字はサンプルＮ
ｎを示す。In Figure 2, the vertical axis is the coercive force He (Oe), and the horizontal axis is C
O content (wt%) is shown, and the number in Q is sample N.
Indicates n.
第３図は、第２図の各サンプルＮｏの薄膜磁性媒体γ−
Ｆｅ２０３について、ヘッド浮上スペーシング０．３μ
ｍでＣ，Ｓ、Ｓ、試験を行うサイクルを示している。こ
れは、各サンプルＮαの薄膜磁性媒体γ−Ｆｅ２０３か
ら成る磁気記録媒体を挿入した磁気ディスク装置におい
て、４０秒サイクルで５ＴＡＲＴ＜始動〉、定速回転く
ヘッド浮上状態〉、Ｓ ＴＯＰ＜停止〉を繰返すという
ことである。FIG. 3 shows the thin film magnetic medium γ− of each sample No. in FIG.
For Fe203, head flying spacing 0.3μ
m indicates a cycle in which C, S, S tests are performed. This means that in a magnetic disk drive into which a magnetic recording medium made of thin film magnetic medium γ-Fe203 of each sample Nα is inserted, 5 TART <start>, constant speed rotating head flying state>, and S TOP <stop> are performed in a 40 second cycle. It means repeating.
第３図に示すＣ，Ｓ、Ｓ、サイクルの条件のもとで測定
した結果を第４図に示す。第４図から明らかなように、
薄膜磁性媒体γ−Ｆｅ２０３の保磁力ＨＣが、ＨＣ≧２
００Ｘ（Ｃｏ）＋２００ ＜ただし、（Ｃｏ）：Ｃｏの
含率ｗｔ％〉より大きいサンプル（Ｎｎｔ−４＞のＣ，
Ｓ、Ｓ、結果は約１００００回、前記条件より小さいサ
ンプル（Ｎｏ、５〜８〉は約２０００回であった。FIG. 4 shows the results of measurements under the C, S, S cycle conditions shown in FIG. 3. As is clear from Figure 4,
The coercive force HC of the thin film magnetic medium γ-Fe203 is HC≧2
00
S, S, the results were about 10,000 times, and the samples smaller than the above conditions (Nos. 5 to 8) were about 2,000 times.
本実施例によれば薄膜磁性媒体γ−Ｆｅ２０３のＣ，Ｓ
、Ｓ、強度が約５倍向上する。According to this example, C, S of the thin film magnetic medium γ-Fe203
, S, the strength is improved by about 5 times.
以上説明したように、本発明によれば、磁気ヘッドと磁
気ディスクの衝突によって発生する摺動の信頼性を向上
させることができる。As described above, according to the present invention, it is possible to improve the reliability of sliding caused by collision between a magnetic head and a magnetic disk.
第１図は本発明の一実施例を説明するためのスパッタ装
置構成図、第２図は薄膜磁性媒体γ−Ｆｅ２０３におけ
るＣｏ含率と保磁力ＨＣの関係を示すグラフ、第３図は
Ｃ，Ｓ、Ｓ、試験のサイクルタイムを示す図、第４図は
Ｃ，Ｓ、Ｓ、試験測定結果を示す図である。
１：真空ポンプ、２：チャンバー、３：ガス導入０．４
：Ｆｅ−Ｃｏ合金ターゲット、５：ＲＦ電源、６：ディ
スク基板。
第 １ しｊ
第 ２ ｍ
Ｃｏ３率（ｗｔ％）
第、！１図
二
＝
時間（秒）
第４図FIG. 1 is a configuration diagram of a sputtering apparatus for explaining an embodiment of the present invention, FIG. 2 is a graph showing the relationship between Co content and coercive force HC in thin film magnetic medium γ-Fe203, and FIG. 3 is a graph showing the relationship between C, FIG. 4 is a diagram showing the cycle time of the S, S test, and FIG. 4 is a diagram showing the measurement results of the C, S, S test. 1: Vacuum pump, 2: Chamber, 3: Gas introduction 0.4
: Fe-Co alloy target, 5: RF power supply, 6: disk substrate. 1st shij 2nd m Co3 rate (wt%) th! Figure 1 2 = Time (seconds) Figure 4
Claims (1)
合金ターゲット、またはＦｅ酸化物ターゲットを用いて
酸化反応スパッタリング、および熱処理により形成され
る薄膜磁性媒体γ−Ｆｅ＿２Ｏ＿３より成る磁気ディス
クにおいて、該薄膜磁性媒体γ−Ｆｅ＿２Ｏ＿３の保磁
力をＨ＿Ｃ（Ｏｅ）、上記ターゲットに含まれるＣ＿Ｏ
の含率（ｗｔ％）を〔Ｃ＿Ｏ〕とするとき、下記の式に
示す範囲にある磁気特性を有することを特徴とする磁気
記録媒体。 Ｈ＿Ｃ≧２００×〔Ｃ＿Ｏ〕＋２００(1) A non-magnetic disk substrate and Fe on the disk substrate.
In a magnetic disk made of a thin film magnetic medium γ-Fe_2O_3 formed by oxidation reaction sputtering and heat treatment using an alloy target or an Fe oxide target, the coercive force of the thin film magnetic medium γ-Fe_2O_3 is expressed as H_C(Oe) and above. C_O included in target
A magnetic recording medium characterized in that it has magnetic properties within the range shown by the following formula, where the content (wt%) of C_O is [C_O]. H_C≧200×[C_O]+200
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20174184A JPS6180618A (en) | 1984-09-28 | 1984-09-28 | magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20174184A JPS6180618A (en) | 1984-09-28 | 1984-09-28 | magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6180618A true JPS6180618A (en) | 1986-04-24 |
Family
ID=16446166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20174184A Pending JPS6180618A (en) | 1984-09-28 | 1984-09-28 | magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6180618A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5030332A (en) * | 1990-04-19 | 1991-07-09 | Massachusetts Institute Of Technology | Method for making magnetic oxide precipitates |
| US12022771B2 (en) | 2015-10-14 | 2024-07-02 | The Toro Company | Walk reel mower with pivotal shield |
-
1984
- 1984-09-28 JP JP20174184A patent/JPS6180618A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5030332A (en) * | 1990-04-19 | 1991-07-09 | Massachusetts Institute Of Technology | Method for making magnetic oxide precipitates |
| US12022771B2 (en) | 2015-10-14 | 2024-07-02 | The Toro Company | Walk reel mower with pivotal shield |
| US12514156B2 (en) | 2015-10-14 | 2026-01-06 | The Toro Company | Walk reel mower with side plate cutouts for drop out reel |
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