JPS618152B2 - - Google Patents
Info
- Publication number
- JPS618152B2 JPS618152B2 JP7189979A JP7189979A JPS618152B2 JP S618152 B2 JPS618152 B2 JP S618152B2 JP 7189979 A JP7189979 A JP 7189979A JP 7189979 A JP7189979 A JP 7189979A JP S618152 B2 JPS618152 B2 JP S618152B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7189979A JPS55164076A (en) | 1979-06-08 | 1979-06-08 | Method for dry etching |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7189979A JPS55164076A (en) | 1979-06-08 | 1979-06-08 | Method for dry etching |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55164076A JPS55164076A (en) | 1980-12-20 |
| JPS618152B2 true JPS618152B2 (2) | 1986-03-12 |
Family
ID=13473837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7189979A Granted JPS55164076A (en) | 1979-06-08 | 1979-06-08 | Method for dry etching |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55164076A (2) |
-
1979
- 1979-06-08 JP JP7189979A patent/JPS55164076A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55164076A (en) | 1980-12-20 |