JPS6183027U - - Google Patents
Info
- Publication number
- JPS6183027U JPS6183027U JP16732084U JP16732084U JPS6183027U JP S6183027 U JPS6183027 U JP S6183027U JP 16732084 U JP16732084 U JP 16732084U JP 16732084 U JP16732084 U JP 16732084U JP S6183027 U JPS6183027 U JP S6183027U
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- semiconductor integrated
- furnace core
- core tube
- manufacturing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000012159 carrier gas Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000376 reactant Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の一実施例を示す断面図、第２
図は従来装置を示す断面図である。
１…排気ダクト、３…ウエハー、４…吸入口、
６…炉芯管。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a sectional view showing a conventional device. 1...Exhaust duct, 3...Wafer, 4...Inlet,
6... Furnace core tube.
Claims (1)
半導体集積回路装置の製造装置において、炉芯管
のウエハー挿入側管端に真空引き用排気ダクトを
有し、かつ反対側管端に反応ガス及びキヤリアガ
スの吸入口を有することを特徴とする半導体集積
回路装置の製造装置。 In a manufacturing device for semiconductor integrated circuit devices that accommodates and processes wafers in a furnace core tube, the furnace core tube has an exhaust duct for evacuation at the wafer insertion side tube end, and a reactant gas and A manufacturing device for a semiconductor integrated circuit device, characterized by having a carrier gas inlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16732084U JPS6183027U (en) | 1984-11-02 | 1984-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16732084U JPS6183027U (en) | 1984-11-02 | 1984-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6183027U true JPS6183027U (en) | 1986-06-02 |
Family
ID=30725120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16732084U Pending JPS6183027U (en) | 1984-11-02 | 1984-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6183027U (en) |
-
1984
- 1984-11-02 JP JP16732084U patent/JPS6183027U/ja active Pending
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