JPS6182957U - - Google Patents
Info
- Publication number
- JPS6182957U JPS6182957U JP16653084U JP16653084U JPS6182957U JP S6182957 U JPS6182957 U JP S6182957U JP 16653084 U JP16653084 U JP 16653084U JP 16653084 U JP16653084 U JP 16653084U JP S6182957 U JPS6182957 U JP S6182957U
- Authority
- JP
- Japan
- Prior art keywords
- groove portion
- base material
- reaction chamber
- axial direction
- tube body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 239000000376 reactant Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は、本考案の一実施例になる化学気相蒸
着装置の縦断面図、第２図は第１図に示す化学気
相蒸着装置の内部構造の要部側面図、第３図は従
来の化学気相蒸着装置の縦断面図、第４図は第３
図に示す化学気相蒸着装置の内部の要部側面図で
ある。
符号の説明、１…ヒータ、２，２ａ…反応室、
３，３ａ…下ふた、４，４ａ…上ふた、５…基材
、５ａ…基材下端面、５ｂ…基材上端面、５ｃ，
５ｄ…基材側面、６…原料ガス、７…反応ガス、
８…排ガス、９…支持体、１０…ガスノズル、１
１…排ガスポート、１２…下部支持体、１２ａ…
管体、１２ｂ…Ｕ字形溝部、１２ｃ…面、１２ｄ
…端面、１２ｅ…細溝部、１２ｆ…開口部、１２
ｇ…溝部、１３…上部支持体、１３ａ…管体、１
３ｇ…溝部。
FIG. 1 is a vertical cross-sectional view of a chemical vapor deposition apparatus according to an embodiment of the present invention, FIG. 2 is a side view of the main part of the internal structure of the chemical vapor deposition apparatus shown in FIG. 1, and FIG. A vertical cross-sectional view of a conventional chemical vapor deposition apparatus, FIG.
FIG. 2 is a side view of the main parts inside the chemical vapor deposition apparatus shown in the figure. Explanation of symbols, 1... Heater, 2, 2a... Reaction chamber,
3, 3a...Lower lid, 4,4a...Upper lid, 5...Base material, 5a...Base material lower end surface, 5b...Base material upper end surface, 5c,
5d...Substrate side surface, 6...Source gas, 7...Reactant gas,
8... Exhaust gas, 9... Support, 10... Gas nozzle, 1
1... Exhaust gas port, 12... Lower support, 12a...
Pipe body, 12b... U-shaped groove, 12c... Surface, 12d
...End face, 12e...Narrow groove, 12f...Opening, 12
g...Groove, 13...Upper support, 13a...Pipe body, 1
3g... Groove.
Claims (1)
面形状字形の溝部を設け、該溝部の対抗する両
面の先端に管体の軸方向と平行な端面を連設し、
上記溝部の対抗する両面にまたは該両面から両端
面にわたり複数個の細溝部を管体の軸方向に形成
してなる支持体を、外周にヒータを設けた筒状の
反応室の両端部に取付け、反応室内において被蒸
着物となる板状の基材を、該基材の対抗する両端
部を上記各支持体の溝部の両面に当接して挾持し
うるように挿着した化学気相蒸着装置。 A groove portion having a vertical cross-sectional shape is provided at the end of the tube body through which gas is introduced or discharged, and end surfaces parallel to the axial direction of the tube body are connected to the tips of opposite surfaces of the groove portion,
A support body in which a plurality of thin grooves are formed in the axial direction of the tubular body on opposing surfaces of the groove portion or from both surfaces to both end surfaces is attached to both ends of a cylindrical reaction chamber provided with a heater on the outer periphery. A chemical vapor deposition apparatus in which a plate-shaped base material to be deposited is inserted in a reaction chamber so that the opposite ends of the base material can be held in contact with both sides of the grooves of each of the supports. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16653084U JPS6182957U (en) | 1984-11-02 | 1984-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16653084U JPS6182957U (en) | 1984-11-02 | 1984-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6182957U true JPS6182957U (en) | 1986-06-02 |
Family
ID=30724339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16653084U Pending JPS6182957U (en) | 1984-11-02 | 1984-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6182957U (en) |
-
1984
- 1984-11-02 JP JP16653084U patent/JPS6182957U/ja active Pending